WO2007064358A3 - Structures and methods for coupling energy from an electromagnetic wave - Google Patents

Structures and methods for coupling energy from an electromagnetic wave Download PDF

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Publication number
WO2007064358A3
WO2007064358A3 PCT/US2006/022771 US2006022771W WO2007064358A3 WO 2007064358 A3 WO2007064358 A3 WO 2007064358A3 US 2006022771 W US2006022771 W US 2006022771W WO 2007064358 A3 WO2007064358 A3 WO 2007064358A3
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WO
WIPO (PCT)
Prior art keywords
electromagnetic wave
structures
methods
coupling energy
path
Prior art date
Application number
PCT/US2006/022771
Other languages
French (fr)
Other versions
WO2007064358A2 (en
Inventor
Jonathan Gorrell
Mark Davidson
Lev V Gasparov
Michael E Maines
Original Assignee
Virgin Islands Microsystems
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/238,991 external-priority patent/US7791290B2/en
Application filed by Virgin Islands Microsystems filed Critical Virgin Islands Microsystems
Publication of WO2007064358A2 publication Critical patent/WO2007064358A2/en
Publication of WO2007064358A3 publication Critical patent/WO2007064358A3/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J25/00—Transit-time tubes, e.g. klystrons, travelling-wave tubes, magnetrons
    • H01J25/34—Travelling-wave tubes; Tubes in which a travelling wave is simulated at spaced gaps

Abstract

A device couples energy from an electromagnetic wave to charged particles in a beam. The device includes a micro-resonant structure and a cathode for providing electrons along a path. The micro-resonant structure, on receiving the electromagnetic wave, generates a varying field in a space including a portion of the path. Electrons are deflected or angularly modulated to a second path.
PCT/US2006/022771 2005-09-30 2006-06-12 Structures and methods for coupling energy from an electromagnetic wave WO2007064358A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US11/238,991 2005-09-30
US11/238,991 US7791290B2 (en) 2005-09-30 2005-09-30 Ultra-small resonating charged particle beam modulator
US11/243,476 2005-10-05
US11/243,476 US7253426B2 (en) 2005-09-30 2005-10-05 Structures and methods for coupling energy from an electromagnetic wave

Publications (2)

Publication Number Publication Date
WO2007064358A2 WO2007064358A2 (en) 2007-06-07
WO2007064358A3 true WO2007064358A3 (en) 2009-05-14

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/022771 WO2007064358A2 (en) 2005-09-30 2006-06-12 Structures and methods for coupling energy from an electromagnetic wave

Country Status (2)

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US (1) US7557365B2 (en)
WO (1) WO2007064358A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109883602A (en) * 2019-03-13 2019-06-14 中国电子科技集团公司第四十九研究所 A kind of self compensation silicon micro-resonance type presser sensor chip based on SOI

