WO2007033257A3 - Methods and apparatus for a band to band transfer module - Google Patents

Methods and apparatus for a band to band transfer module Download PDF

Info

Publication number
WO2007033257A3
WO2007033257A3 PCT/US2006/035688 US2006035688W WO2007033257A3 WO 2007033257 A3 WO2007033257 A3 WO 2007033257A3 US 2006035688 W US2006035688 W US 2006035688W WO 2007033257 A3 WO2007033257 A3 WO 2007033257A3
Authority
WO
WIPO (PCT)
Prior art keywords
band
transfer module
methods
conveyor
substrate carriers
Prior art date
Application number
PCT/US2006/035688
Other languages
French (fr)
Other versions
WO2007033257A2 (en
Inventor
Robert B Lowrance
Eric A Englhardt
Michael R Rice
Vinay Shah
Sushant Koshti
Jeffrey C Hudgens
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to JP2008531285A priority Critical patent/JP2009507743A/en
Publication of WO2007033257A2 publication Critical patent/WO2007033257A2/en
Publication of WO2007033257A3 publication Critical patent/WO2007033257A3/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G29/00Rotary conveyors, e.g. rotating discs, arms, star-wheels or cones
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/22Devices influencing the relative position or the attitude of articles during transit by conveyors
    • B65G47/26Devices influencing the relative position or the attitude of articles during transit by conveyors arranging the articles, e.g. varying spacing between individual articles
    • B65G47/28Devices influencing the relative position or the attitude of articles during transit by conveyors arranging the articles, e.g. varying spacing between individual articles during transit by a single conveyor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706Mechanical details, e.g. roller, belt
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715Changing the direction of the conveying path
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2203/00Indexing code relating to control or detection of the articles or the load carriers during conveying
    • B65G2203/02Control or detection
    • B65G2203/0208Control or detection relating to the transported articles
    • B65G2203/025Speed of the article
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00Material or article handling
    • Y10S414/135Associated with semiconductor wafer handling
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00Material or article handling
    • Y10S414/135Associated with semiconductor wafer handling
    • Y10S414/14Wafer cassette transporting

Abstract

A band to band transfer module according to the present invention may be used with a substrate carrier transport system, or other systems, to transfer substrate carriers {e.g., small lot substrate carriers) from one conveyor to another conveyor or between two points on the same conveyor. The transfers (e.g., pick and place) of the substrate carriers may be made between conveyors traveling at different speeds. Numerous other aspects and features are disclosed.
PCT/US2006/035688 2005-09-14 2006-09-14 Methods and apparatus for a band to band transfer module WO2007033257A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008531285A JP2009507743A (en) 2005-09-14 2006-09-14 Method and apparatus for interband transport module

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US71733605P 2005-09-14 2005-09-14
US71715005P 2005-09-14 2005-09-14
US71733505P 2005-09-14 2005-09-14
US60/717,150 2005-09-14
US60/717,336 2005-09-14
US60/717,335 2005-09-14

Publications (2)

Publication Number Publication Date
WO2007033257A2 WO2007033257A2 (en) 2007-03-22
WO2007033257A3 true WO2007033257A3 (en) 2007-10-11

Family

ID=37865553

Family Applications (3)

Application Number Title Priority Date Filing Date
PCT/US2006/035653 WO2007033249A2 (en) 2005-09-14 2006-09-14 Methods and apparatus for a transport lift assembly
PCT/US2006/035688 WO2007033257A2 (en) 2005-09-14 2006-09-14 Methods and apparatus for a band to band transfer module
PCT/US2006/035652 WO2007033248A2 (en) 2005-09-14 2006-09-14 Methods and apparatus for a transfer station

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PCT/US2006/035653 WO2007033249A2 (en) 2005-09-14 2006-09-14 Methods and apparatus for a transport lift assembly

Family Applications After (1)

Application Number Title Priority Date Filing Date
PCT/US2006/035652 WO2007033248A2 (en) 2005-09-14 2006-09-14 Methods and apparatus for a transfer station

Country Status (6)

