WO2007064404A3 - Microfluidic membrane pump and valve - Google Patents
Microfluidic membrane pump and valve Download PDFInfo
- Publication number
- WO2007064404A3 WO2007064404A3 PCT/US2006/039135 US2006039135W WO2007064404A3 WO 2007064404 A3 WO2007064404 A3 WO 2007064404A3 US 2006039135 W US2006039135 W US 2006039135W WO 2007064404 A3 WO2007064404 A3 WO 2007064404A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- diaphragm
- valve
- membrane pump
- substrate
- microfluidic structures
- Prior art date
Links
- 239000012528 membrane Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 2
- 238000004519 manufacturing process Methods 0.000 abstract 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/028—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms with in- or outlet valve arranged in the plate-like flexible member
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/025—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms two or more plate-like pumping members in parallel
- F04B43/026—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms two or more plate-like pumping members in parallel each plate-like pumping flexible member working in its own pumping chamber
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- B01F25/40—Static mixers
- B01F25/45—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads
- B01F25/451—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads characterised by means for moving the materials to be mixed or the mixture
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- B01F25/452—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads characterised by elements provided with orifices or interstitial spaces
- B01F25/4521—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads characterised by elements provided with orifices or interstitial spaces the components being pressed through orifices in elements, e.g. flat plates or cylinders, which obstruct the whole diameter of the tube
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Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Dispersion Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Clinical Laboratory Science (AREA)
- Hematology (AREA)
- General Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Theoretical Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Computer Hardware Design (AREA)
- Reciprocating Pumps (AREA)
- Micromachines (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP06816407A EP1940549A2 (en) | 2005-10-03 | 2006-10-03 | Microfluidic membrane pump and valve |
CN2006800370197A CN101282789B (en) | 2005-10-03 | 2006-10-03 | Microfluidic membrane pump and valve |
JP2008534710A JP4939541B2 (en) | 2005-10-03 | 2006-10-03 | Microfluidic pump and valve structure and manufacturing method thereof |
AU2006320916A AU2006320916B2 (en) | 2005-10-03 | 2006-10-03 | Microfluidic membrane pump and valve |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/242,694 US7832429B2 (en) | 2004-10-13 | 2005-10-03 | Microfluidic pump and valve structures and fabrication methods |
US11/242,694 | 2005-10-03 |
Publications (3)
Publication Number | Publication Date |
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WO2007064404A2 WO2007064404A2 (en) | 2007-06-07 |
WO2007064404A3 true WO2007064404A3 (en) | 2007-11-29 |
WO2007064404A8 WO2007064404A8 (en) | 2008-04-24 |
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Family Applications (1)
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PCT/US2006/039135 WO2007064404A2 (en) | 2005-10-03 | 2006-10-03 | Microfluidic membrane pump and valve |
Country Status (8)
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US (7) | US7832429B2 (en) |
EP (3) | EP1940549A2 (en) |
JP (1) | JP4939541B2 (en) |
KR (1) | KR20080059426A (en) |
CN (1) | CN101282789B (en) |
AU (1) | AU2006320916B2 (en) |
TW (1) | TW200720542A (en) |
WO (1) | WO2007064404A2 (en) |
Families Citing this family (183)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2290731A1 (en) * | 1999-11-26 | 2001-05-26 | D. Jed Harrison | Apparatus and method for trapping bead based reagents within microfluidic analysis system |
US6432290B1 (en) | 1999-11-26 | 2002-08-13 | The Governors Of The University Of Alberta | Apparatus and method for trapping bead based reagents within microfluidic analysis systems |
US20030108664A1 (en) * | 2001-10-05 | 2003-06-12 | Kodas Toivo T. | Methods and compositions for the formation of recessed electrical features on a substrate |
US20030217923A1 (en) * | 2002-05-24 | 2003-11-27 | Harrison D. Jed | Apparatus and method for trapping bead based reagents within microfluidic analysis systems |
WO2004061085A2 (en) | 2002-12-30 | 2004-07-22 | The Regents Of The University Of California | Methods and apparatus for pathogen detection and analysis |
US7799553B2 (en) | 2004-06-01 | 2010-09-21 | The Regents Of The University Of California | Microfabricated integrated DNA analysis system |
EP1794581A2 (en) | 2004-09-15 | 2007-06-13 | Microchip Biotechnologies, Inc. | Microfluidic devices |
GB0421529D0 (en) | 2004-09-28 | 2004-10-27 | Landegren Gene Technology Ab | Microfluidic structure |
