WO2006062370A1

WO2006062370A1 - Rapid isolation valve

Info

Publication number: WO2006062370A1
Application number: PCT/KR2005/004208
Authority: WO
Inventors: Chang-Hyun Ji
Original assignee: Aon Instrument
Priority date: 2004-12-11
Filing date: 2005-12-08
Publication date: 2006-06-15

Abstract

Embodiments of the present invention relate to the valve which is applied to the vacuum apparatus used in semiconductor manufacture line or display manufacture line, and relate to the rapid isolation valve which can intercept promptly and prevent the reverse flow of atmospheric pressure, due to the abrupt fault of the vacuum pump, into the vacuum apparatus. Embodiments of the present invention provide a function of a kind of delay channel (time delay) so that the cutoff valve may be intercepted before back pressure flows into the chamber through channels by making channels in the form of meanders by three cylindrical cylinders, and also can react by operating the cutoff valve promptly when back pressure occurs. In particular, it can promptly react to minute pressure differences by using the light alloy in the shape of peaked hat for the cutoff valve.

Description

RAPID ISOLATION VALVE

Technical Field

[1] The present invention relate to the valve which is applied to the vacuum apparatus used in semiconductor manufacture line or display manufacture line, and more specifically relate to the rapid isolation valve which can intercept promptly and prevent the reverse flow of atmospheric pressure, due to the abrupt fault of the vacuum pump, into the vacuum apparatus Background Art

[2] Vacuum apparatuses are used in semiconductor manufacture line or plasma display manufacture line, and the vacuum pump is used to make vacuum. For the above semiconductor manufacture facilities, a unit process of deposition or etching goes on in vacuum state or very low atmospheric pressure state, but in the case that the vacuum pump gets out of order abruptly or stops to operate, it does great damage to the process going on.

Disclosure of Invention Technical Problem

[3] That is, when the pump stops to operate, the atmospheric pressure flows conversely into the vacuum facility, and it produces particles in products in the vacuum chamber and does damage to them. Accordingly, when the pump which extracts vacuum from the vacuum facilities stops to operate, there exists a problem that products being manufactured in the vacuum chamber should be protected, and to solve the problem it is required to intercept promptly the inflow of atmospheric pressure into the vacuum chamber against the occurrence of back pressure. Brief Description of the Drawings

[4] FIG.1 is the clinographic drawing that shows the assembled state of the isolation valve according to the present invention.

[5] FIG.2 and FIG.3 are the state drawing that separates parts composing the isolation valve according to the present invention and the drawing that shows approximately the assembled state of them, respectively.

[6] FIG.4 is the conceptual drawing to describe the operating principle of the isolation valve according to the present invention.

[7] FIG.5 and FIG.6 show the separated state of parts composing the isolation valve according to the good detailed description of the present invention and show the assembled state of them, respectively.

[8] FIG.7 to FIG.12 show the cross section and plan of parts composing the isolation valve according to the present invention.

[9] FlG.13 and FlG.14 describe the operation of the isolation valve according to another detailed description of the present invention.

[ 10] FlG.15 to FlG.17 shows the composition of the isolation valve according to another detailed description of the present invention. Mode for the Invention

[11] In the following, the good detailed descriptions about the isolation valve are made according to the present invention by reference to FlG.1 to F1G.7, the attached drawings.

[12] FlG.1 is the clinographic drawing showing the assembled state of the isolation valve according to the present invention. Referring to FlG.1, the isolation valve according to the present invention is composed of the first cylindrical body (10), the second cylindrical body(not plotted) and the third cylindrical body(not plotted), and the second cylindrical body and the third cylindrical body are assembled inside the first cylindrical body and accordingly are not shown in FlG.1. Referring to FlG.1 again, one inlet of the first cylindrical body (10) will be connected to the tube in the direction of the vacuum chamber, and the other inlet the tube in the vacuum pump side. That is, the top and bottom of the first cylindrical body (10) are covered by covers and can be assembled by screws(61), and openings in the center of both covers are connected to the ducts in the vacuum chamber side and in the vacuum pump side, respectively.

[13] F1G.2 and F1G.3 are the state drawing that separates parts composing the isolation valve according to the present invention and the drawing that shows approximately the assembled state of them, respectively. F1G.2 shows the first cylindrical body(lθ), the second cylindrical body(20) and the third cylindrical body(20) separately which compose the isolation valve according to the present invention, and if the second cylindrical body (20) is inserted into the first cylindrical body (10), channels are formed between the peripheral surfaces of the circumference of the second cylindrical body (20) and the circumference of the first cylindrical body (10).