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7586097B2 (en) 2006-01-05 2009-09-08 Virgin Islands Microsystems, Inc. Switching micro-resonant structures using at least one director
US7656094B2 (en) * 2006-05-05 2010-02-02 Virgin Islands Microsystems, Inc. Electron accelerator for ultra-small resonant structures
US7990336B2 (en) 2007-06-19 2011-08-02 Virgin Islands Microsystems, Inc. Microwave coupled excitation of solid state resonant arrays
US7791053B2 (en) * 2007-10-10 2010-09-07 Virgin Islands Microsystems, Inc. Depressed anode with plasmon-enabled devices such as ultra-small resonant structures
US9472699B2 (en) 2007-11-13 2016-10-18 Battelle Energy Alliance, Llc Energy harvesting devices, systems, and related methods
US8071931B2 (en) 2007-11-13 2011-12-06 Battelle Energy Alliance, Llc Structures, systems and methods for harvesting energy from electromagnetic radiation
US7792644B2 (en) * 2007-11-13 2010-09-07 Battelle Energy Alliance, Llc Methods, computer readable media, and graphical user interfaces for analysis of frequency selective surfaces
US8159157B1 (en) * 2007-12-03 2012-04-17 Raytheon Company Nanotubes as linear accelerators
US7994472B2 (en) * 2008-06-16 2011-08-09 The Board Of Trustees Of The Leland Stanford Junior University Laser-driven deflection arrangements and methods involving charged particle beams
CN102013375B (en) * 2010-11-12 2012-12-05 电子科技大学 Energy coupling device suitable for winding double comb teeth slow wave structure
FR2980923B1 (en) * 2011-10-03 2013-10-25 Commissariat Energie Atomique METHOD AND DEVICE OF HIGH EFFICIENCY FOR GENERATING COHERENT SMITH-PURCELL RADIATION
RU2482592C1 (en) * 2012-02-29 2013-05-20 Федеральное государственное унитарное предприятие "Центральный аэрогидродинамический институт имени профессора Н.Е. Жуковского" (ФГУП "ЦАГИ") Aerodynamic bench for performance of fundamental research of power generation by mhd methods using high-temperature hydrogen (h2) as working gas
US8847824B2 (en) 2012-03-21 2014-09-30 Battelle Energy Alliance, Llc Apparatuses and method for converting electromagnetic radiation to direct current
US9214782B2 (en) * 2012-09-11 2015-12-15 The Board Of Trustees Of The Leland Stanford Junior University Dielectric laser electron accelerators
SG10201909405SA (en) 2016-03-22 2019-11-28 Lyteloop Technologies Llc Data in motion storage system and method
WO2018015896A1 (en) * 2016-07-22 2018-01-25 Bhosale Devesh Suryabhan An apparatus for generating electromagnetic waves
MX2020013441A (en) 2018-08-02 2021-02-26 Lyteloop Tech Llc Apparatus and method for storing wave signals in a cavity.
ES2939349T3 (en) * 2018-08-10 2023-04-21 Nkb Properties Man Llc System and method for extending the path length of a wave signal by angular multiplexing
KR20210091200A (en) 2018-11-05 2021-07-21 라이트루프 테크놀로지스, 엘엘씨 Systems and methods for building, operating, and controlling multiple amplifiers, regenerators, and transceivers using shared common components
CN110160573B (en) * 2019-07-08 2022-03-25 山东省科学院激光研究所 Escholtz ultrafast modulation pulse scanning laser and distributed optical fiber sensing system
US11700684B2 (en) * 2021-07-07 2023-07-11 Triseka, Inc. Light source for high power coherent light, imaging system, and method of using relativistic electrons for imaging and treatment
CN114724906B (en) * 2022-05-11 2023-04-18 电子科技大学 Grating extension interaction cavity structure

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5668368A (en) * 1992-02-21 1997-09-16 Hitachi, Ltd. Apparatus for suppressing electrification of sample in charged beam irradiation apparatus
US5790585A (en) * 1996-11-12 1998-08-04 The Trustees Of Dartmouth College Grating coupling free electron laser apparatus and method