US7608160B2 (en) * | 2004-10-13 | 2009-10-27 | Rheonix, Inc. | Laminated microfluidic structures and method for making |
US7832429B2 (en) * | 2004-10-13 | 2010-11-16 | Rheonix, Inc. | Microfluidic pump and valve structures and fabrication methods |
US8197231B2 (en) | 2005-07-13 | 2012-06-12 | Purity Solutions Llc | Diaphragm pump and related methods |
EP1790861A1 (en) * | 2005-11-25 | 2007-05-30 | Bonsens AB | Microfluidic system |
US7976795B2 (en) * | 2006-01-19 | 2011-07-12 | Rheonix, Inc. | Microfluidic systems |
US7749365B2 (en) | 2006-02-01 | 2010-07-06 | IntegenX, Inc. | Optimized sample injection structures in microfluidic separations |
WO2008030631A2 (en) | 2006-02-03 | 2008-03-13 | Microchip Biotechnologies, Inc. | Microfluidic devices |
US7766033B2 (en) * | 2006-03-22 | 2010-08-03 | The Regents Of The University Of California | Multiplexed latching valves for microfluidic devices and processors |
US8003388B2 (en) * | 2006-03-24 | 2011-08-23 | Nortis, Inc. | Method for creating perfusable microvessel systems |
US8841116B2 (en) * | 2006-10-25 | 2014-09-23 | The Regents Of The University Of California | Inline-injection microdevice and microfabricated integrated DNA analysis system using same |
CA2671750C (en) * | 2006-12-14 | 2015-04-07 | Boehringer Ingelheim Microparts Gmbh | Device for the intake or manipulation of a liquid |
DE102006059459B4 (en) * | 2006-12-14 | 2009-06-18 | Boehringer Ingelheim Microparts Gmbh | Device for receiving or manipulating a liquid and method for producing such a device |
WO2008115626A2 (en) * | 2007-02-05 | 2008-09-25 | Microchip Biotechnologies, Inc. | Microfluidic and nanofluidic devices, systems, and applications |
WO2008150210A1 (en) * | 2007-06-07 | 2008-12-11 | Ge Healthcare Bio-Sciences Ab | Micropump |
US8016260B2 (en) * | 2007-07-19 | 2011-09-13 | Formulatrix, Inc. | Metering assembly and method of dispensing fluid |
US8454906B2 (en) * | 2007-07-24 | 2013-06-04 | The Regents Of The University Of California | Microfabricated droplet generator for single molecule/cell genetic analysis in engineered monodispersed emulsions |
DE102007035721B4 (en) | 2007-07-30 | 2019-02-07 | Robert Bosch Gmbh | Microvalve, method of manufacturing a microvalve and micropump |
US8485793B1 (en) * | 2007-09-14 | 2013-07-16 | Aprolase Development Co., Llc | Chip scale vacuum pump |
CA2700946A1 (en) * | 2007-09-28 | 2009-04-02 | University Of Toronto | A system, apparatus and method for applying mechanical force to a material |
WO2009049268A1 (en) * | 2007-10-12 | 2009-04-16 | Rheonix, Inc. | Integrated microfluidic device and methods |
WO2009108260A2 (en) * | 2008-01-22 | 2009-09-03 | Microchip Biotechnologies, Inc. | Universal sample preparation system and use in an integrated analysis system |
US8961902B2 (en) * | 2008-04-23 | 2015-02-24 | Bioscale, Inc. | Method and apparatus for analyte processing |
ES2352581T3 (en) * | 2008-06-02 | 2011-02-21 | Boehringer Ingelheim Microparts Gmbh | STRUCTURE OF MICROFLUIDIC SHEET FOR DOSAGE OF LIQUIDS. |
DE102008002336A1 (en) * | 2008-06-10 | 2009-12-24 | Robert Bosch Gmbh | Pinch valve and method for its production |
US8122901B2 (en) | 2008-06-30 | 2012-02-28 | Canon U.S. Life Sciences, Inc. | System and method for microfluidic flow control |
WO2010027806A2 (en) * | 2008-08-26 | 2010-03-11 | Infusion Innovations, Inc. | Finger swipe fluid-transfer collection assembly and method of using the same |
SE533065C2 (en) * | 2008-10-22 | 2010-06-22 | Nanospace Ab | Pressure relief valve |
WO2010073020A1 (en) * | 2008-12-24 | 2010-07-01 | Heriot-Watt University | A microfluidic system and method |
KR20110111449A (en) | 2008-12-31 | 2011-10-11 | 인터젠엑스 인크. | Instrument with microfluidic chip |
US8100293B2 (en) * | 2009-01-23 | 2012-01-24 | Formulatrix, Inc. | Microfluidic dispensing assembly |
US8573259B2 (en) * | 2009-03-25 | 2013-11-05 | The Regents Of The University Of Michigan | Modular microfluidic assembly block and system including the same |
BRPI1007625B1 (en) * | 2009-04-23 | 2020-03-10 | Koninklijke Philips N.V. | MICROFLUID SYSTEM TO MIX A FLUID, CARTRIDGE, AND METHOD FOR MIXING FLUIDS |
CN102459565A (en) | 2009-06-02 | 2012-05-16 | 尹特根埃克斯有限公司 | Fluidic devices with diaphragm valves |
JP2012529268A (en) | 2009-06-05 | 2012-11-22 | インテジェンクス,インコーポレイテッド | Use of universal sample preparation system and integrated analysis system |
AU2010302952A1 (en) * | 2009-09-30 | 2012-05-10 | Mycrolab Diagnostics Pty Ltd | Selective bond reduction in microfluidic devices |
KR101472581B1 (en) * | 2009-10-21 | 2014-12-16 | 비오까르띠 엔브이 | Microfluidic cartridge with parallel pneumatic interface plate |
US9855735B2 (en) | 2009-11-23 | 2018-01-02 | Cyvek, Inc. | Portable microfluidic assay devices and methods of manufacture and use |
US10065403B2 (en) | 2009-11-23 | 2018-09-04 | Cyvek, Inc. | Microfluidic assay assemblies and methods of manufacture |
US9759718B2 (en) | 2009-11-23 | 2017-09-12 | Cyvek, Inc. | PDMS membrane-confined nucleic acid and antibody/antigen-functionalized microlength tube capture elements, and systems employing them, and methods of their use |
