WO2005116621A3 - Microelectro-mechanical chemical sensor - Google Patents

Microelectro-mechanical chemical sensor Download PDF

Info

Publication number
WO2005116621A3
WO2005116621A3 PCT/US2005/018446 US2005018446W WO2005116621A3 WO 2005116621 A3 WO2005116621 A3 WO 2005116621A3 US 2005018446 W US2005018446 W US 2005018446W WO 2005116621 A3 WO2005116621 A3 WO 2005116621A3
Authority
WO
WIPO (PCT)
Prior art keywords
cantilever
microelectro
sensor
material layer
chemical sensor
Prior art date
Application number
PCT/US2005/018446
Other languages
French (fr)
Other versions
WO2005116621A2 (en
Inventor
Robert Andrew Mcgill
Gary K Fedder
Ioana Voiculescu
Original Assignee
Us Gov Navy Naval Res Lab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Us Gov Navy Naval Res Lab filed Critical Us Gov Navy Naval Res Lab
Publication of WO2005116621A2 publication Critical patent/WO2005116621A2/en
Publication of WO2005116621A3 publication Critical patent/WO2005116621A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G01N2291/0257—Adsorption, desorption, surface mass change, e.g. on biosensors with a layer containing at least one organic compound

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Micromachines (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

A microelectro-mechanical chemical sensor includes an active cantilever beam having a chemically selective material layer disposed thereon and at least one, preferably two, resistors with a resistance corresponding to a deflection of the cantilever. The sensor also has at least two, and preferably four, auxiliary cantilever beams adjacent to the active cantilever and attached to the same substrate, each having a having a piezoresistor disposed thereon. The piezoresistors are elements of a Wheatstone bridge, and the Wheatstone bridge output indicates the amount of a predetermined target chemical sorbed by the chemically selective material layer. The sensor can be operated in a static mode or electrostatically actuated to deflect the cantilever out of the plane of the chip.
PCT/US2005/018446 2004-05-25 2005-05-25 Microelectro-mechanical chemical sensor WO2005116621A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US57438804P 2004-05-25 2004-05-25
US60/574,388 2004-05-25

Publications (2)

Publication Number Publication Date
WO2005116621A2 WO2005116621A2 (en) 2005-12-08
WO2005116621A3 true WO2005116621A3 (en) 2007-04-26

Family

ID=35451503

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/018446 WO2005116621A2 (en) 2004-05-25 2005-05-25 Microelectro-mechanical chemical sensor

Country Status (2)

Country Link
US (1) US7556775B2 (en)
WO (1) WO2005116621A2 (en)

