WO2006029292A3 - Method and apparatus of driving torsional resonance mode of a probe-based instrument - Google Patents

Method and apparatus of driving torsional resonance mode of a probe-based instrument Download PDF

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Publication number
WO2006029292A3
WO2006029292A3 PCT/US2005/032098 US2005032098W WO2006029292A3 WO 2006029292 A3 WO2006029292 A3 WO 2006029292A3 US 2005032098 W US2005032098 W US 2005032098W WO 2006029292 A3 WO2006029292 A3 WO 2006029292A3
Authority
WO
WIPO (PCT)
Prior art keywords
probe
drive signals
torsional
cantilever
torsional resonance
Prior art date
Application number
PCT/US2005/032098
Other languages
French (fr)
Other versions
WO2006029292A2 (en
Inventor
Chanmin Su
Robert Daniels
Original Assignee
Veeco Instr Inc
Chanmin Su
Robert Daniels
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Veeco Instr Inc, Chanmin Su, Robert Daniels filed Critical Veeco Instr Inc
Publication of WO2006029292A2 publication Critical patent/WO2006029292A2/en
Publication of WO2006029292A3 publication Critical patent/WO2006029292A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/26—Friction force microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G01Q60/34—Tapping mode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders

Abstract

A method of operating a scanning probe microscope includes using a probe having a cantilever, and oscillating the probe at a torsional resonance frequency thereof. In addition, the method includes substantially increasing torsional drive efficiency with dual actuators disposed on the probe or the probe base. First and second actuators may be driven by corresponding first and second drive signals, the first and second drive signals being about 180 degrees out of phase. The maximizing step includes altering at least one of the amplitudes of the first and second drive signals to maximize torsional oscillation. Torsional and flexural oscillation of the cantilever probe can be excited concurrently, sequentially or independently by adjusting the phase of the corresponding drive signals. A pair of cantilever components can be used to form a nanotweezer by rotating the respective arms having corresponding tip portions at the distal ends.
PCT/US2005/032098 2004-09-09 2005-09-09 Method and apparatus of driving torsional resonance mode of a probe-based instrument WO2006029292A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/937,597 2004-09-09
US10/937,597 US7168301B2 (en) 2002-07-02 2004-09-09 Method and apparatus of driving torsional resonance mode of a probe-based instrument

Publications (2)

Publication Number Publication Date
WO2006029292A2 WO2006029292A2 (en) 2006-03-16
WO2006029292A3 true WO2006029292A3 (en) 2006-09-14

Family

ID=36037010

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/032098 WO2006029292A2 (en) 2004-09-09 2005-09-09 Method and apparatus of driving torsional resonance mode of a probe-based instrument

Country Status (2)

Country Link
US (2) US7168301B2 (en)
WO (1) WO2006029292A2 (en)

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US7155964B2 (en) * 2002-07-02 2007-01-02 Veeco Instruments Inc. Method and apparatus for measuring electrical properties in torsional resonance mode
US7168301B2 (en) * 2002-07-02 2007-01-30 Veeco Instruments Inc. Method and apparatus of driving torsional resonance mode of a probe-based instrument
US7596990B2 (en) 2004-04-14 2009-10-06 Veeco Instruments, Inc. Method and apparatus for obtaining quantitative measurements using a probe based instrument
JP2006118867A (en) * 2004-10-19 2006-05-11 Hitachi Kenki Fine Tech Co Ltd Scanning probe microscope and measuring method using it
EP1816100A1 (en) * 2004-11-22 2007-08-08 National University Corporation Kagawa University Nano tweezers and scanning probe microscope having the same
US7989164B2 (en) * 2005-04-22 2011-08-02 The Board Of Trustees Of The Leland Stanford Junior University Detection of macromolecular complexes with harmonic cantilevers
US20070144244A1 (en) * 2005-12-28 2007-06-28 Karma Technology, Inc. Probe module with integrated actuator for a probe microscope
US7555940B2 (en) * 2006-07-25 2009-07-07 Veeco Instruments, Inc. Cantilever free-decay measurement system with coherent averaging
JP4900594B2 (en) * 2007-06-01 2012-03-21 エスアイアイ・ナノテクノロジー株式会社 Sample handling device
US20090032705A1 (en) * 2007-07-31 2009-02-05 Schroeder Dale W Fast Tip Scanning For Scanning Probe Microscope
US8686714B2 (en) * 2008-08-08 2014-04-01 Nxp, B.V. Electromechanical transducer and a method of providing an electromechanical transducer
SG171994A1 (en) 2008-12-11 2011-07-28 Infinitesima Ltd Dynamic probe detection system
EP2409165A1 (en) * 2009-03-16 2012-01-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Scanning force microscope
US20110041224A1 (en) * 2009-08-06 2011-02-17 Purdue Research Foundation Atomic force microscope including accelerometer
US20120047610A1 (en) * 2010-04-09 2012-02-23 Boise State University Cantilever-based optical interface force microscope
US8756710B2 (en) * 2012-08-31 2014-06-17 Bruker-Nano, Inc. Miniaturized cantilever probe for scanning probe microscopy and fabrication thereof
WO2014138660A1 (en) 2013-03-08 2014-09-12 Bruker Nano, Inc. Method and apparatus of physical property measurement using a probe-based nano-localized light source
DE102014212311A1 (en) 2014-06-26 2015-12-31 Carl Zeiss Smt Gmbh Scanning probe microscope and method of inspecting a high aspect ratio surface
JP2017181135A (en) * 2016-03-29 2017-10-05 株式会社日立ハイテクサイエンス Scanning type probe microscope and method for detecting the probe contact
US10884022B2 (en) * 2017-01-10 2021-01-05 Osaka University Scanner and scanning probe microscope
CN109856427A (en) * 2017-11-30 2019-06-07 清华大学 Detection device, detection system and the detection method of surface force distribution
CN109856428A (en) * 2017-11-30 2019-06-07 清华大学 Piezoelectric Ceramics Excitation device and atomic force microscope, surface field of force detection device
CN114107886A (en) * 2021-11-22 2022-03-01 滨州渤海活塞有限公司 Automatic ring infiltration device and ring infiltration method
CN117269323B (en) * 2023-11-23 2024-02-13 吉林大学 Micro-resonance type mass sensor for magnetic suspended matters in liquid and detection method

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JPH04321954A (en) * 1991-04-22 1992-11-11 Canon Inc Cantilever type probe, and scanning tunnelling microscope using this probe, and information processor
US20060005614A1 (en) * 2004-07-08 2006-01-12 Board Of Trustees Of The Leland Stanford Torsional harmonic cantilevers for detection of high frequency force components in atomic force microscopy

Also Published As

Publication number Publication date
US7168301B2 (en) 2007-01-30
US20050028583A1 (en) 2005-02-10
US20070119241A1 (en) 2007-05-31
US7574903B2 (en) 2009-08-18
WO2006029292A2 (en) 2006-03-16

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