JP5701894B2 (en) | 2009-11-23 | 2015-04-15 | サイヴェク・インコーポレイテッド | Method and apparatus for performing an assay |
US9500645B2 (en) | 2009-11-23 | 2016-11-22 | Cyvek, Inc. | Micro-tube particles for microfluidic assays and methods of manufacture |
US9651568B2 (en) | 2009-11-23 | 2017-05-16 | Cyvek, Inc. | Methods and systems for epi-fluorescent monitoring and scanning for microfluidic assays |
US9700889B2 (en) | 2009-11-23 | 2017-07-11 | Cyvek, Inc. | Methods and systems for manufacture of microarray assay systems, conducting microfluidic assays, and monitoring and scanning to obtain microfluidic assay results |
US8584703B2 (en) | 2009-12-01 | 2013-11-19 | Integenx Inc. | Device with diaphragm valve |
KR101851117B1 (en) | 2010-01-29 | 2018-04-23 | 마이크로닉스 인코포레이티드. | Sample-to-answer microfluidic cartridge |
EP2359886A1 (en) * | 2010-02-12 | 2011-08-24 | Debiotech S.A. | Micromechanic passive flow regulator |
US8720036B2 (en) | 2010-03-09 | 2014-05-13 | Netbio, Inc. | Unitary biochip providing sample-in to results-out processing and methods of manufacture |
KR102027441B1 (en) * | 2010-03-09 | 2019-10-01 | 에이엔디이 코포레이션 | Unitary biochip providing sample-in to results-out processing and methods of manufacture |
WO2011146069A1 (en) | 2010-05-21 | 2011-11-24 | Hewlett-Packard Development Company, L.P. | Fluid ejection device including recirculation system |
US10132303B2 (en) | 2010-05-21 | 2018-11-20 | Hewlett-Packard Development Company, L.P. | Generating fluid flow in a fluidic network |
US9963739B2 (en) | 2010-05-21 | 2018-05-08 | Hewlett-Packard Development Company, L.P. | Polymerase chain reaction systems |
EP2571696B1 (en) | 2010-05-21 | 2019-08-07 | Hewlett-Packard Development Company, L.P. | Fluid ejection device with circulation pump |
US9395050B2 (en) | 2010-05-21 | 2016-07-19 | Hewlett-Packard Development Company, L.P. | Microfluidic systems and networks |
US8721061B2 (en) | 2010-05-21 | 2014-05-13 | Hewlett-Packard Development Company, L.P. | Fluid ejection device with circulation pump |
US8512538B2 (en) | 2010-05-28 | 2013-08-20 | Integenx Inc. | Capillary electrophoresis device |
DE102011015184B4 (en) | 2010-06-02 | 2013-11-21 | Thinxxs Microtechnology Ag | Device for transporting small volumes of a fluid, in particular micropump or microvalve |
KR20110136629A (en) | 2010-06-15 | 2011-12-21 | 삼성전자주식회사 | Microfluidic device comprising microvalve |
GB2481425A (en) | 2010-06-23 | 2011-12-28 | Iti Scotland Ltd | Method and device for assembling polynucleic acid sequences |
WO2012004423A1 (en) | 2010-07-07 | 2012-01-12 | Ikerlan, S.Coop | Method for producing microfluid devices. |
WO2012024658A2 (en) | 2010-08-20 | 2012-02-23 | IntegenX, Inc. | Integrated analysis system |
WO2012024657A1 (en) | 2010-08-20 | 2012-02-23 | IntegenX, Inc. | Microfluidic devices with mechanically-sealed diaphragm valves |
WO2012092394A1 (en) | 2010-12-29 | 2012-07-05 | Cardinal Health 414, Llc | Closed vial fill system for aseptic dispensing |
DE102011003856B4 (en) | 2011-02-09 | 2020-06-18 | Robert Bosch Gmbh | Microsystem for fluidic applications as well as manufacturing and use methods for a microsystem for fluidic applications |
CN106552682B (en) | 2011-03-22 | 2020-06-19 | 西维克公司 | Microfluidic device and methods of manufacture and use |
US8709353B2 (en) * | 2011-03-24 | 2014-04-29 | Boehringer Ingelheim Microparts Gmbh | Device and method for producing a fluidic connection between cavities |
US20140065035A1 (en) * | 2011-04-19 | 2014-03-06 | Bio Focus Co., Ltd. | Method for manufacturing a microvalve device mounted on a lab-on-a-chip, and microvalve device manufactured by same |
CN102234614B (en) * | 2011-05-30 | 2013-02-13 | 中国科学院苏州纳米技术与纳米仿生研究所 | Micro-fluidic cell suspension culture chip and application thereof |
DE102011078976A1 (en) * | 2011-07-11 | 2013-01-17 | Robert Bosch Gmbh | Microfluidic device and method for producing a microfluidic device |
US9901924B2 (en) * | 2011-07-14 | 2018-02-27 | Enplas Corporation | Fluid handling device, fluid handling method, and fluid handling system |
US20130102772A1 (en) | 2011-07-15 | 2013-04-25 | Cardinal Health 414, Llc | Systems, methods and devices for producing, manufacturing and control of radiopharmaceuticals-full |
WO2013012813A1 (en) | 2011-07-15 | 2013-01-24 | Cardinal Health 414, Llc | Modular cassette synthesis unit |
US9417332B2 (en) | 2011-07-15 | 2016-08-16 | Cardinal Health 414, Llc | Radiopharmaceutical CZT sensor and apparatus |
JP6068850B2 (en) | 2011-07-25 | 2017-01-25 | 株式会社エンプラス | Fluid handling apparatus and fluid handling method |
US8975193B2 (en) | 2011-08-02 | 2015-03-10 | Teledyne Dalsa Semiconductor, Inc. | Method of making a microfluidic device |
DE102011109944B4 (en) * | 2011-08-10 | 2018-10-25 | Bürkert Werke GmbH | Manufacturing process for microvalves |
KR101242540B1 (en) | 2011-08-19 | 2013-03-19 | (주)로고스바이오시스템스 | Microchip |
TWI448413B (en) * | 2011-09-07 | 2014-08-11 | Ind Tech Res Inst | Pneumatic micropump |
US20150136604A1 (en) | 2011-10-21 | 2015-05-21 | Integenx Inc. | Sample preparation, processing and analysis systems |