Country Link
US (3) US7577487B2 (en)
JP (1) JP2009507743A (en)
KR (1) KR100932812B1 (en)
CN (3) CN100481365C (en)
TW (3) TW200716466A (en)
WO (3) WO2007033249A2 (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200716466A (en) * 2005-09-14 2007-05-01 Applied Materials Inc Methods and apparatus for a transport lift assembly
JP2008173744A (en) * 2007-01-22 2008-07-31 Tokyo Electron Ltd Conveying position alignment method for conveying system
SG147353A1 (en) * 2007-05-07 2008-11-28 Mfg Integration Technology Ltd Apparatus for object processing
JP2009087138A (en) * 2007-10-01 2009-04-23 Elpida Memory Inc Transport system, transport vehicle management device, and transport control method
DE102008059529A1 (en) 2008-11-28 2010-06-02 Karlsruher Institut für Technologie Decentralized material handling
US8120304B2 (en) * 2008-12-12 2012-02-21 Formfactor, Inc. Method for improving motion times of a stage
US8504195B2 (en) * 2009-09-08 2013-08-06 Jervis B. Webb Company Method and apparatus for radio-controlled friction drive conveyor system
FR2954583B1 (en) 2009-12-18 2017-11-24 Alcatel Lucent METHOD AND DEVICE FOR CONTROLLING THE MANUFACTURE OF SEMICONDUCTORS BY MEASURING CONTAMINATION
FR2961946B1 (en) 2010-06-29 2012-08-03 Alcatel Lucent TREATMENT DEVICE FOR TRANSPORT AND STORAGE BOXES
US8763790B1 (en) 2011-05-25 2014-07-01 Western Digital Technologies, Inc. Clean room roller conveyor with motors between and torquing drive roller pairs
EP2746200B2 (en) * 2012-12-21 2018-09-12 Robert Bosch Gmbh Device and method for controlling carriers in a machine
US10608469B2 (en) * 2017-09-28 2020-03-31 Rockwell Automation Technologies, Inc. Method and apparatus for power transfer to an independent moving cart during travel along a track
CN109964308B (en) * 2017-10-25 2023-12-19 应用材料公司 Carrier for vacuum chamber, test system and method, and vacuum processing system
CN110416132A (en) * 2019-08-20 2019-11-05 上海新傲科技股份有限公司 The method of load in semiconductor stripping technology
CN117316830B (en) * 2023-11-28 2024-02-02 成都高投芯未半导体有限公司 Semiconductor packaging system and control method

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5096043A (en) * 1989-08-25 1992-03-17 Azionaria Costruzioni Macchine Automatiche A.C.M.A. S.P.A. Device for feeding products from a supply unit to a receiving unit
US5641053A (en) * 1994-11-11 1997-06-24 Azionaria Costrusioni Macchine Automatiche A.C.M.A. S.P.A. Equally spaced product conveying method and line
US20040062633A1 (en) * 2002-08-31 2004-04-01 Applied Materials, Inc. System for transporting substrate carriers
US6827200B1 (en) * 2002-02-01 2004-12-07 Arthur B. Rhodes Multi-speed variable spacing conveyor system
US20050228525A1 (en) * 2004-02-28 2005-10-13 Brill Todd J Methods and apparatus for electronic device manufacturing system monitoring and control
US20050245101A1 (en) * 2004-02-28 2005-11-03 Brill Todd J Methods and apparatus for transferring a substrate carrier within an electronic device manufacturing facility