[14] That is, in the case that the second cylindrical body(20) is assembled in the first cylindrical body(lθ), protuberances(21) formed on the peripheral circumferential surface of the second cylindrical body(20) make the clearance between the inner circumferential surface of the first cylindrical body (10) and the outer circumferential surface of the second cylindrical body(lθ), and the clearance becomes the vertical channel.

[15] Also, the channel formation guide(15) is provided to form the horizontal channel in the top clearance of the cylinder, between the upper cover(not plotted) and the second cylindrical body(20). Also, another channel formation guide(25) is provided to form the horizontal channel in the lower surface clearance between the second cylindrical body(20) and the lower cover(not plotted), and the channel formation guide(35) is provided to form the vertical channel in the third cylindrical body(30).

[16] FlG.3 is the conceptual drawing showing the state that the first, second and third cylindrical bodies, which compose the isolation valve according to the present invention, and the cutoff valve is also plotted. Referring to F1G.3, the cutoff valve(40) in the shape of a peaked hat is plotted as a good detailed description according to the present invention, and also the flat circular valve can be used as another detailed description.

[17] When the isolation valve according to the present invention operates normally, as shown in FlG.3, the channel is formed along the direction of the arrow channel shown in the state that the cutoff valve(40) descends. Then, the channel(lOO) formed between the circumferential surfaces of the first cylindrical body (10) and the second cylindrical body(20), the channel(llθ) formed between the circumferential surfaces of the second cylindrical body(20) and the third cylindrical body(30) and the channel(130) penetrating the inside of the third cylindrical body(30) finally make the "D" shape channel in the form of meanders.

[18] F1G.4 is the conceptual drawing to describe the operating principle of the isolation valve according to the present invention. Referring to F1G.4, at the time of normal operation, the cutoff valve descends and channels are formed through 100, 110 and 120 from the vacuum chamber. On the other hand, if pressure in the pump side rises due to the fault of the pump, the cutoff valve(40) in the shape of a peaked hat ascends and intercept the channel. Also, a flat plate can be used for the cutoff valve.

[19] That is, as a good detailed description of this invention, the cutoff valve can be manufactured by magnesium alloy, and the cutoff valve(40) opens and shuts the channel by its ascending or descending due to the pressure difference between points A and B. Then, it is possible to operate promptly the cutoff valve by centering back pressure on a point when back pressure occurs, and can have the angle of the cutoff valve(40) in the shape of a peaked hat be about 120° That is, it is possible to have the less interior angle of the section of isosceles triangle be about 15°.

[20] As a good detailed description of this invention, the above cutoff valve can be operated keenly, by manufacturing it by magnesium light alloy, even when the pressure difference of both sides is even 10 Pascal. Also, O-ring(50) is attached on the contact surface of the cutoff valve(40) and the first cylindrical body (10) for complete sealing, and it is desirable for the thickness to be kept within lmm.

[21] F1G.5 and F1G.6 show the separated state of parts composing the isolation valve according to the good detailed description of the present invention and show the assembled state of them, respectively. Referring to F1G.5, the isolation valve according to the present invention is composed of the upper cover(60), the lower cover(70), the first cylindrical body(lθ), the second cylindrical body(20) and the third cylindrical body(30).

[22] Also, the upper cover(60) and the lower cover(70) are assembled in the first cylindrical body(lθ) by screws(61), and the channel formation guides(15, 25, 35) leading channels are plotted. Referring to F1G.6, the upper drawing shows the state that the cutoff valve(40) intercepted the channel when an accident occurred, and the lower drawing shows the state that the channel is opened with the ascent of the cutoff valve(40). In the case of detailed description according to the present invention, shown in F1G.6, the shape of the cutoff valve(40) is plotted in the form of a flat plate rather than a peaked hat. The upper drawing of F1G.6 shows the state that the cutoff valve is ascent because of the rise of the atmospheric pressure due to the occurrence of the fault of the pump.

[23] F1G.7 to FlG.12 show the cross section and plan of parts composing the isolation valve according to the present invention. F1G.7 is the drawing that shows the upper cover(60), which is combined with the first cylindrical body(lθ). By attaching O- ring(73) to the upper cover, the sealed state can be improved. F1G.8 shows the third cylindrical body(30) and the channel formation guide(35) is plotted, and the above channel formation guide(35) is established to be connected to the inner groove of the second cylindrical body(20).

