WO2005094354A3 - Gas/ion species selective membrane supported by multi-stage nano-hole array metal structure - Google Patents

Gas/ion species selective membrane supported by multi-stage nano-hole array metal structure Download PDF

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Publication number
WO2005094354A3
WO2005094354A3 PCT/US2005/010601 US2005010601W WO2005094354A3 WO 2005094354 A3 WO2005094354 A3 WO 2005094354A3 US 2005010601 W US2005010601 W US 2005010601W WO 2005094354 A3 WO2005094354 A3 WO 2005094354A3
Authority
WO
WIPO (PCT)
Prior art keywords
negative
template
gas
metallic
metal structure
Prior art date
Application number
PCT/US2005/010601
Other languages
French (fr)
Other versions
WO2005094354A2 (en
Inventor
Sangkyun Kang
Yong-Il Park
Friedrich B Prinz
Suk-Won Cha
Yuji Saito
Ali Farvid
Pei-Chen Su
Original Assignee
Univ Leland Stanford Junior
Honda Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Leland Stanford Junior, Honda Motor Co Ltd filed Critical Univ Leland Stanford Junior
Priority to CA002561537A priority Critical patent/CA2561537A1/en
Priority to JP2007506490A priority patent/JP4879883B2/en
Priority to EP05757172A priority patent/EP1737553A4/en
Publication of WO2005094354A2 publication Critical patent/WO2005094354A2/en
Publication of WO2005094354A3 publication Critical patent/WO2005094354A3/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B01D53/228Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion characterised by specific membranes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D67/00Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039Inorganic membrane manufacture
    • B01D67/0053Inorganic membrane manufacture by inducing porosity into non porous precursor membranes
    • B01D67/006Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
    • B01D67/0062Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods by micromachining techniques, e.g. using masking and etching steps, photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D69/00Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/02Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor characterised by their properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D69/00Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/10Supported membranes; Membrane supports
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D69/00Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/10Supported membranes; Membrane supports
    • B01D69/108Inorganic support material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D71/00Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02Inorganic material
    • B01D71/022Metals
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D71/00Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02Inorganic material
    • B01D71/022Metals
    • B01D71/0223Group 8, 9 or 10 metals
    • B01D71/02231Palladium
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D71/00Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02Inorganic material
    • B01D71/022Metals
    • B01D71/0223Group 8, 9 or 10 metals
    • B01D71/02232Nickel
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D71/00Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02Inorganic material
    • B01D71/024Oxides
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/86Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/8605Porous electrodes
    • H01M4/861Porous electrodes with a gradient in the porosity
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/86Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/8647Inert electrodes with catalytic activity, e.g. for fuel cells consisting of more than one material, e.g. consisting of composites
    • H01M4/8657Inert electrodes with catalytic activity, e.g. for fuel cells consisting of more than one material, e.g. consisting of composites layered
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/86Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/90Selection of catalytic material
    • H01M4/92Metals of platinum group
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00Fuel cells; Manufacture thereof
    • H01M8/10Fuel cells with solid electrolytes
    • H01M8/12Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
    • H01M8/1213Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the electrode/electrolyte combination or the supporting material
    • H01M8/1226Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the electrode/electrolyte combination or the supporting material characterised by the supporting layer
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2325/00Details relating to properties of membranes
    • B01D2325/02Details relating to pores or porosity of the membranes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2325/00Details relating to properties of membranes
    • B01D2325/02Details relating to pores or porosity of the membranes
    • B01D2325/0283Pore size
    • B01D2325/02833Pore size more than 10 and up to 100 nm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2325/00Details relating to properties of membranes
    • B01D2325/04Characteristic thickness
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30Hydrogen technology
    • Y02E60/50Fuel cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12014All metal or with adjacent metals having metal particles
    • Y10T428/12028Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, etc.]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/29Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2913Rod, strand, filament or fiber
    • Y10T428/2933Coated or with bond, impregnation or core
    • Y10T428/294Coated or with bond, impregnation or core including metal or compound thereof [excluding glass, ceramic and asbestos]
    • Y10T428/2942Plural coatings
    • Y10T428/2944Free metal in coating
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/31678Of metal

Abstract

An improved two-step replication process for fabrication of porous metallic membranes is provided. A negative of a porous non-metallic template is made by infiltration of a liquid precursor into the template, curing the precursor to form a solid negative, and removing the template to expose the negative. Metal is deposited to surround the exposed negative. Removal of the negative provides a porous metallic membrane having pores which replicate the pores of the original template membrane. The negative is kept immersed in a liquid at all times between removing the template and depositing the metal. This immersion eliminates damage to the negative that would be incurred in drying the negative out between these processing steps. Another aspect of the invention is metallic membranes prepared according to the preceding method. For example, metallic membranes having pores smaller on one side than on the other side of the membrane are provided.
PCT/US2005/010601 2004-03-30 2005-03-30 Gas/ion species selective membrane supported by multi-stage nano-hole array metal structure WO2005094354A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CA002561537A CA2561537A1 (en) 2004-03-30 2005-03-30 Gas/ion species selective membrane supported by multi-stage nano-hole array metal structure
JP2007506490A JP4879883B2 (en) 2004-03-30 2005-03-30 Multistage nanohole array metal membrane production method and gas / ion species selective membrane production method supported by the membrane structure
EP05757172A EP1737553A4 (en) 2004-03-30 2005-03-30 Gas/ion species selective membrane supported by multi-stage nano-hole array metal structure