Family Cites Families (140)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2634372A (en) * 1953-04-07 Super high-frequency electromag
US1948384A (en) 1932-01-26 1934-02-20 Research Corp Method and apparatus for the acceleration of ions
US2307086A (en) 1941-05-07 1943-01-05 Univ Leland Stanford Junior High frequency electrical apparatus
US2431396A (en) 1942-12-21 1947-11-25 Rca Corp Current magnitude-ratio responsive amplifier
US2397905A (en) 1944-08-07 1946-04-09 Int Harvester Co Thrust collar construction
US2473477A (en) 1946-07-24 1949-06-14 Raythcon Mfg Company Magnetic induction device
US2932798A (en) 1956-01-05 1960-04-12 Research Corp Imparting energy to charged particles
US2944183A (en) 1957-01-25 1960-07-05 Bell Telephone Labor Inc Internal cavity reflex klystron tuned by a tightly coupled external cavity
US2966611A (en) 1959-07-21 1960-12-27 Sperry Rand Corp Ruggedized klystron tuner
US3231779A (en) 1962-06-25 1966-01-25 Gen Electric Elastic wave responsive apparatus
US3315117A (en) 1963-07-15 1967-04-18 Burton J Udelson Electrostatically focused electron beam phase shifter
US3387169A (en) 1965-05-07 1968-06-04 Sfd Lab Inc Slow wave structure of the comb type having strap means connecting the teeth to form iterative inductive shunt loadings
US4053845A (en) 1967-03-06 1977-10-11 Gordon Gould Optically pumped laser amplifiers
US4746201A (en) 1967-03-06 1988-05-24 Gordon Gould Polarizing apparatus employing an optical element inclined at brewster's angle
US3546524A (en) 1967-11-24 1970-12-08 Varian Associates Linear accelerator having the beam injected at a position of maximum r.f. accelerating field
US3571642A (en) 1968-01-17 1971-03-23 Ca Atomic Energy Ltd Method and apparatus for interleaved charged particle acceleration
US3543147A (en) 1968-03-29 1970-11-24 Atomic Energy Commission Phase angle measurement system for determining and controlling the resonance of the radio frequency accelerating cavities for high energy charged particle accelerators
US3586899A (en) 1968-06-12 1971-06-22 Ibm Apparatus using smith-purcell effect for frequency modulation and beam deflection
US3560694A (en) 1969-01-21 1971-02-02 Varian Associates Microwave applicator employing flat multimode cavity for treating webs
US3761828A (en) 1970-12-10 1973-09-25 J Pollard Linear particle accelerator with coast through shield
US3886399A (en) 1973-08-20 1975-05-27 Varian Associates Electron beam electrical power transmission system
US3923568A (en) * 1974-01-14 1975-12-02 Int Plasma Corp Dry plasma process for etching noble metal
DE2429612C2 (en) 1974-06-20 1984-08-02 Siemens AG, 1000 Berlin und 8000 München Acousto-optical data input converter for block-organized holographic data storage and method for its control
US4704583A (en) 1974-08-16 1987-11-03 Gordon Gould Light amplifiers employing collisions to produce a population inversion
US4282436A (en) 1980-06-04 1981-08-04 The United States Of America As Represented By The Secretary Of The Navy Intense ion beam generation with an inverse reflex tetrode (IRT)
US4661783A (en) 1981-03-18 1987-04-28 The United States Of America As Represented By The Secretary Of The Navy Free electron and cyclotron resonance distributed feedback lasers and masers
US4450554A (en) 1981-08-10 1984-05-22 International Telephone And Telegraph Corporation Asynchronous integrated voice and data communication system
US4528659A (en) 1981-12-17 1985-07-09 International Business Machines Corporation Interleaved digital data and voice communications system apparatus and method
US4589107A (en) 1982-11-30 1986-05-13 Itt Corporation Simultaneous voice and data communication and data base access in a switching system using a combined voice conference and data base processing module
US4652703A (en) 1983-03-01 1987-03-24 Racal Data Communications Inc. Digital voice transmission having improved echo suppression
US4482779A (en) 1983-04-19 1984-11-13 The United States Of America As Represented By The Administrator Of National Aeronautics And Space Administration Inelastic tunnel diodes
US4598397A (en) 1984-02-21 1986-07-01 Cxc Corporation Microtelephone controller
US4713581A (en) 1983-08-09 1987-12-15 Haimson Research Corporation Method and apparatus for accelerating a particle beam
US4829527A (en) * 1984-04-23 1989-05-09 The United States Of America As Represented By The Secretary Of The Army Wideband electronic frequency tuning for orotrons
FR2564646B1 (en) * 1984-05-21 1986-09-26 Centre Nat Rech Scient IMPROVED FREE ELECTRON LASER
DE3479468D1 (en) 1984-05-23 1989-09-21 Ibm Digital transmission system for a packetized voice