Family Cites Families (93)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3845286A (en) * 1973-02-05 1974-10-29 Ibm Manufacturing control system for processing workpieces
US3868009A (en) * 1973-03-29 1975-02-25 Carle & Montanari Spa Transferring device
US4049500A (en) * 1974-05-10 1977-09-20 Kamm Lawrence J Manufacturing machine
US4033448A (en) * 1975-10-24 1977-07-05 Whirlpool Corporation Conveyor transfer apparatus pickup and dropoff sensor
US4084684A (en) * 1975-10-24 1978-04-18 Whirlpool Corporation Conveyor transfer method and apparatus
US4143751A (en) * 1977-08-12 1979-03-13 A-T-O Inc. Circular sortation apparatus and methods
JPS578047A (en) * 1980-06-18 1982-01-16 Hitachi Ltd Working or assembling equipment
JPS59101849A (en) 1982-12-01 1984-06-12 Tokyo Erekutoron Kk Article carrier
US4624617A (en) * 1984-10-09 1986-11-25 David Belna Linear induction semiconductor wafer transportation apparatus
GB2185720B (en) * 1986-01-27 1989-11-01 Daifuku Kk Conveyor system utilizing linear motor
US4775281A (en) * 1986-12-02 1988-10-04 Teradyne, Inc. Apparatus and method for loading and unloading wafers
US4951601A (en) * 1986-12-19 1990-08-28 Applied Materials, Inc. Multi-chamber integrated process system
JPS6467932A (en) 1987-09-08 1989-03-14 Mitsubishi Electric Corp Semiconductor wafer cassette conveyor
US4825111A (en) * 1987-11-02 1989-04-25 E. I. Du Pont De Nemours And Company Linear motor propulsion system
US4986715A (en) * 1988-07-13 1991-01-22 Tokyo Electron Limited Stock unit for storing carriers
JPH0776052B2 (en) * 1989-07-21 1995-08-16 ブラザー工業株式会社 Conveyor system
JPH0797564B2 (en) 1990-02-21 1995-10-18 国際電気株式会社 Vertical semiconductor manufacturing equipment
JP2565786B2 (en) * 1990-03-09 1996-12-18 三菱電機株式会社 Automatic transport device and method
US5203445A (en) * 1990-03-17 1993-04-20 Tokyo Electron Sagami Limited Carrier conveying apparatus
US5180048A (en) * 1990-10-12 1993-01-19 Mitsubishi Jukogyo Kabushiki Kaisha Magnetic levitating transportation system
JPH04158508A (en) 1990-10-22 1992-06-01 Mitsubishi Electric Corp Semiconductor wafer transfer system
CA2053028C (en) * 1990-10-23 1996-04-09 Hideichi Tanizawa Carriage running control system
US6784572B1 (en) * 1991-03-17 2004-08-31 Anorad Corporation Path arrangement for a multi-track linear motor system and method to control same
JP2532533Y2 (en) * 1991-10-08 1997-04-16 三菱自動車工業株式会社 Interlock device for work transfer system
US5387265A (en) * 1991-10-29 1995-02-07 Kokusai Electric Co., Ltd. Semiconductor wafer reaction furnace with wafer transfer means
EP0552756A1 (en) 1992-01-21 1993-07-28 Shinko Electric Co. Ltd. Article storage house in a clean room
JP2867194B2 (en) * 1992-02-05 1999-03-08 東京エレクトロン株式会社 Processing device and processing method
JPH0616206A (en) * 1992-07-03 1994-01-25 Shinko Electric Co Ltd Transportation system inside clean room
ATE129361T1 (en) * 1992-08-04 1995-11-15 Ibm PRODUCTION LINE ARCHITECTURE WITH FULLY AUTOMATED AND COMPUTER CONTROLLED CONVEYING EQUIPMENT SUITABLE FOR SEALABLE PORTABLE PRESSURIZED CONTAINERS.
JP3258748B2 (en) * 1993-02-08 2002-02-18 東京エレクトロン株式会社 Heat treatment equipment
JPH06263244A (en) 1993-03-09 1994-09-20 Tohoku Ricoh Co Ltd Turning transport device for article
KR100221983B1 (en) * 1993-04-13 1999-09-15 히가시 데쓰로 A treating apparatus for semiconductor process
US5458265A (en) * 1993-11-18 1995-10-17 Levi Strauss & Co. Automated garment finishing system
JP3163884B2 (en) * 1994-02-18 2001-05-08 株式会社ダイフク Load storage equipment
JP3331746B2 (en) * 1994-05-17 2002-10-07 神鋼電機株式会社 Transport system
KR0167881B1 (en) * 1994-11-28 1999-02-01 김주용 Wafer transfer system & its control method
JPH08288355A (en) * 1995-04-12 1996-11-01 Nikon Corp Substrate transfer system
JP3319916B2 (en) * 1995-07-04 2002-09-03 株式会社アサカ Automatic storage medium exchange device
US5934444A (en) * 1996-02-02 1999-08-10 Jervis B. Webb Company Tote transport system
US5769949A (en) * 1996-05-02 1998-06-23 Chs Acquisition Corp. Automated coating process
NL1003057C2 (en) * 1996-05-07 1997-11-10 Greefs Wagen Carrosserie Apparatus and method for supplying, removing and transferring objects, such as fruits.
US5879458A (en) * 1996-09-13 1999-03-09 Semifab Incorporated Molecular contamination control system
IT1286220B1 (en) * 1996-09-17 1998-07-08 Azionaria Costruzioni Acma Spa PRODUCT CONVEYOR UNIT
US5957648A (en) * 1996-12-11 1999-09-28 Applied Materials, Inc. Factory automation apparatus and method for handling, moving and storing semiconductor wafer carriers
US5964561A (en) * 1996-12-11 1999-10-12 Applied Materials, Inc. Compact apparatus and method for storing and loading semiconductor wafer carriers
JP3894461B2 (en) * 1997-01-17 2007-03-22 キヤノンアネルバ株式会社 Non-contact type magnetic transfer device positioning control device and positioning control method
JP2968742B2 (en) * 1997-01-24 1999-11-02 山形日本電気株式会社 Automatic storage shelf and automatic storage method
US6224313B1 (en) * 1997-04-01 2001-05-01 Murata Kikai Kabushiki Kaisha Automatic warehouse
US5980183A (en) * 1997-04-14 1999-11-09 Asyst Technologies, Inc. Integrated intrabay buffer, delivery, and stocker system