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US55835104P 2004-03-30 2004-03-30
US60/558,351 2004-03-30

Publications (2)

Publication Number Publication Date
WO2005094354A2 WO2005094354A2 (en) 2005-10-13
WO2005094354A3 true WO2005094354A3 (en) 2006-04-27

Family

ID=35064315

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/010601 WO2005094354A2 (en) 2004-03-30 2005-03-30 Gas/ion species selective membrane supported by multi-stage nano-hole array metal structure

Country Status (5)

Country Link
US (2) US7108813B2 (en)
EP (1) EP1737553A4 (en)
JP (1) JP4879883B2 (en)
CA (1) CA2561537A1 (en)
WO (1) WO2005094354A2 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050093018A (en) * 2004-03-18 2005-09-23 한국과학기술연구원 Efficient 3-d nanostructured membranes
US7108813B2 (en) * 2004-03-30 2006-09-19 The Board Of Trustees Of The Leland Stanford Junior University Gas/ion species selective membrane supported by multi-stage nano-hole array metal structure
US7323033B2 (en) * 2004-04-30 2008-01-29 Lucent Technologies Inc. Nanostructured surfaces having variable permeability
US7700520B2 (en) * 2005-04-22 2010-04-20 Institute Of Nuclear Energy Research Methods of making platinum and platinum alloy catalysts with nanonetwork structures
WO2006119252A2 (en) * 2005-04-29 2006-11-09 University Of Rochester Ultrathin nanoscale membranes, methods of making, and uses thereof
JP2008540070A (en) * 2005-04-29 2008-11-20 ユニバーシティー オブ ロチェスター Ultrathin porous nanoscale membrane, its production method and use
JP2009529888A (en) * 2006-03-14 2009-08-27 ユニバーシティ オブ ロチェスター Cell culture device having ultra-thin porous membrane and use thereof
WO2008141444A1 (en) * 2007-05-18 2008-11-27 Sim Composites Inc. Catalyst-coated proton exchange membrane and process of producing same
RU2455054C2 (en) * 2009-10-23 2012-07-10 Федеральное государственное бюджетное учреждение науки Ордена Трудового Красного Знамени Институт нефтехимического синтеза им. А.В. Топчиева Российской академии наук (ИНХС РАН) Flow module for membrane catalysis and gas separation and method of its fabrication
US8956696B2 (en) 2011-02-10 2015-02-17 Inficon Gmbh Ultra-thin membrane for chemical analyzer and related method for forming membrane
CN106654290B (en) * 2015-10-30 2019-06-25 中国科学院大连化学物理研究所 Multistage stepped hole structure water transport plate and its preparation
CN106887597B (en) * 2015-12-15 2019-06-04 中国科学院大连化学物理研究所 A kind of water transport plate and preparation method thereof of bore diameter gradient distribution
US11177498B1 (en) 2018-10-15 2021-11-16 Ampcera Inc. Redox flow batteries, components for redox flow batteries and methods for manufacture thereof
US11819806B1 (en) 2018-10-15 2023-11-21 Ampcera Inc. Methods for manufacturing a solid state ionic conductive membrane on a macro porous support scaffold
US11600853B1 (en) 2019-05-14 2023-03-07 Ampcera Inc. Systems and methods for storing, transporting, and handling of solid-state electrolytes
CN114744211B (en) * 2022-05-13 2024-03-29 南京邮电大学 Hyperbranched oxidized porous metal negative electrode current collector and preparation method thereof