US4819228A (en) 1984-10-29 1989-04-04 Stratacom Inc. Synchronous packet voice/data communication system
GB2171576B (en) 1985-02-04 1989-07-12 Mitel Telecom Ltd Spread spectrum leaky feeder communication system
US4675863A (en) 1985-03-20 1987-06-23 International Mobile Machines Corp. Subscriber RF telephone system for providing multiple speech and/or data signals simultaneously over either a single or a plurality of RF channels
JPS6229135A (en) 1985-07-29 1987-02-07 Advantest Corp Charged particle beam exposure and device thereof
IL79775A (en) 1985-08-23 1990-06-10 Republic Telcom Systems Corp Multiplexed digital packet telephone system
US4727550A (en) * 1985-09-19 1988-02-23 Chang David B Radiation source
US4740963A (en) 1986-01-30 1988-04-26 Lear Siegler, Inc. Voice and data communication system
US4712042A (en) 1986-02-03 1987-12-08 Accsys Technology, Inc. Variable frequency RFQ linear accelerator
JPS62142863U (en) 1986-03-05 1987-09-09
JPH0763171B2 (en) 1986-06-10 1995-07-05 株式会社日立製作所 Data / voice transmission / reception method
US4761059A (en) 1986-07-28 1988-08-02 Rockwell International Corporation External beam combining of multiple lasers
US4813040A (en) 1986-10-31 1989-03-14 Futato Steven P Method and apparatus for transmitting digital data and real-time digitalized voice information over a communications channel
US5163118A (en) 1986-11-10 1992-11-10 The United States Of America As Represented By The Secretary Of The Air Force Lattice mismatched hetrostructure optical waveguide
JPH07118749B2 (en) 1986-11-14 1995-12-18 株式会社日立製作所 Voice / data transmission equipment
US4806859A (en) 1987-01-27 1989-02-21 Ford Motor Company Resonant vibrating structures with driving sensing means for noncontacting position and pick up sensing
ATE88000T1 (en) 1987-02-09 1993-04-15 Tlv Co Ltd MONITORING DEVICE FOR CONDENSATE TRAIN.
US4932022A (en) 1987-10-07 1990-06-05 Telenova, Inc. Integrated voice and data telephone system
US4864131A (en) 1987-11-09 1989-09-05 The University Of Michigan Positron microscopy
US4838021A (en) 1987-12-11 1989-06-13 Hughes Aircraft Company Electrostatic ion thruster with improved thrust modulation
US4890282A (en) 1988-03-08 1989-12-26 Network Equipment Technologies, Inc. Mixed mode compression for data transmission
US4866704A (en) 1988-03-16 1989-09-12 California Institute Of Technology Fiber optic voice/data network
US4887265A (en) 1988-03-18 1989-12-12 Motorola, Inc. Packet-switched cellular telephone system
US5185073A (en) * 1988-06-21 1993-02-09 International Business Machines Corporation Method of fabricating nendritic materials
JPH0744511B2 (en) 1988-09-14 1995-05-15 富士通株式会社 High suburb rate multiplexing method
US5130985A (en) 1988-11-25 1992-07-14 Hitachi, Ltd. Speech packet communication system and method
FR2641093B1 (en) 1988-12-23 1994-04-29 Alcatel Business Systems
US4981371A (en) 1989-02-17 1991-01-01 Itt Corporation Integrated I/O interface for communication terminal
US5023563A (en) * 1989-06-08 1991-06-11 Hughes Aircraft Company Upshifted free electron laser amplifier
US5036513A (en) 1989-06-21 1991-07-30 Academy Of Applied Science Method of and apparatus for integrated voice (audio) communication simultaneously with "under voice" user-transparent digital data between telephone instruments
US5157000A (en) * 1989-07-10 1992-10-20 Texas Instruments Incorporated Method for dry etching openings in integrated circuit layers
US5155726A (en) 1990-01-22 1992-10-13 Digital Equipment Corporation Station-to-station full duplex communication in a token ring local area network
US5235248A (en) 1990-06-08 1993-08-10 The United States Of America As Represented By The United States Department Of Energy Method and split cavity oscillator/modulator to generate pulsed particle beams and electromagnetic fields
US5127001A (en) 1990-06-22 1992-06-30 Unisys Corporation Conference call arrangement for distributed network
US5113141A (en) 1990-07-18 1992-05-12 Science Applications International Corporation Four-fingers RFQ linac structure
US5268693A (en) 1990-08-31 1993-12-07 Trustees Of Dartmouth College Semiconductor film free electron laser
US5263043A (en) * 1990-08-31 1993-11-16 Trustees Of Dartmouth College Free electron laser utilizing grating coupling
US5128729A (en) 1990-11-13 1992-07-07 Motorola, Inc. Complex opto-isolator with improved stand-off voltage stability
US5214650A (en) 1990-11-19 1993-05-25 Ag Communication Systems Corporation Simultaneous voice and data system using the existing two-wire inter-face
US5302240A (en) * 1991-01-22 1994-04-12 Kabushiki Kaisha Toshiba Method of manufacturing semiconductor device
