WO2006014455A3 - Microwave plasma nozzle with enhanced plume stability and heating efficiency - Google Patents

Microwave plasma nozzle with enhanced plume stability and heating efficiency Download PDF

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Publication number
WO2006014455A3
WO2006014455A3 PCT/US2005/023886 US2005023886W WO2006014455A3 WO 2006014455 A3 WO2006014455 A3 WO 2006014455A3 US 2005023886 W US2005023886 W US 2005023886W WO 2006014455 A3 WO2006014455 A3 WO 2006014455A3
Authority
WO
WIPO (PCT)
Prior art keywords
microwave plasma
gas flow
plasma nozzle
flow tube
microwave
Prior art date
Application number
PCT/US2005/023886
Other languages
French (fr)
Other versions
WO2006014455A2 (en
Inventor
Sang Hun Lee
Jay Joongsoo Kim
Original Assignee
Amarante Technologies Inc
Noritsu Koki Co Ltd
Sang Hun Lee
Jay Joongsoo Kim
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Amarante Technologies Inc, Noritsu Koki Co Ltd, Sang Hun Lee, Jay Joongsoo Kim filed Critical Amarante Technologies Inc
Priority to AU2005270006A priority Critical patent/AU2005270006B2/en
Priority to CA2572391A priority patent/CA2572391C/en
Priority to US11/631,723 priority patent/US8035057B2/en
Priority to EP05769522.3A priority patent/EP1787500B1/en
Priority to KR1020087023257A priority patent/KR100946434B1/en
Priority to JP2007520452A priority patent/JP5060951B2/en
Priority to CN200580022852XA priority patent/CN101002508B/en
Publication of WO2006014455A2 publication Critical patent/WO2006014455A2/en
Publication of WO2006014455A3 publication Critical patent/WO2006014455A3/en

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/461—Microwave discharges
    • H05H1/463—Microwave discharges using antennas or applicators
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/461—Microwave discharges
    • H05H1/4622—Microwave discharges using waveguides

Abstract

Systems and methods for generating microwave plasma are disclosed. The present invention provides a microwave plasma nozzle (26) that includes a gas flow tube (40), and a rod-shaped conductor (34) that is disposed in the gas flow tube (40) and has a tip (33) near the outlet of the gas flow tube (40). A portion (35) of the rod-shaped conductor (34) extends into a microwave cavity (24) to receive microwaves passing in the cavity (24). These received microwaves are focused at the tip (33) to heat the gas into plasma. The microwave plasma nozzle (26) also includes a vortex guide (36) between the rod-shaped conductor (34) and the gas flow tube (40) imparting a helical shaped flow direction to the gas flowing through the tube (40). The microwave plasma nozzle (26) further includes a shielding mechanism (108) for reducing a microwave power loss through the gas flow tube (40).
PCT/US2005/023886 2004-07-07 2005-07-07 Microwave plasma nozzle with enhanced plume stability and heating efficiency WO2006014455A2 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
AU2005270006A AU2005270006B2 (en) 2004-07-07 2005-07-07 Microwave plasma nozzle with enhanced plume stability and heating efficiency
CA2572391A CA2572391C (en) 2004-07-07 2005-07-07 Microwave plasma nozzle with enhanced plume stability and heating efficiency
US11/631,723 US8035057B2 (en) 2004-07-07 2005-07-07 Microwave plasma nozzle with enhanced plume stability and heating efficiency
EP05769522.3A EP1787500B1 (en) 2004-07-07 2005-07-07 Microwave plasma nozzle with enhanced plume stability and heating efficiency
KR1020087023257A KR100946434B1 (en) 2004-07-07 2005-07-07 Microwave plasma nozzle with enhanced plume stability and heating efficiency, plasma generating system and method thereof
JP2007520452A JP5060951B2 (en) 2004-07-07 2005-07-07 Plasma generation system
CN200580022852XA CN101002508B (en) 2004-07-07 2005-07-07 Microwave plasma nozzle with enhanced plume stability and heating efficiency

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/885,237 2004-07-07
US10/885,237 US7164095B2 (en) 2004-07-07 2004-07-07 Microwave plasma nozzle with enhanced plume stability and heating efficiency

Publications (2)

Publication Number Publication Date
WO2006014455A2 WO2006014455A2 (en) 2006-02-09
WO2006014455A3 true WO2006014455A3 (en) 2007-01-18

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/023886 WO2006014455A2 (en) 2004-07-07 2005-07-07 Microwave plasma nozzle with enhanced plume stability and heating efficiency

Country Status (9)

Country Link
US (2) US7164095B2 (en)
EP (1) EP1787500B1 (en)
JP (1) JP5060951B2 (en)
KR (2) KR100906836B1 (en)
CN (1) CN101002508B (en)
AU (1) AU2005270006B2 (en)
CA (1) CA2572391C (en)
RU (1) RU2355137C2 (en)
WO (1) WO2006014455A2 (en)

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