WO2007103465A3 - Systems and methods for reducing detected intensity non-uniformity in a laser beam - Google Patents

Systems and methods for reducing detected intensity non-uniformity in a laser beam Download PDF

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Publication number
WO2007103465A3
WO2007103465A3 PCT/US2007/005876 US2007005876W WO2007103465A3 WO 2007103465 A3 WO2007103465 A3 WO 2007103465A3 US 2007005876 W US2007005876 W US 2007005876W WO 2007103465 A3 WO2007103465 A3 WO 2007103465A3
Authority
WO
WIPO (PCT)
Prior art keywords
light
detector
uniformity
systems
methods
Prior art date
Application number
PCT/US2007/005876
Other languages
French (fr)
Other versions
WO2007103465A2 (en
Inventor
Aaron Weber
David Tracy
Original Assignee
Helicos Biosciences Corp
Aaron Weber
David Tracy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Helicos Biosciences Corp, Aaron Weber, David Tracy filed Critical Helicos Biosciences Corp
Priority to CA002645299A priority Critical patent/CA2645299A1/en
Priority to JP2008558384A priority patent/JP2009529155A/en
Priority to EP07752567A priority patent/EP1994613A2/en
Publication of WO2007103465A2 publication Critical patent/WO2007103465A2/en
Publication of WO2007103465A3 publication Critical patent/WO2007103465A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0414—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using plane or convex mirrors, parallel phase plates, or plane beam-splitters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0437—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using masks, aperture plates, spatial light modulators, spatial filters, e.g. reflective filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • G01J2001/4261—Scan through beam in order to obtain a cross-sectional profile of the beam

Abstract

A method of increasing the spatial uniformity of the detected intensity of a beam of light from a laser in a system including the laser (34) and a light detector (74). In one embodiment the method includes the steps of generating a beam of light (30) with the laser; and moving the beam of light and the light detector relative to each other, such that the detector averages the spatial intensity of the beam of light over time. In another embodiment the invention relates to a system for increasing the detected spatial uniformity of the intensity of a beam of light. In one embodiment the system comprises a light detector; a laser source for generating the beam of light; and a means (10) for moving the beam of light and the detector relative to one another such that the detector averages the intensity of the light beam over time.
PCT/US2007/005876 2006-03-08 2007-03-07 Systems and methods for reducing detected intensity non-uniformity in a laser beam WO2007103465A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CA002645299A CA2645299A1 (en) 2006-03-08 2007-03-07 Systems and methods for reducing detected intensity non-uniformity in a laser beam
JP2008558384A JP2009529155A (en) 2006-03-08 2007-03-07 System and method for reducing brightness non-uniformity detected in a laser beam
EP07752567A EP1994613A2 (en) 2006-03-08 2007-03-07 Systems and methods for reducing detected intensity non-uniformity in a laser beam

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/370,605 2006-03-08
US11/370,605 US7397546B2 (en) 2006-03-08 2006-03-08 Systems and methods for reducing detected intensity non-uniformity in a laser beam

Publications (2)

Publication Number Publication Date
WO2007103465A2 WO2007103465A2 (en) 2007-09-13
WO2007103465A3 true WO2007103465A3 (en) 2008-01-10

Family

ID=38420669

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/005876 WO2007103465A2 (en) 2006-03-08 2007-03-07 Systems and methods for reducing detected intensity non-uniformity in a laser beam

Country Status (6)

Country Link
US (1) US7397546B2 (en)
EP (1) EP1994613A2 (en)
JP (1) JP2009529155A (en)
CN (1) CN101438471A (en)
CA (1) CA2645299A1 (en)
WO (1) WO2007103465A2 (en)

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JP2013207276A (en) * 2012-03-29 2013-10-07 Mitsubishi Electric Corp Laser module
KR101991405B1 (en) 2012-09-19 2019-06-20 삼성전자주식회사 Beam shaper, a laser annealing system with the same, and method of fabricating a reflective photomask using this system

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EP1994613A2 (en) 2008-11-26
JP2009529155A (en) 2009-08-13
US7397546B2 (en) 2008-07-08
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US20070211467A1 (en) 2007-09-13
CA2645299A1 (en) 2007-09-13
WO2007103465A2 (en) 2007-09-13

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