US5187591A (en) 1991-01-24 1993-02-16 Micom Communications Corp. System for transmitting and receiving aural information and modulated data
US5341374A (en) 1991-03-01 1994-08-23 Trilan Systems Corporation Communication network integrating voice data and video with distributed call processing
US5150410A (en) 1991-04-11 1992-09-22 Itt Corporation Secure digital conferencing system
US5283819A (en) 1991-04-25 1994-02-01 Compuadd Corporation Computing and multimedia entertainment system
FR2677490B1 (en) * 1991-06-07 1997-05-16 Thomson Csf SEMICONDUCTOR OPTICAL TRANSCEIVER.
GB9113684D0 (en) * 1991-06-25 1991-08-21 Smiths Industries Plc Display filter arrangements
US5229782A (en) 1991-07-19 1993-07-20 Conifer Corporation Stacked dual dipole MMDS feed
US5199918A (en) * 1991-11-07 1993-04-06 Microelectronics And Computer Technology Corporation Method of forming field emitter device with diamond emission tips
US5305312A (en) 1992-02-07 1994-04-19 At&T Bell Laboratories Apparatus for interfacing analog telephones and digital data terminals to an ISDN line
US5233623A (en) 1992-04-29 1993-08-03 Research Foundation Of State University Of New York Integrated semiconductor laser with electronic directivity and focusing control
US5282197A (en) 1992-05-15 1994-01-25 International Business Machines Low frequency audio sub-channel embedded signalling
US5562838A (en) 1993-03-29 1996-10-08 Martin Marietta Corporation Optical light pipe and microwave waveguide interconnects in multichip modules formed using adaptive lithography
TW255015B (en) * 1993-11-05 1995-08-21 Motorola Inc
US5578909A (en) 1994-07-15 1996-11-26 The Regents Of The Univ. Of California Coupled-cavity drift-tube linac
US5608263A (en) 1994-09-06 1997-03-04 The Regents Of The University Of Michigan Micromachined self packaged circuits for high-frequency applications
JP2770755B2 (en) 1994-11-16 1998-07-02 日本電気株式会社 Field emission type electron gun
US5504341A (en) 1995-02-17 1996-04-02 Zimec Consulting, Inc. Producing RF electric fields suitable for accelerating atomic and molecular ions in an ion implantation system
US5604352A (en) 1995-04-25 1997-02-18 Raychem Corporation Apparatus comprising voltage multiplication components
US5705443A (en) * 1995-05-30 1998-01-06 Advanced Technology Materials, Inc. Etching method for refractory materials
JPH09223475A (en) * 1996-02-19 1997-08-26 Nikon Corp Electromagnetic deflector and charge particle beam transfer apparatus using thereof
US5663971A (en) 1996-04-02 1997-09-02 The Regents Of The University Of California, Office Of Technology Transfer Axial interaction free-electron laser
KR100226752B1 (en) * 1996-08-26 1999-10-15 구본준 Method for forming multi-metal interconnection layer of semiconductor device
AU4896297A (en) * 1996-10-18 1998-05-15 Microwave Technologies Inc. Rotating-wave electron beam accelerator
US5744919A (en) * 1996-12-12 1998-04-28 Mishin; Andrey V. CW particle accelerator with low particle injection velocity
US5757009A (en) * 1996-12-27 1998-05-26 Northrop Grumman Corporation Charged particle beam expander
JPH10200204A (en) * 1997-01-06 1998-07-31 Fuji Xerox Co Ltd Surface-emitting semiconductor laser, manufacturing method thereof, and surface-emitting semiconductor laser array using the same
US6040625A (en) * 1997-09-25 2000-03-21 I/O Sensors, Inc. Sensor package arrangement
JP2981543B2 (en) * 1997-10-27 1999-11-22 金沢大学長 Electron tube type one-way optical amplifier
US6143476A (en) * 1997-12-12 2000-11-07 Applied Materials Inc Method for high temperature etching of patterned layers using an organic mask stack
EP1705475B1 (en) * 1997-12-15 2012-08-15 Seiko Instruments Inc. Optical waveguide probe and its manufacturing method
US6297511B1 (en) * 1999-04-01 2001-10-02 Raytheon Company High frequency infrared emitter
US6909104B1 (en) * 1999-05-25 2005-06-21 Nawotec Gmbh Miniaturized terahertz radiation source
JP2001273861A (en) * 2000-03-28 2001-10-05 Toshiba Corp Charged beam apparatus and pattern incline observation method
US6545425B2 (en) * 2000-05-26 2003-04-08 Exaconnect Corp. Use of a free space electron switch in a telecommunications network
US7064500B2 (en) * 2000-05-26 2006-06-20 Exaconnect Corp. Semi-conductor interconnect using free space electron switch
US6829286B1 (en) * 2000-05-26 2004-12-07 Opticomp Corporation Resonant cavity enhanced VCSEL/waveguide grating coupler
US6373194B1 (en) * 2000-06-01 2002-04-16 Raytheon Company Optical magnetron for high efficiency production of optical radiation
US6972421B2 (en) * 2000-06-09 2005-12-06 Cymer, Inc. Extreme ultraviolet light source
JP3762208B2 (en) * 2000-09-29 2006-04-05 株式会社東芝 Optical wiring board manufacturing method