[24] F1G.9 shows the detailed description of the second cylindrical body(20) comprising the isolation valve according to the present invention. Referring to F1G.9, the second cylindrical body(20) has a donut shape with the center empty, and the channel formation guides are formed on the upper and lower surfaces, respectively. Also, the protrudent structure is formed on the periphery of the circumferential surface of the second cylindrical body(20) and forms channels by making a gap with the first cylindrical body (10).

[25] FlG.10 shows the cutoff valve(40) comprising the isolation valve according to the present invention. As explained earlier, the cutoff valve(40) may have a flat plate or a peaked hat shape, and it is possible in the case of a peaked hat shape to have less interior angle be about 15°.

[26] F1G.11 and F1G.12 show the first cylindrical body(lθ) and the lower cover(70) comprising the isolation valve according to the present invention, and O-ring(17) is plotted.

[27] FlG.13 and FlG.14, as another detailed description of the present invention, describes the operation that a user lifts the cutoff valve(40) intentionally and protect the vacuum area. Referring to FlG.13 and FlG.14, to secure the space of channels leading the inflow of air as a modified detailed description of the second cylindrical body(20) of the foregoing F1G.4, when the isolation valve according to the present invention is operated, back pressure is produced and the cutoff valve(40) moves upwards automatically, and as a result it is possible to protect the vacuum area, but there are cases that a user should lift the cutoff valve(40) intentionally and make the interception. For this, in FIG.6 and FIG.7 below, the composition of the artificial move of the cutoff valve(40) begins. The air inflow path(21) and the second cylindrical body (20') with the inside empty are provided. That is, referring to FIG.14, it is possible to have the cutoff valve(40) connected move upwards by making air flow intentionally into the second cylindrical body(20') with the inside empty.

[28] As the good detailed description of the present invention, the above second cylindrical body(30) is composed of bellows, and it is possible to make the above cutoff valve(40) ascend or descend vertically, with the channel connected to the inner space of the above second cylindrical body(20) being formed and the above bellows spreading by hydraulic pressure that is flowed intentionally into the above inner space through the above channel.

[29] FIG.15 to FIG.16, as mentioned earlier, in the case that a user is to make an interception by moving upwards the cutoff valve(40) intentionally, show various detailed descriptions of the driving method which moves the cutoff valve.

[30] Referring to FIG.15, it is possible to make the cutoff valve move upwards by making the helical gear(102) move vertically by rotating the horizontal axis(lθl) by rotating the gear handler(90) in the outside of the isolation valve.

[31] FIG.16 shows another detailed description of the present invention, and it is possible to have the cutoff valve(40) move upwards by moving upwards the rack gear(122) after rotating the gear handler(90).

[32] FIG.17 shows another modified detailed description of the present invention, and it is possible to have the cutoff valve(40) move vertically by rotating the rack gear(200) after inserting the cylindrical rack gear(200) into the inside of the second cylindrical body(30). In the case of the detailed description of FIG.15, the cutoff valve(40) moves vertically by inserting the double helical gear(102) into the inside of the second cylindrical body(20), a couple of vertical helical gear(102) should be set up 180°and the exposure of the gear can be avoided by adding the guide in the inside of the valve.

[33] Also, in the case of the detailed description of FIG.16, the vertical motion can be induced by making the helical gear(122) contact with the center of the cutoff valve(40), and exposure can be avoided by adding the guide in the inside of the valve.

[34] In the case of the rack gear(200) shown in FIG.17, the top plate(20') of the second cylindrical body is pushed by the movement of the gear(90), and then the cutoff valve(40) is supposed to ascend.

[35] In the foregoing contents, the characteristics and technical advantages of the present invention were described more or less broadly so that the scope of the patent application about the invention described later can be understood well. Additional characteristics and advantages composing the scope of the patent application of the present invention will be described in detail. It should be understood by those skilled in the art that the concept and specific detailed description of the present invention presented can be readily applied as a basis of the design or adjustment of other structure to achieve the purpose similar to that of the present invention.

[36] Also, the concept and detailed description of the present invention presented can be readily applied by those skilled in the art as a basis for adjusting or designing other structure to achieve the purpose equivalent to that of the present invention. Also, as for the equivalent structure adjusted or modified by those skilled in the art, various improvements, alternatives and modifications are possible without departing from the spirit and scope of the invention described in the scope of the patent application.