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FR2881730B1 (en) * 2005-02-08 2007-06-01 Commissariat Energie Atomique MICROMECHANICAL DEVICE COMPRISING A MOBILE BEAM
US7838322B1 (en) * 2005-02-28 2010-11-23 Tessera MEMS Technologies, Inc. Method of enhancing an etch system
US7372026B2 (en) * 2005-05-13 2008-05-13 Hewlett-Packard Development Company, L.P. System for repositioning a microfabricated cantilever
KR100868758B1 (en) * 2007-01-15 2008-11-13 삼성전기주식회사 Rotational MEMS device having piezo-resistor sensor
US8168120B1 (en) 2007-03-06 2012-05-01 The Research Foundation Of State University Of New York Reliable switch that is triggered by the detection of a specific gas or substance
EP1975592A1 (en) * 2007-03-28 2008-10-01 F. Hoffmann-la Roche AG Sorption micro-array
WO2009136978A2 (en) * 2008-03-04 2009-11-12 Massachusetts Institute Of Technology Devices and methods for determination of species including chemical warfare agents
US8770043B2 (en) * 2008-06-05 2014-07-08 National University Corporation Shizuoka University Comb-structured MEMS accelerometer
US7956621B2 (en) * 2008-06-11 2011-06-07 Analog Devices, Inc. Anti-capture method and apparatus for micromachined devices
EP2158840B1 (en) * 2008-08-27 2014-09-10 Biotronik CRM Patent AG Implantable biosensor and sensor assembly
WO2010123482A2 (en) 2008-12-12 2010-10-28 Massachusetts Institute Of Technology High charge density structures, including carbon-based nanostructures and applications thereof
US7924018B2 (en) * 2008-12-19 2011-04-12 Illinois Tool Works Inc. MEMS electrometer that measures amount of repulsion of adjacent beams from each other for static field detection
US7940040B2 (en) * 2008-12-19 2011-05-10 Illinois Tool Works Inc. Foil-leaf electrometer for static field detection with triggered indicator
US7915897B2 (en) * 2008-12-19 2011-03-29 Illinois Tool Works Inc. Foil-leaf electrometer for static field detection with permanently separating leaves
US8456073B2 (en) 2009-05-29 2013-06-04 Massachusetts Institute Of Technology Field emission devices including nanotubes or other nanoscale articles
US20110171629A1 (en) * 2009-11-04 2011-07-14 Massachusetts Institute Of Technology Nanostructured devices including analyte detectors, and related methods
TWI420537B (en) * 2009-12-29 2013-12-21 Univ Nat Taiwan Temperature self-compensation system and device and method for temperature compensation
IT1402181B1 (en) * 2010-09-13 2013-08-28 Fond Istituto Italiano Di Tecnologia ELECTRO-ACTIVE MICROELETTROMECHANICAL DEVICE AND RELATIVE DETECTION PROCEDURE
EP2635525A2 (en) 2010-11-03 2013-09-11 Massachusetts Institute Of Technology Compositions comprising functionalized carbon-based nanostructures and related methods
WO2012125592A1 (en) * 2011-03-15 2012-09-20 California Institute Of Technology Localized deposition of polymer film on nanocantilever chemical vapor sensors by surface-initiated atom transfer radical polymerization
JP5833752B2 (en) * 2011-06-29 2015-12-16 インベンセンス, インク.Invensense, Inc. Hermetically sealed MEMS devices partially exposed to the environment with vertical integrated electronic circuits
FR2980261B1 (en) * 2011-09-20 2013-10-18 Imv Technologies FREEZING ASSEMBLY OF A PLURALITY OF PACKAGING TUBES EACH COMPLETED WITH A PREDETERMINED VOLUME OF BIOLOGICAL SUBSTANCE
US9103705B2 (en) 2012-02-27 2015-08-11 Freescale Semiconductor, Inc. Combined environmental parameter sensor
WO2013143150A1 (en) * 2012-03-31 2013-10-03 西安交通大学 Method for on-line rapid measurement of fluid density using piezoresistive microcantilever
EP2977811A1 (en) 2014-07-25 2016-01-27 Trumpf Laser Marking Systems AG System with a piezoresistive position sensor
US9896327B2 (en) * 2016-05-19 2018-02-20 Invensense, Inc. CMOS-MEMS structures with out-of-plane MEMS sensing gap
US10838107B2 (en) 2017-05-03 2020-11-17 Pgs Geophysical As Sensor system for measuring acceleration and pressure
US11307326B2 (en) * 2017-05-03 2022-04-19 Pgs Geophysical As Calibration of combined acceleration and pressure sensors
US11331019B2 (en) 2017-08-07 2022-05-17 The Research Foundation For The State University Of New York Nanoparticle sensor having a nanofibrous membrane scaffold
WO2019090323A1 (en) 2017-11-06 2019-05-09 Massachusetts Institute Of Technology High functionalization density graphene
JP7049747B2 (en) * 2019-03-13 2022-04-07 旭化成株式会社 Gas sensor, content component detection device equipped with gas sensor, inspection system equipped with gas sensor, inspection method of gas sensor, manufacturing method of gas sensor
US20210255082A1 (en) * 2020-02-19 2021-08-19 Tdk Corporation Methods and Devices for Detecting Particles Using a Cantilever Sensor
DE102021107255A1 (en) * 2021-03-23 2022-09-29 digid GmbH Digital sensor with reference cantilever for converting chemical and/or biochemical information
DE102021107254A1 (en) * 2021-03-23 2022-09-29 digid GmbH Digital sensor device for detecting an analyte in a sample

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WO2003071258A1 (en) * 2002-02-22 2003-08-28 Cantion A/S Sensor comprising an array of piezoresistors
WO2003104784A1 (en) * 2002-06-07 2003-12-18 Cantion A/S A cantilever sensor with a current shield and a method for its production
WO2004083802A2 (en) * 2003-03-18 2004-09-30 Cantion A/S A cantilever array chemical sensor

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US5756631A (en) * 1994-05-27 1998-05-26 The United States Of America As Represented By The Secretary Of The Navy Siloxanes with strong hydrogen bond donating functionalities
US6575020B1 (en) * 1999-05-03 2003-06-10 Cantion A/S Transducer for microfluid handling system
US6497141B1 (en) * 1999-06-07 2002-12-24 Cornell Research Foundation Inc. Parametric resonance in microelectromechanical structures
US20030062193A1 (en) * 2001-09-07 2003-04-03 Jacob Thaysen Flexible structure with integrated sensor/actuator
WO2003071258A1 (en) * 2002-02-22 2003-08-28 Cantion A/S Sensor comprising an array of piezoresistors
WO2003104784A1 (en) * 2002-06-07 2003-12-18 Cantion A/S A cantilever sensor with a current shield and a method for its production
WO2004083802A2 (en) * 2003-03-18 2004-09-30 Cantion A/S A cantilever array chemical sensor

Also Published As

Publication number Publication date
US7556775B2 (en) 2009-07-07
US20050276726A1 (en) 2005-12-15
WO2005116621A2 (en) 2005-12-08

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