US6390754B2 (en) * 1997-05-21 2002-05-21 Tokyo Electron Limited Wafer processing apparatus, method of operating the same and wafer detecting system
US6280134B1 (en) * 1997-06-17 2001-08-28 Applied Materials, Inc. Apparatus and method for automated cassette handling
US6579052B1 (en) * 1997-07-11 2003-06-17 Asyst Technologies, Inc. SMIF pod storage, delivery and retrieval system
JPH1159829A (en) * 1997-08-08 1999-03-02 Mitsubishi Electric Corp Semiconductor wafer cassette conveyer, stocker used in semiconductor wafer cassette conveyer, and stocker in/out stock work control method/device used in semiconductor wafer cassette conveyer
US6183186B1 (en) * 1997-08-29 2001-02-06 Daitron, Inc. Wafer handling system and method
US5927472A (en) * 1997-10-15 1999-07-27 Eisenmann Corporation Conveyor transfer unit
US6079927A (en) * 1998-04-22 2000-06-27 Varian Semiconductor Equipment Associates, Inc. Automated wafer buffer for use with wafer processing equipment
JPH11349280A (en) * 1998-06-05 1999-12-21 Shinko Electric Co Ltd Suspended conveying device
US6411859B1 (en) * 1998-08-28 2002-06-25 Advanced Micro Devices, Inc. Flow control in a semiconductor fabrication facility
US6283692B1 (en) * 1998-12-01 2001-09-04 Applied Materials, Inc. Apparatus for storing and moving a cassette
US6481558B1 (en) 1998-12-18 2002-11-19 Asyst Technologies, Inc. Integrated load port-conveyor transfer system
US6089811A (en) * 1998-12-25 2000-07-18 Fujitsu Limited Production line workflow and parts transport arrangement
DE19900804C2 (en) * 1999-01-12 2000-10-19 Siemens Ag Conveyor system
US6443686B1 (en) * 1999-03-05 2002-09-03 Pri Automation, Inc. Material handling and transport system and process
US6876896B1 (en) * 1999-04-26 2005-04-05 Ab Tetrapak Variable motion system and method
JP2001071249A (en) * 1999-09-03 2001-03-21 Sony Corp Polishing device
US20020025244A1 (en) * 2000-04-12 2002-02-28 Kim Ki-Sang Transfer system and apparatus for workpiece containers and method of transferring the workpiece containers using the same
US6450318B1 (en) * 2000-06-16 2002-09-17 Tec Engineering Corporation Overhead monorail system
EP1202325A1 (en) * 2000-10-25 2002-05-02 Semiconductor300 GmbH & Co KG Arrangement for transporting a semiconductor wafer carrier
KR100350719B1 (en) * 2000-11-30 2002-08-29 삼성전자 주식회사 apparatus for transferring in a semiconductor fabricating
IT1319594B1 (en) * 2000-12-20 2003-10-20 Cml Handling Technology S P A EQUIPMENT AND METHOD FOR THE ACTIVATION AND CONTROL OF THE SORTING UNIT IN A SORTING MACHINE
DE50100899D1 (en) * 2000-12-22 2003-12-11 Sig Pack Systems Ag Beringen Device for conveying and temporarily storing products
US6580967B2 (en) * 2001-06-26 2003-06-17 Applied Materials, Inc. Method for providing distributed material management and flow control in an integrated circuit factory
JP2003124286A (en) * 2001-10-18 2003-04-25 Mitsubishi Electric Corp Interprocess transport system and interprocess transport method
JP4048409B2 (en) * 2001-10-22 2008-02-20 株式会社ダイフク Transport equipment
US6602128B1 (en) * 2002-05-24 2003-08-05 Charles W. Spengler Clean air room with a blower including a HEPA filter and ducts
KR100882376B1 (en) * 2002-06-19 2009-02-05 브룩스 오토메이션, 인크. Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists
US20050095110A1 (en) * 2002-08-31 2005-05-05 Lowrance Robert B. Method and apparatus for unloading substrate carriers from substrate carrier transport system
US7243003B2 (en) * 2002-08-31 2007-07-10 Applied Materials, Inc. Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
JP3991852B2 (en) * 2002-12-09 2007-10-17 村田機械株式会社 Ceiling carrier system
US7611318B2 (en) * 2003-01-27 2009-11-03 Applied Materials, Inc. Overhead transfer flange and support for suspending a substrate carrier
US7077264B2 (en) * 2003-01-27 2006-07-18 Applied Material, Inc. Methods and apparatus for transporting substrate carriers
TWI246501B (en) * 2003-02-03 2006-01-01 Murata Machinery Ltd Overhead traveling carriage system
KR100541183B1 (en) * 2003-03-04 2006-01-11 삼성전자주식회사 Stocker and transfer system having the same
US6990721B2 (en) * 2003-03-21 2006-01-31 Brooks Automation, Inc. Growth model automated material handling system
US6848882B2 (en) * 2003-03-31 2005-02-01 Taiwan Semiconductor Manufacturing Co., Ltd Apparatus and method for positioning a cassette pod onto a loadport by an overhead hoist transport system
TWI348450B (en) * 2003-11-13 2011-09-11 Applied Materials Inc Break-away positioning conveyor mount for accommodating conveyor belt bends
US7051870B2 (en) * 2003-11-26 2006-05-30 Applied Materials, Inc. Suspension track belt
JP4337683B2 (en) * 2004-08-16 2009-09-30 村田機械株式会社 Transport system
KR20070054683A (en) * 2004-08-23 2007-05-29 브룩스 오토메이션 인코퍼레이티드 Elevator-based tool loading and buffering system
JP2006181691A (en) * 2004-12-28 2006-07-13 Yamazaki Mazak Corp Automatic machining process dividing method and device in automatic programming device
JP4296601B2 (en) * 2005-01-20 2009-07-15 村田機械株式会社 Conveyor cart system
KR20050029140A (en) * 2005-01-26 2005-03-24 유영식 Curve belt conveyer
TW200716466A (en) * 2005-09-14 2007-05-01 Applied Materials Inc Methods and apparatus for a transport lift assembly