US10865440B2 (en) | 2011-10-21 | 2020-12-15 | IntegenX, Inc. | Sample preparation, processing and analysis systems |
MY155726A (en) * | 2011-11-01 | 2015-11-17 | Mimos Berhad | A microfluidic system and method thereof |
CN103127971B (en) * | 2011-12-02 | 2016-04-20 | 国家纳米科学中心 | A kind of Micro-flow pipe and preparation method thereof |
CN103157523A (en) * | 2011-12-15 | 2013-06-19 | 三星电子株式会社 | Microfluidic device and method of manufacturing the same |
CN103184143A (en) * | 2011-12-29 | 2013-07-03 | 三星电子株式会社 | Solid reagent dissolving device and method of dissolving solid reagent by using the same |
EP2802417B1 (en) * | 2012-01-09 | 2019-05-15 | Micronics, Inc. | Microfluidic reactor system |
US10384153B2 (en) | 2012-01-24 | 2019-08-20 | Minicare B.V. | Filter unit for a cartridge |
KR102114734B1 (en) * | 2012-03-08 | 2020-05-25 | 싸이벡, 아이엔씨 | Micro-tube particles for microfluidic assays and methods of manufacture |
US9334858B2 (en) * | 2012-04-19 | 2016-05-10 | Kci Licensing, Inc. | Disc pump with perimeter valve configuration |
WO2013166856A1 (en) * | 2012-05-07 | 2013-11-14 | Capitalbio Corporation | Microvalve integrated in a microfluidic device and method of use |
US9610392B2 (en) | 2012-06-08 | 2017-04-04 | Fresenius Medical Care Holdings, Inc. | Medical fluid cassettes and related systems and methods |
WO2014015251A2 (en) * | 2012-07-20 | 2014-01-23 | President And Fellows Of Harvard College | Tissue-engineered pumps and valves and uses thereof |
US9364804B2 (en) | 2012-08-27 | 2016-06-14 | Agency For Science, Technology And Research | Microfluidic agitator devices and methods for agitation of a fluid |
WO2014091334A2 (en) * | 2012-12-13 | 2014-06-19 | Koninklijke Philips N.V. | Fluidic system with fluidic stop. |
CN103861668B (en) * | 2012-12-17 | 2015-05-13 | 中国科学院沈阳自动化研究所 | Microfluidic chip based on pneumatic micro pumps and micro mixer |
EP2935908B1 (en) * | 2012-12-21 | 2019-08-14 | PerkinElmer Health Sciences, Inc. | Fluidic circuits and related manufacturing methods |
WO2014100743A2 (en) * | 2012-12-21 | 2014-06-26 | Micronics, Inc. | Low elasticity films for microfluidic use |
WO2014100725A1 (en) | 2012-12-21 | 2014-06-26 | Micronics, Inc. | Portable fluorescence detection system and microassay cartridge |
JP6047405B2 (en) * | 2013-01-08 | 2016-12-21 | 住友理工株式会社 | valve |
EP2754935A1 (en) | 2013-01-10 | 2014-07-16 | Debiotech S.A. | Adjustable passive flow regulator |
DE102013201342A1 (en) | 2013-01-29 | 2014-07-31 | Robert Bosch Gmbh | Method for producing a normally-closed check valve for microfluidic components made of a polymer layer system and non-return valve |
CN104969076B (en) | 2013-01-31 | 2018-04-03 | 株式会社日立高新技术 | The group of biochemistry filter core, biochemistry filter core and filter cartridge seat |
DE102013207683A1 (en) * | 2013-04-26 | 2014-11-13 | Robert Bosch Gmbh | Method and device for producing a microfluidic analysis cartridge |
WO2014182847A1 (en) | 2013-05-07 | 2014-11-13 | Micronics, Inc. | Device for preparation and analysis of nucleic acids |
WO2014182844A1 (en) | 2013-05-07 | 2014-11-13 | Micronics, Inc. | Microfluidic devices and methods for performing serum separation and blood cross-matching |
CA2911303C (en) | 2013-05-07 | 2021-02-16 | Micronics, Inc. | Methods for preparation of nucleic acid-containing samples using clay minerals and alkaline solutions |
DE102013209866B4 (en) * | 2013-05-28 | 2021-11-04 | Robert Bosch Gmbh | Device with a predetermined fluid displacement |
FR3006207A1 (en) | 2013-05-30 | 2014-12-05 | Commissariat Energie Atomique | FLUID CARD COMPRISING A FLUIDIC CHANNEL HAVING A REFERMABLE OPENING BY A FLEXIBLE FILM |
US11944946B2 (en) | 2013-06-28 | 2024-04-02 | Saint-Gobain Performance Plastics Corporation | Mixing assemblies including magnetic impellers |
US9815035B2 (en) | 2013-06-28 | 2017-11-14 | Saint-Gobain Performance Plastics Corporation | Mixing assemblies including magnetic impellers |
JP6111161B2 (en) * | 2013-07-18 | 2017-04-05 | 株式会社エンプラス | Fluid handling apparatus and fluid handling method |
GB2516669B (en) | 2013-07-29 | 2015-09-09 | Atlas Genetics Ltd | A method for processing a liquid sample in a fluidic cartridge |
DE102013222283B3 (en) | 2013-11-04 | 2015-01-15 | Robert Bosch Gmbh | Apparatus and method for handling reagents |
CN105873681B (en) | 2013-11-18 | 2019-10-11 | 尹特根埃克斯有限公司 | Cartridge and instrument for sample analysis |
CN105828944B (en) * | 2013-11-22 | 2018-02-02 | 瑞尼克斯有限公司 | Without channel pump and its method and application |
WO2015083829A1 (en) * | 2013-12-06 | 2015-06-11 | 国立大学法人東京大学 | Valve, fluid-controlling structure, fluid device, and method for manufacturing valve |
DE102014200499B4 (en) * | 2014-01-14 | 2017-03-30 | Robert Bosch Gmbh | Microfluidic system and apparatus and method for conducting fluid in a microfluidic system |
JP6506907B2 (en) * | 2014-02-10 | 2019-04-24 | 株式会社エンプラス | Liquid handling device |
JP6548356B2 (en) * | 2014-03-20 | 2019-07-24 | キヤノンメディカルシステムズ株式会社 | Liquid transfer device |
