WO2007033069A3 - Tracking algorithm for linear array signal processor for fabry-perot cross-correlation pattern and method of using same - Google Patents

Tracking algorithm for linear array signal processor for fabry-perot cross-correlation pattern and method of using same Download PDF

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Publication number
WO2007033069A3
WO2007033069A3 PCT/US2006/035292 US2006035292W WO2007033069A3 WO 2007033069 A3 WO2007033069 A3 WO 2007033069A3 US 2006035292 W US2006035292 W US 2006035292W WO 2007033069 A3 WO2007033069 A3 WO 2007033069A3
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WO
WIPO (PCT)
Prior art keywords
gap
perot
fabry
cross
signal processor
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Application number
PCT/US2006/035292
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French (fr)
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WO2007033069A2 (en
Inventor
David Blake Needham
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Davidson Instr Inc
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Publication date
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Publication of WO2007033069A2 publication Critical patent/WO2007033069A2/en
Publication of WO2007033069A3 publication Critical patent/WO2007033069A3/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/20—Dispersive element for generating dispersion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/25—Fabry-Perot in interferometer, e.g. etalon, cavity

Abstract

An algorithm and method for calculating an interferometric gap is disclosed that comprises providing an interferometric sensor having a first gap and an interferometric correlation element having a second gap placed in series with the first gap. A correlation burst waveform is generated having a plurality of features wherein the shape of the burst waveform evolves across the range of the second gap. Means are provided for tracking the features across the entire range of gaps and determining the dominant peak or dominant valley to determine the first gap.
PCT/US2006/035292 2005-09-13 2006-09-11 Tracking algorithm for linear array signal processor for fabry-perot cross-correlation pattern and method of using same WO2007033069A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US71648305P 2005-09-13 2005-09-13
US60/716,483 2005-09-13

Publications (2)

Publication Number Publication Date
WO2007033069A2 WO2007033069A2 (en) 2007-03-22
WO2007033069A3 true WO2007033069A3 (en) 2008-01-17

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/035292 WO2007033069A2 (en) 2005-09-13 2006-09-11 Tracking algorithm for linear array signal processor for fabry-perot cross-correlation pattern and method of using same

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US (1) US7639368B2 (en)
WO (1) WO2007033069A2 (en)

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US20070064241A1 (en) 2007-03-22
WO2007033069A2 (en) 2007-03-22
US7639368B2 (en) 2009-12-29

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