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5096043A (en) * 1989-08-25 1992-03-17 Azionaria Costruzioni Macchine Automatiche A.C.M.A. S.P.A. Device for feeding products from a supply unit to a receiving unit
US5641053A (en) * 1994-11-11 1997-06-24 Azionaria Costrusioni Macchine Automatiche A.C.M.A. S.P.A. Equally spaced product conveying method and line
US6827200B1 (en) * 2002-02-01 2004-12-07 Arthur B. Rhodes Multi-speed variable spacing conveyor system
US20040062633A1 (en) * 2002-08-31 2004-04-01 Applied Materials, Inc. System for transporting substrate carriers
US20050228525A1 (en) * 2004-02-28 2005-10-13 Brill Todd J Methods and apparatus for electronic device manufacturing system monitoring and control
US20050245101A1 (en) * 2004-02-28 2005-11-03 Brill Todd J Methods and apparatus for transferring a substrate carrier within an electronic device manufacturing facility

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WO2007033249A3 (en) 2007-11-29
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CN1937200A (en) 2007-03-28
CN1937200B (en) 2010-11-03
WO2007033248A3 (en) 2007-07-05
TW200717688A (en) 2007-05-01
JP2009507743A (en) 2009-02-26
US7577487B2 (en) 2009-08-18
CN100481365C (en) 2009-04-22
US20070059144A1 (en) 2007-03-15
TWI328854B (en) 2010-08-11
WO2007033248A2 (en) 2007-03-22
KR100932812B1 (en) 2009-12-21
WO2007033249A2 (en) 2007-03-22
US20070061031A1 (en) 2007-03-15
TW200717689A (en) 2007-05-01
CN1937199A (en) 2007-03-28
US20070059153A1 (en) 2007-03-15
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CN1937198A (en) 2007-03-28
KR20070031255A (en) 2007-03-19

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