EP3137030B1 (en) | 2014-04-30 | 2019-06-12 | Kimberly-Clark Worldwide, Inc. | Absorbent article including a fluid distributing structure |
FR3021074B1 (en) * | 2014-05-14 | 2016-05-27 | Saint Gobain Performance Plastics France | MEMBRANE PUMP |
WO2015179098A1 (en) | 2014-05-21 | 2015-11-26 | Integenx Inc. | Fluidic cartridge with valve mechanism |
FR3021559B1 (en) * | 2014-05-27 | 2017-09-15 | Commissariat Energie Atomique | FLUID CARD COMPRISING A STORAGE TANK FOR A FLUID AND A HYPER-ELASTIC MEMBRANE |
WO2015187849A2 (en) * | 2014-06-04 | 2015-12-10 | Lucigen Corporation | Sample collection and analysis devices |
WO2015188165A1 (en) * | 2014-06-06 | 2015-12-10 | The Regents Of The University Of California | Self-shielded, benchtop chemistry system |
WO2015196065A1 (en) * | 2014-06-19 | 2015-12-23 | The Trustees Of The University Of Pennsylvania | Apparatus and methods for making recombinant protein-stabilized monodisperse microbubbles |
WO2016004394A1 (en) * | 2014-07-03 | 2016-01-07 | Texas Tech University System | Microfluidic cardiovascular system and method |
CN104315241B (en) * | 2014-08-20 | 2018-01-09 | 中国检验检疫科学研究院 | Microfluid micro-valve and drive device |
CN104315232B (en) * | 2014-08-20 | 2018-01-09 | 中国检验检疫科学研究院 | Microfluid micro-valve drive device |
EP3552690A1 (en) | 2014-10-22 | 2019-10-16 | IntegenX Inc. | Systems and methods for sample preparation, processing and analysis |
FR3035009B1 (en) * | 2015-04-20 | 2020-02-07 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | MICROFLUIDIC DEVICE FOR CONTROLLING THE FLOW OF A FLUID |
WO2016200922A1 (en) | 2015-06-12 | 2016-12-15 | Cytochip Inc. | Fluidic units and cartridges for multi-analyte analysis |
US10634602B2 (en) | 2015-06-12 | 2020-04-28 | Cytochip Inc. | Fluidic cartridge for cytometry and additional analysis |
US10233491B2 (en) | 2015-06-19 | 2019-03-19 | IntegenX, Inc. | Valved cartridge and system |
CN108027310B (en) | 2015-07-14 | 2020-12-22 | 芯易诊有限公司 | Volume sensing in fluidic cartridges |
FR3040141B1 (en) * | 2015-08-20 | 2020-02-14 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | FLUIDIC CARD COMPRISING AT LEAST ONE FLUIDIC VALVE |
CN105299000B (en) * | 2015-11-10 | 2018-05-29 | 中国科学院合肥物质科学研究院 | A kind of unidirectional drive microfluid pipe |
US11384328B2 (en) | 2015-11-18 | 2022-07-12 | President And Fellows Of Harvard College | Cartridge-based system for long term culture of cell clusters |
US10228367B2 (en) | 2015-12-01 | 2019-03-12 | ProteinSimple | Segmented multi-use automated assay cartridge |
EP3222351A1 (en) * | 2016-03-23 | 2017-09-27 | Ecole Polytechnique Federale de Lausanne (EPFL) | Microfluidic network device |
US10400915B2 (en) * | 2016-04-14 | 2019-09-03 | Triad National Security, Llc | Magnetically controlled valve and pump devices and methods of using the same |
CN108698044B (en) | 2016-04-19 | 2021-03-09 | 惠普发展公司,有限责任合伙企业 | Fluid micro-electromechanical system |
DE102016014056A1 (en) * | 2016-06-27 | 2017-12-28 | M2P-Labs Gmbh | Microfluidic chip with a functional area that is with a flexible or deformable cover, and microfluidic system |
CN109690310B (en) * | 2016-07-04 | 2022-04-15 | 弗劳恩霍夫应用研究促进协会 | Apparatus with micro-fluidic actuator |
WO2018009222A1 (en) | 2016-07-08 | 2018-01-11 | Hewlett-Packard Development Company, L.P. | Microfluidic device for fluid mixture |
US10500587B2 (en) | 2016-07-20 | 2019-12-10 | Boise State University | Ferro-magnetic shape memory alloy microcavity fluid sensor |
GB2555816A (en) * | 2016-11-10 | 2018-05-16 | Natural Environment Res Council | Analyser |
FR3058995B1 (en) | 2016-11-18 | 2021-02-19 | Commissariat Energie Atomique | METHOD AND SYSTEM FOR CONTROL OF A MICROFLUIDIC DEVICE |
CN108217576B (en) * | 2016-12-21 | 2020-05-22 | 上海傲睿科技有限公司 | Diaphragm stop valve and manufacturing method thereof |
EP3559464B1 (en) * | 2016-12-21 | 2020-11-25 | Fresenius Medical Care Deutschland GmbH | Diaphragm pump device and diaphragm pump having a diaphragm pump device and an actuation device |
DE102016015207A1 (en) * | 2016-12-21 | 2018-06-21 | Fresenius Medical Care Deutschland Gmbh | Actuating device and method for operating an actuating device and diaphragm pump with an actuating device and a diaphragm pump device and a blood treatment device with a diaphragm pump |
CN110741161A (en) * | 2017-03-13 | 2020-01-31 | 斯蒂芬.A.马什 | Micropump system and process technology |
CN111050913B (en) * | 2017-09-01 | 2022-04-12 | 深圳华大智造科技有限公司 | Injection molded microfluidic/fluidic cartridge integrated with silicon-based sensors |
WO2019078894A1 (en) | 2017-10-20 | 2019-04-25 | Hewlett-Packard Development Company, L.P. | Microfluidic device |
WO2019079681A1 (en) | 2017-10-20 | 2019-04-25 | President And Fellows Of Harvard College | Methods for producing mature adipocytes and methods of use thereof |
US11491487B2 (en) | 2017-10-23 | 2022-11-08 | Cytochip Inc. | Devices and methods for measuring analytes and target particles |
DE102018204633A1 (en) * | 2018-03-27 | 2019-10-02 | Robert Bosch Gmbh | Microfluidic device and method for processing a fluid |
CA3098046A1 (en) * | 2018-03-28 | 2019-10-03 | Muthukumaran Packirisamy | Active composite materials for micro-fluidic and nano- fluidic devices |