Family Cites Families (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1107811A (en) * 1963-09-20 1968-03-27 Energy Conversion Ltd Improvements in and relating to structures incorporating thin metal membranes
US4186100A (en) * 1976-12-13 1980-01-29 Mott Lambert H Inertial filter of the porous metal type
US5603983A (en) * 1986-03-24 1997-02-18 Ensci Inc Process for the production of conductive and magnetic transitin metal oxide coated three dimensional substrates
US4857080A (en) * 1987-12-02 1989-08-15 Membrane Technology & Research, Inc. Ultrathin composite metal membranes
JPH07118327B2 (en) * 1990-07-07 1995-12-18 日本碍子株式会社 Solid oxide fuel cell and porous electrode body used therefor
US5645626A (en) * 1990-08-10 1997-07-08 Bend Research, Inc. Composite hydrogen separation element and module
US5498278A (en) * 1990-08-10 1996-03-12 Bend Research, Inc. Composite hydrogen separation element and module
JPH0748378B2 (en) * 1991-03-28 1995-05-24 日本碍子株式会社 Air electrode for solid electrolyte fuel cell and solid electrolyte fuel cell having the same
DE4202454C1 (en) * 1992-01-29 1993-07-29 Siemens Ag, 8000 Muenchen, De
US5451386A (en) * 1993-05-19 1995-09-19 The State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Osu Hydrogen-selective membrane
US6159987A (en) * 1994-03-28 2000-12-12 Taiho Pharmaceuticals, Co. Bicyclolactam compounds, use thereof and intermediates for preparing thereof
US5663488A (en) * 1995-05-31 1997-09-02 Hewlett-Packard Co. Thermal isolation system in an analytical instrument
US5620807A (en) * 1995-08-31 1997-04-15 The Dow Chemical Company Flow field assembly for electrochemical fuel cells
JP3182522B2 (en) * 1996-12-20 2001-07-03 ファインセラミックス技術研究組合 Ceramic membrane having one-dimensional through-holes and method of manufacturing the same
US6673127B1 (en) * 1997-01-22 2004-01-06 Denora S.P.A. Method of forming robust metal, metal oxide, and metal alloy layers on ion-conductive polymer membranes
US5998058A (en) * 1998-04-29 1999-12-07 International Fuel Cells Corporation Porous support layer for an electrochemical cell
CN1163998C (en) * 1998-08-05 2004-08-25 日本电池株式会社 Polymer dielectric membrne, electrochemical unit and manufacture of polymer dielectric membrane
US6335082B1 (en) * 1999-02-03 2002-01-01 Mdf, Inc. Reformed medium density fiber board products, such as door skins, and a process for reforming medium density fiber board
US6680013B1 (en) * 1999-04-15 2004-01-20 Regents Of The University Of Minnesota Synthesis of macroporous structures
US6368751B1 (en) * 1999-10-08 2002-04-09 Reves, Inc. Electrochemical electrode for fuel cell
US6720105B2 (en) * 1999-11-17 2004-04-13 Neah Power Systems, Inc. Metallic blocking layers integrally associated with fuel cell electrode structures and fuel cell electrode stack assemblies
DE10039596C2 (en) * 2000-08-12 2003-03-27 Omg Ag & Co Kg Supported metal membrane, process for its manufacture and use
DE10039595B4 (en) * 2000-08-12 2006-06-01 Umicore Ag & Co. Kg Method for producing a metal composite membrane, metal composite membrane produced therewith and their use
US6929764B2 (en) * 2000-11-17 2005-08-16 William Marsh Rice University Polymers having ordered, monodisperse pores and their corresponding ordered, monodisperse colloids
US6518194B2 (en) * 2000-12-28 2003-02-11 Thomas Andrew Winningham Intermediate transfer layers for nanoscale pattern transfer and nanostructure formation
US6797422B2 (en) * 2001-01-25 2004-09-28 Gas Technology Institute Air-breathing direct methanol fuel cell with metal foam current collectors
US6916454B2 (en) * 2001-03-30 2005-07-12 Siemens Westinghouse Power Corporation Metal gas separation membrane
JP2002355537A (en) * 2001-05-29 2002-12-10 Daido Steel Co Ltd Hydrogen permeable film and producing method thereof
US6498278B1 (en) * 2001-09-05 2002-12-24 Huntsman Petrochemical Corporation Alkoxylation of 6-membered alkylene carbonates
US6743543B2 (en) * 2001-10-31 2004-06-01 Motorola, Inc. Fuel cell using variable porosity gas diffusion material
WO2004040670A2 (en) * 2002-05-29 2004-05-13 The Board Of Trustees Of The Leland Stanford Junior University Solid oxide electrolyte with ion conductivity enhancement by dislocation
JP2006520686A (en) * 2003-03-21 2006-09-14 ウスター ポリテクニック インスティチュート Composite gas separation module with intermediate metal layer
US7255726B2 (en) * 2003-05-02 2007-08-14 Worcester Polytechnic Institute Composite gas separation modules having high Tamman temperature intermediate layers
US6913985B2 (en) * 2003-06-20 2005-07-05 Oki Data Corporation Method of manufacturing a semiconductor device
US7108813B2 (en) * 2004-03-30 2006-09-19 The Board Of Trustees Of The Leland Stanford Junior University Gas/ion species selective membrane supported by multi-stage nano-hole array metal structure

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
LEI Y. ET AL: "Preparation of highly ordered nanoporous Co membranes assembled by small quantum-sized Co particles", J. VAC. SCI. TECHNOLOGY B19, vol. 4, July 2001 (2001-07-01), pages 1109 - 1114, XP012008835 *
MASUDA H. ET AL: "Fabrication of Pét microporous electrodes from anodic porous alumina and immobilization of GOD into their micripores", JOURNAL OF ELECTROANALYTICAL CHEMISTRY, vol. 368, 25 April 1994 (1994-04-25), pages 333 - 336, XP002995092 *

Also Published As

Publication number Publication date
US7431838B2 (en) 2008-10-07
JP2008514384A (en) 2008-05-08
EP1737553A2 (en) 2007-01-03
US20060273004A1 (en) 2006-12-07
US20050242022A1 (en) 2005-11-03
US7108813B2 (en) 2006-09-19
CA2561537A1 (en) 2005-10-13
JP4879883B2 (en) 2012-02-22
EP1737553A4 (en) 2009-07-15
WO2005094354A2 (en) 2005-10-13

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