US6603915B2 (en) * 2001-02-05 2003-08-05 Fujitsu Limited Interposer and method for producing a light-guiding structure
US20030012925A1 (en) * 2001-07-16 2003-01-16 Motorola, Inc. Process for fabricating semiconductor structures and devices utilizing the formation of a compliant substrate for materials used to form the same and including an etch stop layer used for back side processing
US20030034535A1 (en) * 2001-08-15 2003-02-20 Motorola, Inc. Mems devices suitable for integration with chip having integrated silicon and compound semiconductor devices, and methods for fabricating such devices
US20050023145A1 (en) * 2003-05-07 2005-02-03 Microfabrica Inc. Methods and apparatus for forming multi-layer structures using adhered masks
US6738176B2 (en) * 2002-04-30 2004-05-18 Mario Rabinowitz Dynamic multi-wavelength switching ensemble
JP2004014943A (en) * 2002-06-10 2004-01-15 Sony Corp Multibeam semiconductor laser, semiconductor light emitting device, and semiconductor device
JP2004158970A (en) * 2002-11-05 2004-06-03 Ube Ind Ltd Band filter employing thin film piezoelectric resonator
JP2004172965A (en) * 2002-11-20 2004-06-17 Seiko Epson Corp Inter-chip optical interconnection circuit, electro-optical device and electronic appliance
CN100533589C (en) * 2002-11-26 2009-08-26 株式会社东芝 Magnetic unit and memory
JP4249474B2 (en) * 2002-12-06 2009-04-02 セイコーエプソン株式会社 Wavelength multiplexing chip-to-chip optical interconnection circuit
JP2004191392A (en) * 2002-12-06 2004-07-08 Seiko Epson Corp Wavelength multiple intra-chip optical interconnection circuit, electro-optical device and electronic appliance
US7157839B2 (en) * 2003-01-27 2007-01-02 3M Innovative Properties Company Phosphor based light sources utilizing total internal reflection
JP4044453B2 (en) * 2003-02-06 2008-02-06 株式会社東芝 Quantum memory and information processing method using quantum memory
US20040171272A1 (en) * 2003-02-28 2004-09-02 Applied Materials, Inc. Method of etching metallic materials to form a tapered profile
JP4614199B2 (en) * 2003-03-14 2011-01-19 独立行政法人物質・材料研究機構 Ferroelectric material, two-color holographic recording medium, and wavelength selective filter
US6954515B2 (en) * 2003-04-25 2005-10-11 Varian Medical Systems, Inc., Radiation sources and radiation scanning systems with improved uniformity of radiation intensity
US6884335B2 (en) * 2003-05-20 2005-04-26 Novellus Systems, Inc. Electroplating using DC current interruption and variable rotation rate
US20050194258A1 (en) * 2003-06-27 2005-09-08 Microfabrica Inc. Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates
US20050067286A1 (en) * 2003-09-26 2005-03-31 The University Of Cincinnati Microfabricated structures and processes for manufacturing same
US7092603B2 (en) * 2004-03-03 2006-08-15 Fujitsu Limited Optical bridge for chip-to-board interconnection and methods of fabrication
US6996303B2 (en) * 2004-03-12 2006-02-07 Fujitsu Limited Flexible optical waveguides for backplane optical interconnections
JP4257741B2 (en) * 2004-04-19 2009-04-22 三菱電機株式会社 Charged particle beam accelerator, particle beam irradiation medical system using charged particle beam accelerator, and method of operating particle beam irradiation medical system
US20060062258A1 (en) * 2004-07-02 2006-03-23 Vanderbilt University Smith-Purcell free electron laser and method of operating same
US20060035173A1 (en) * 2004-08-13 2006-02-16 Mark Davidson Patterning thin metal films by dry reactive ion etching
US7791290B2 (en) * 2005-09-30 2010-09-07 Virgin Islands Microsystems, Inc. Ultra-small resonating charged particle beam modulator
KR100623477B1 (en) * 2004-08-25 2006-09-19 한국정보통신대학교 산학협력단 Optical printed circuit boards and optical interconnection blocks using optical fiber bundles

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5668368A (en) * 1992-02-21 1997-09-16 Hitachi, Ltd. Apparatus for suppressing electrification of sample in charged beam irradiation apparatus
US5790585A (en) * 1996-11-12 1998-08-04 The Trustees Of Dartmouth College Grating coupling free electron laser apparatus and method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109883602A (en) * 2019-03-13 2019-06-14 中国电子科技集团公司第四十九研究所 A kind of self compensation silicon micro-resonance type presser sensor chip based on SOI
CN109883602B (en) * 2019-03-13 2020-11-06 中国电子科技集团公司第四十九研究所 Self-compensating silicon micro-resonant pressure sensitive chip based on SOI

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US7557365B2 (en) 2009-07-07
WO2007064358A2 (en) 2007-06-07
US20070170370A1 (en) 2007-07-26

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