CN108980459B (en) * | 2018-08-24 | 2020-02-18 | 河南科技大学 | Micro-fluidic valve group for micro-fluidic chip detection |
CN110905787A (en) * | 2018-09-17 | 2020-03-24 | 研能科技股份有限公司 | Method for manufacturing micro-electromechanical pump |
CN109490058B (en) * | 2018-11-16 | 2021-04-20 | 南京爱思唯志生物科技有限公司 | Microfluidic system and method suitable for liquid mixing |
JP2022518069A (en) * | 2019-01-24 | 2022-03-11 | ハウプト レムス ブリックス アンダース | Fluid peristaltic layer pump |
US11084031B1 (en) | 2019-02-19 | 2021-08-10 | Facebook Technologies, Llc | Methods of fabricating microfluidic valves and systems |
US11796085B2 (en) * | 2019-07-26 | 2023-10-24 | Lam Research Corporation | Non-elastomeric, non-polymeric, non-metallic membrane valves for semiconductor processing equipment |
EP3772589B1 (en) * | 2019-08-06 | 2021-10-20 | Infineon Technologies AG | Mems pump |
JP2022553270A (en) * | 2019-10-18 | 2022-12-22 | ヒールテル・(グアンジョウ)・メディカル・テクノロジー・カンパニー・リミテッド | Systems and methods for injecting fluids |
EP3845790B1 (en) * | 2019-12-30 | 2024-04-17 | Imec VZW | Microfluidic device for controlling pneumatic microvalves |
US20230285661A1 (en) * | 2020-07-07 | 2023-09-14 | Cam Med Inc. | Infusion pump |
EP4244512A4 (en) | 2020-11-16 | 2024-01-17 | Siemens Healthcare Diagnostics Inc | Valve for microfluidic device |
EP4019774A1 (en) * | 2020-12-22 | 2022-06-29 | Fluigent | Apparatus for controlling pressure or flow in a fluidic system |
US11930875B2 (en) | 2021-07-12 | 2024-03-19 | John Hooman Kasraei | Impact reduction system for personal protective devices |
CN113769807A (en) * | 2021-10-29 | 2021-12-10 | 青岛全诊生物技术有限公司 | Diaphragm type micro-fluidic control device |
US20240033939A1 (en) * | 2021-11-13 | 2024-02-01 | Run Ze Gao | Microfluidic valves and channels and minifluidic valves and channels enabled soft robotic device, apparel, and method |
FR3130780A1 (en) | 2021-12-17 | 2023-06-23 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Fluidic component and device of the fluidic valve type for sealing |
FR3130921A1 (en) | 2021-12-17 | 2023-06-23 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Fluidic component and device of the fluidic valve type for isolation |
FR3130781A1 (en) | 2021-12-17 | 2023-06-23 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Fluidic component and fluidic access control device |
CN117323879B (en) * | 2023-11-30 | 2024-02-27 | 中国科学院精密测量科学与技术创新研究院 | Multistage split micromixer and application thereof |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002068823A1 (en) * | 2000-11-06 | 2002-09-06 | Nanostream Inc. | Uni-directional flow microfluidic components |
US20020155010A1 (en) * | 2001-04-24 | 2002-10-24 | Karp Christoph D. | Microfluidic valve with partially restrained element |
US20020166585A1 (en) * | 2000-11-06 | 2002-11-14 | Nanostream, Inc. | Microfluidic regulating device |
EP1520621A2 (en) * | 1997-07-21 | 2005-04-06 | Ysi Incorporated | Microfluidic analyzer module |
Family Cites Families (72)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1329559A (en) | 1916-02-21 | 1920-02-03 | Tesla Nikola | Valvular conduit |
US3603346A (en) * | 1969-09-05 | 1971-09-07 | Brown & Sharpe Mfg | Pneumatic logic element |
US3610274A (en) * | 1969-10-08 | 1971-10-05 | Brown & Sharpe Mfg | Fluid logic circuit |
CH539210A (en) * | 1970-05-26 | 1973-07-15 | Ondrej Brychta Und Christopher | Logical fluidic circuit |
US3935358A (en) * | 1973-03-29 | 1976-01-27 | E. I. Du Pont De Nemours & Co. | Process for preparing a hollow, rib-reinforced laminated structure |
US4119120A (en) * | 1976-11-29 | 1978-10-10 | Beckman Instruments, Inc. | Fluid switch |
US4581624A (en) * | 1984-03-01 | 1986-04-08 | Allied Corporation | Microminiature semiconductor valve |
DE3618107A1 (en) * | 1986-05-30 | 1987-12-03 | Siemens Ag | INK WRITING HEAD WITH PIEZOELECTRICALLY EXTENDABLE MEMBRANE |
US4867829A (en) * | 1987-01-16 | 1989-09-19 | Takashimaya Nippatsu Kogyo Co., Ltd. | Process for producing interior vehicular trim |
US4852851A (en) * | 1987-12-11 | 1989-08-01 | Integrated Fluidics, Inc. | Valve with flexible sheet member |
IT1255014B (en) | 1992-03-27 | 1995-10-13 | Instrumentation Lab Spa | FLUIDS HANDLING AND INTERCEPTION DEVICES |
US5203368A (en) * | 1992-07-29 | 1993-04-20 | Protein Technologies Inc. | Matrix of valves |
US5659171A (en) * | 1993-09-22 | 1997-08-19 | Northrop Grumman Corporation | Micro-miniature diaphragm pump for the low pressure pumping of gases |
DE69431994T2 (en) * | 1993-10-04 | 2003-10-30 | Res Int Inc | MICRO-MACHINED FLUID TREATMENT DEVICE WITH FILTER AND CONTROL VALVE |
US5731212A (en) | 1994-12-20 | 1998-03-24 | International Technidyne Corporation | Test apparatus and method for testing cuvette accommodated samples |
US5593290A (en) * | 1994-12-22 | 1997-01-14 | Eastman Kodak Company | Micro dispensing positive displacement pump |
US6227809B1 (en) * | 1995-03-09 | 2001-05-08 | University Of Washington | Method for making micropumps |
US5876187A (en) * | 1995-03-09 | 1999-03-02 | University Of Washington | Micropumps with fixed valves |