[37]

Industrial Applicability

[38] As stated above, the present invention can react by operating the cutoff valve promptly prior to the inflow of back pressure when back pressure occurs, by making channels in the form of meanders by three cylindrical cylinders and then by delaying time for back pressure to flow into the chamber. In particular, it can promptly react to minute pressure differences by using the light alloy in the shape of peaked hat for the cutoff valve.

Claims

[1] The isolation valve is attached between the vacuum chamber side and the vacuum pump side, and isolates the above vacuum chamber side from the above vacuum pump side at the time of pressure rise due to the malfunction in the vacuum pump side, wherein: the above isolation valve is sealed by the first cover(60) with an inlet connected to the tube of the above vacuum chamber side and the second cover(70) with an inlet connected to the tube of the above vacuum pump side, and the first cylindrical body(lθ) having an empty space inside, wherein: it is inserted into the inner empty space of the above first cylindrical body (10) and assembled, and has a cylindrical disk shape like donut with an empty space having the radius of a fixed length in the center. With the protrudent structure on the external surface of the cylinder, when it is inserted into the above first cylindrical body, it forms channels in vertical direction between the perimeters of both circumferential surfaces, and on the upper and lower surfaces of the above cylindrical disk in the shape of donut, respectively, channels formation guides are formed and the second cylindrical body(20) forms channels in horizontal direction are formed, wherein: it is inserted into the central empty space of the above second cylindrical body(20) and assembled, and with a protrudent structure on the perimeter of the cylindrical surface it forms vertical channels on the peripheral surface of the above second cylindrical body, and with a empty space in the center the third cylindrical body(30) forms channels by the inlet of the above second cover(70), wherein: with the cutoff valve that is established between the above third cylindrical body(30) and the first cover(60), and that opens and shuts the above channels by making up-and-down motions according to the pressure difference between the above vacuum chamber side and the vacuum pump side, the isolation valve has features that when the operation to extract vacuum is performed in the case that the pressure of the inlet in the first cover(60) side is higher than that of the inlet in the second cover(70) side, the above cutoff valve(40) descends and vacuum is extracted through channels formed between the above first cylindrical body (10), the second cylindrical body(20) and the third cylindrical body(30), and that on the contrary, in the case that the pressure of the inlet in the second cover(70) side is higher than that in the first cover(70) side, moves the above cutoff valve(50) and intercepts the above channels.

[2] In claim 1, the isolation valve has a feature that the O-ring(50) having the thickness of about lmm between the above isolation valve and the above first cover is established.

[3] In claim 1, the isolation valve has a feature that the above cutoff valve is manufactured by magnesium light alloy.

[4] In claim 1, the isolation valve has a feature that the above cutoff valve has a shape of peaked hat.

[5] In claim 1, the isolation valve has a feature that the above cutoff valve intercepts the above channel by the pressure difference within 15 Pascal.

[6] In claim 1, the isolation valve has a feature that the above channel has the form of meanders which delay the inflow of back pressure before the above cutoff valve moves, in the case that back pressure occurs since the pressure of the inlet in the second cover(70) side is higher than that in the first cover(70) side.

[7] In claim 1, the isolation valve has a feature that the above cutoff valve(40) has a shape of flat plate.

[8] In claim 1, the above second cylindrical body(20) has an empty space inside, and the isolation valve has a feature that, with the channel connected to the above internal space, makes the above cutoff valve(40) ascend or descend vertically by hydraulic pressure flowed intentionally into the above internal space through the above channel.

[9] In claim 1, the above second cylindrical body(20) has an empty space inside, and the isolation valve has a feature that, with the helical gear in the above internal space, makes the above cutoff valve(40) ascend or descend vertically by rotating the above helical gear in the outside and making it move vertically.

[10] In claim 1, the above second cylindrical body (20) has an empty space inside, and the isolation valve has a feature that, with the rack gear in the above internal space, makes the above cutoff valve(40) ascend or descend vertically by rotating the external handle and making it the above rack gear move vertically.

[11] In claim 1, the isolation valve has a feature that, with the helical gear in the inside of the above third cylindrical body(30), makes the above cutoff valve(40) ascend or descend vertically by rotating the external handle and making the above helical gear move vertically.

[12] In claim 1, the above second cylindrical body(30) is composed of bellows, and the isolation valve has a feature that makes the above cutoff valve(40) ascend or descend vertically, with the channel connected to the inner space of the above second cylindrical body(20) being formed and the above bellows spreading by hydraulic pressure that is flowed intentionally into the above inner space through the above channel.