US20020022261A1 (en) * | 1995-06-29 | 2002-02-21 | Anderson Rolfe C. | Miniaturized genetic analysis systems and methods |
US5856174A (en) * | 1995-06-29 | 1999-01-05 | Affymetrix, Inc. | Integrated nucleic acid diagnostic device |
US6168948B1 (en) * | 1995-06-29 | 2001-01-02 | Affymetrix, Inc. | Miniaturized genetic analysis systems and methods |
US20050100946A1 (en) * | 1995-06-29 | 2005-05-12 | Affymetrix, Inc. | Integrated nucleic acid diagnostic device and method for in-situ confocal microscopy |
US5863502A (en) * | 1996-01-24 | 1999-01-26 | Sarnoff Corporation | Parallel reaction cassette and associated devices |
US5888603A (en) * | 1996-04-24 | 1999-03-30 | Fergason; James L. | Stacked films birefringent device and method of making same |
DE19648695C2 (en) * | 1996-11-25 | 1999-07-22 | Abb Patent Gmbh | Device for the automatic and continuous analysis of liquid samples |
US7052594B2 (en) * | 2002-01-31 | 2006-05-30 | Sri International | Devices and methods for controlling fluid flow using elastic sheet deflection |
US6073482A (en) * | 1997-07-21 | 2000-06-13 | Ysi Incorporated | Fluid flow module |
US6106245A (en) * | 1997-10-09 | 2000-08-22 | Honeywell | Low cost, high pumping rate electrostatically actuated mesopump |
US6123798A (en) * | 1998-05-06 | 2000-09-26 | Caliper Technologies Corp. | Methods of fabricating polymeric structures incorporating microscale fluidic elements |
CA2332919A1 (en) * | 1998-06-08 | 1999-12-16 | Caliper Technologies Corporation | Microfluidic devices, systems and methods for performing integrated reactions and separations |
DE19849700C2 (en) * | 1998-10-28 | 2001-06-28 | Festo Ag & Co | Micro valve arrangement |
US6171850B1 (en) * | 1999-03-08 | 2001-01-09 | Caliper Technologies Corp. | Integrated devices and systems for performing temperature controlled reactions and analyses |
US6303343B1 (en) * | 1999-04-06 | 2001-10-16 | Caliper Technologies Corp. | Inefficient fast PCR |
EP1230544B1 (en) * | 1999-06-18 | 2004-07-28 | Gamera Bioscience Corporation | Devices and methods for the performance of miniaturized homogeneous assays |
US7601270B1 (en) * | 1999-06-28 | 2009-10-13 | California Institute Of Technology | Microfabricated elastomeric valve and pump systems |
DE19947495C2 (en) | 1999-10-01 | 2003-05-28 | Agilent Technologies Inc | Microfluidic microchip |
US6837476B2 (en) * | 2002-06-19 | 2005-01-04 | Honeywell International Inc. | Electrostatically actuated valve |
US7351376B1 (en) * | 2000-06-05 | 2008-04-01 | California Institute Of Technology | Integrated active flux microfluidic devices and methods |
US6752599B2 (en) * | 2000-06-09 | 2004-06-22 | Alink M, Inc. | Apparatus for photoresist delivery |
US6627159B1 (en) * | 2000-06-28 | 2003-09-30 | 3M Innovative Properties Company | Centrifugal filling of sample processing devices |
ATE374162T1 (en) * | 2000-11-02 | 2007-10-15 | Biacore Ab | VALVE TO WHICH A MICROFLUID LIQUID TRANSPORT ARRANGEMENT IS INTEGRALLY ASSIGNED |
US6521188B1 (en) * | 2000-11-22 | 2003-02-18 | Industrial Technology Research Institute | Microfluidic actuator |
US20020098122A1 (en) * | 2001-01-22 | 2002-07-25 | Angad Singh | Active disposable microfluidic system with externally actuated micropump |
US6864932B2 (en) * | 2001-04-16 | 2005-03-08 | Nitto Denko Corporation | Optical member and liquid-crystal display device |
FR2828245B1 (en) * | 2001-04-27 | 2005-11-11 | Poudres & Explosifs Ste Nale | PYROTECHNIC MICROSYSTEMS FOR MICROSYSTEMS |
JP2003083256A (en) * | 2001-09-14 | 2003-03-19 | Kawamura Inst Of Chem Res | Micro fluid device with a pump mechanism, pump mechanism driving device and fluid transporting method |
US6729856B2 (en) * | 2001-10-09 | 2004-05-04 | Honeywell International Inc. | Electrostatically actuated pump with elastic restoring forces |
US6827811B2 (en) * | 2002-02-07 | 2004-12-07 | Lynntech, Inc. | Method for vacuum pressing electrochemical cell components |
US6877528B2 (en) * | 2002-04-17 | 2005-04-12 | Cytonome, Inc. | Microfluidic system including a bubble valve for regulating fluid flow through a microchannel |
US6843263B2 (en) * | 2002-06-24 | 2005-01-18 | Industrial Technology Research Institute | Partially closed microfluidic system and microfluidic driving method |
US7452509B2 (en) * | 2002-07-26 | 2008-11-18 | Applied Biosystems Inc. | Microfluidic device including displaceable material trap, and system |
ITTO20020808A1 (en) * | 2002-09-17 | 2004-03-18 | St Microelectronics Srl | INTEGRATED DNA ANALYSIS DEVICE. |
TW590982B (en) * | 2002-09-27 | 2004-06-11 | Agnitio Science & Technology I | Micro-fluid driving device |
US6774337B2 (en) * | 2002-10-21 | 2004-08-10 | Lockheed Martin Corporation | Method for protecting the diaphragm and extending the life of SiC and/or Si MEMS microvalves |
FR2847246B1 (en) * | 2002-11-19 | 2005-07-08 | Poudres & Explosifs Ste Nale | DOUBLE EFFECT PYROTECHNIC MICROACTIONER FOR MICROSYSTEM AND MICROSYSTEM USING SUCH MICROACTIONER |
JP2006508790A (en) * | 2002-12-04 | 2006-03-16 | スピンクス インコーポレイテッド | Apparatus and method for programmable microanalytical scale manipulation of fluids |
US20040110132A1 (en) * | 2002-12-06 | 2004-06-10 | Affymetrix, Inc. | Method for concentrate nucleic acids |
WO2004059474A2 (en) * | 2002-12-20 | 2004-07-15 | Applied Materials, Inc. | Micromachined intergrated fluid delivery system |
WO2004061085A2 (en) * | 2002-12-30 | 2004-07-22 | The Regents Of The University Of California | Methods and apparatus for pathogen detection and analysis |
US7122153B2 (en) * | 2003-01-08 | 2006-10-17 | Ho Winston Z | Self-contained microfluidic biochip and apparatus |
US7090471B2 (en) * | 2003-01-15 | 2006-08-15 | California Institute Of Technology | Integrated electrostatic peristaltic pump method and apparatus |
US7261945B2 (en) * | 2003-04-28 | 2007-08-28 | The Johns Hopkins University | Impact resistant flexible body device |
US7302962B2 (en) * | 2003-10-15 | 2007-12-04 | Trw Automotive U.S. Llc | Vehicle pressure relief valve having peripherally secured flaps and method of manufacturing the same |
JP4424971B2 (en) * | 2003-11-11 | 2010-03-03 | 株式会社クレハ | Antistatic resin container preparation kit |
WO2005114169A1 (en) | 2004-05-22 | 2005-12-01 | Agilent Technologies, Inc. | Parallel processing microfluid chip |
US8715446B2 (en) * | 2004-10-13 | 2014-05-06 | Rheonix, Inc. | Latent solvent-based microfluidic apparatus, methods, and applications |
US7832429B2 (en) * | 2004-10-13 | 2010-11-16 | Rheonix, Inc. | Microfluidic pump and valve structures and fabrication methods |
JP5329952B2 (en) * | 2005-06-30 | 2013-10-30 | コーニンクレッカ フィリップス エヌ ヴェ | Valve device |
US20100216657A1 (en) * | 2006-05-16 | 2010-08-26 | Arcxis Biotechnologies, Inc. | Pcr-free sample preparation and detection systems for high speed biologic analysis and identification |
US7607641B1 (en) * | 2006-10-05 | 2009-10-27 | Microfluidic Systems, Inc. | Microfluidic valve mechanism |
EP2089410A4 (en) * | 2006-10-11 | 2011-08-03 | Arcxis Biotechnologies Inc | Disposable micropurification cards, methods, and systems thereof |
FR2952628A1 (en) * | 2009-11-13 | 2011-05-20 | Commissariat Energie Atomique | PROCESS FOR MANUFACTURING AT LEAST ONE DEFORMABLE MEMBRANE MICROPUMP AND DEFORMABLE MEMBRANE MICROPUMP |
-
2005
- 2005-10-03 US US11/242,694 patent/US7832429B2/en active Active
-
2006
- 2006-09-26 TW TW095135492A patent/TW200720542A/en unknown
- 2006-10-03 WO PCT/US2006/039135 patent/WO2007064404A2/en active Application Filing
- 2006-10-03 EP EP06816407A patent/EP1940549A2/en not_active Ceased
- 2006-10-03 CN CN2006800370197A patent/CN101282789B/en active Active
- 2006-10-03 EP EP12179245.1A patent/EP2520367B1/en active Active
- 2006-10-03 EP EP20120179250 patent/EP2520368A1/en not_active Ceased
- 2006-10-03 AU AU2006320916A patent/AU2006320916B2/en active Active
- 2006-10-03 JP JP2008534710A patent/JP4939541B2/en active Active
- 2006-10-03 KR KR1020087010786A patent/KR20080059426A/en not_active Application Discontinuation
-
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- 2008-10-09 US US12/248,496 patent/US8535020B2/en active Active
- 2008-10-09 US US12/248,521 patent/US8293053B2/en active Active
-
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- 2010-08-12 US US12/855,058 patent/US8646482B2/en active Active
-
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- 2012-10-29 US US13/662,824 patent/US8763641B2/en active Active
-
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- 2014-05-10 US US14/274,698 patent/US9638338B2/en active Active
-
2017
- 2017-02-10 US US15/429,706 patent/US10119619B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1520621A2 (en) * | 1997-07-21 | 2005-04-06 | Ysi Incorporated | Microfluidic analyzer module |
WO2002068823A1 (en) * | 2000-11-06 | 2002-09-06 | Nanostream Inc. | Uni-directional flow microfluidic components |
US20020166585A1 (en) * | 2000-11-06 | 2002-11-14 | Nanostream, Inc. | Microfluidic regulating device |
US20020155010A1 (en) * | 2001-04-24 | 2002-10-24 | Karp Christoph D. | Microfluidic valve with partially restrained element |
Also Published As
Publication number | Publication date |
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EP1940549A2 (en) | 2008-07-09 |
WO2007064404A2 (en) | 2007-06-07 |
EP2520368A1 (en) | 2012-11-07 |
KR20080059426A (en) | 2008-06-27 |
CN101282789A (en) | 2008-10-08 |
JP2009510337A (en) | 2009-03-12 |
US10119619B2 (en) | 2018-11-06 |
TW200720542A (en) | 2007-06-01 |
US8646482B2 (en) | 2014-02-11 |
US9638338B2 (en) | 2017-05-02 |
US20090056861A1 (en) | 2009-03-05 |
US20170151560A1 (en) | 2017-06-01 |
EP2520367A1 (en) | 2012-11-07 |
US8293053B2 (en) | 2012-10-23 |
US8763641B2 (en) | 2014-07-01 |
US20130105017A1 (en) | 2013-05-02 |
US8535020B2 (en) | 2013-09-17 |
JP4939541B2 (en) | 2012-05-30 |
AU2006320916A1 (en) | 2007-06-07 |
US20110041935A1 (en) | 2011-02-24 |
WO2007064404A8 (en) | 2008-04-24 |
EP2520367B1 (en) | 2017-04-26 |
CN101282789B (en) | 2012-10-03 |
US20140246618A1 (en) | 2014-09-04 |
US7832429B2 (en) | 2010-11-16 |
US20060076068A1 (en) | 2006-04-13 |
US20090056822A1 (en) | 2009-03-05 |
AU2006320916B2 (en) | 2013-07-18 |
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