WO2007121000A3 - Cross-talk and back side shielding in a front side illuminated photo detector diode array - Google Patents

Cross-talk and back side shielding in a front side illuminated photo detector diode array Download PDF

Info

Publication number
WO2007121000A3
WO2007121000A3 PCT/US2007/063407 US2007063407W WO2007121000A3 WO 2007121000 A3 WO2007121000 A3 WO 2007121000A3 US 2007063407 W US2007063407 W US 2007063407W WO 2007121000 A3 WO2007121000 A3 WO 2007121000A3
Authority
WO
WIPO (PCT)
Prior art keywords
photo detector
talk
detector diode
cross
front side
Prior art date
Application number
PCT/US2007/063407
Other languages
French (fr)
Other versions
WO2007121000A2 (en
Inventor
David B Kerwin
Rockford Curby
Original Assignee
Aeroflex Colorado Springs Inc
David B Kerwin
Rockford Curby
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aeroflex Colorado Springs Inc, David B Kerwin, Rockford Curby filed Critical Aeroflex Colorado Springs Inc
Publication of WO2007121000A2 publication Critical patent/WO2007121000A2/en
Publication of WO2007121000A3 publication Critical patent/WO2007121000A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2018—Scintillation-photodiode combinations
    • G01T1/20183—Arrangements for preventing or correcting crosstalk, e.g. optical or electrical arrangements for correcting crosstalk
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2018—Scintillation-photodiode combinations
    • G01T1/20188—Auxiliary details, e.g. casings or cooling
    • G01T1/2019—Shielding against direct hits

Abstract

A front side illuminated photo detector array is shielded from X-ray cross-talk by filling the septa between individual photo detector diodes with a high atomic number material such as tungsten. The processing circuitry is also shielded from stray X-rays by a barrier such as tungsten placed between each photo detector diode and the processing circuitry. This barrier serves a dual role as shielding the processing circuitry from stray X-ray radiation and acting as the electrical contact between the detector diode and the circuitry.
PCT/US2007/063407 2006-03-08 2007-03-06 Cross-talk and back side shielding in a front side illuminated photo detector diode array WO2007121000A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US78031306P 2006-03-08 2006-03-08
US60/780,313 2006-03-08
US11/681,462 US7544947B2 (en) 2006-03-08 2007-03-02 Cross-talk and back side shielding in a front side illuminated photo detector diode array
US11/681,462 2007-03-02

Publications (2)

Publication Number Publication Date
WO2007121000A2 WO2007121000A2 (en) 2007-10-25
WO2007121000A3 true WO2007121000A3 (en) 2008-04-17

Family

ID=38477991

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/063407 WO2007121000A2 (en) 2006-03-08 2007-03-06 Cross-talk and back side shielding in a front side illuminated photo detector diode array

Country Status (2)

Country Link
US (1) US7544947B2 (en)
WO (1) WO2007121000A2 (en)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7928534B2 (en) * 2008-10-09 2011-04-19 Taiwan Semiconductor Manufacturing Company, Ltd. Bond pad connection to redistribution lines having tapered profiles
US8736050B2 (en) * 2009-09-03 2014-05-27 Taiwan Semiconductor Manufacturing Company, Ltd. Front side copper post joint structure for temporary bond in TSV application
US8759949B2 (en) * 2009-04-30 2014-06-24 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer backside structures having copper pillars
US8779366B2 (en) * 2009-05-20 2014-07-15 Koninklijke Philips N.V. Pixelated scintillator array
US8158489B2 (en) * 2009-06-26 2012-04-17 Taiwan Semiconductor Manufacturing Company, Ltd. Formation of TSV backside interconnects by modifying carrier wafers
US8610079B2 (en) * 2009-12-28 2013-12-17 General Electric Company Robust radiation detector and method of forming the same
US20110211667A1 (en) * 2010-02-26 2011-09-01 Abdelaziz Ikhlef De-populated detector for computed tomography and method of making same
US8174124B2 (en) 2010-04-08 2012-05-08 Taiwan Semiconductor Manufacturing Co., Ltd. Dummy pattern in wafer backside routing
US8633444B2 (en) * 2011-06-03 2014-01-21 Kabushiki Kaisha Toshiba Efficient and serviceable light guide for PET detector
US8441104B1 (en) 2011-11-16 2013-05-14 Analog Devices, Inc. Electrical overstress protection using through-silicon-via (TSV)
US9052399B2 (en) 2011-12-30 2015-06-09 Saint-Gobain Ceramics & Plastics, Inc. Scintillator pixel array with reduced cross talk
US8829454B2 (en) 2012-02-27 2014-09-09 Analog Devices, Inc. Compact sensor module
US9116022B2 (en) 2012-12-07 2015-08-25 Analog Devices, Inc. Compact sensor module
US9419046B2 (en) * 2015-01-21 2016-08-16 Terapede Systems Inc. Integrated scintillator grid with photodiodes
US10074624B2 (en) 2015-08-07 2018-09-11 Analog Devices, Inc. Bond pads with differently sized openings
CN107271042A (en) * 2017-04-27 2017-10-20 中国空空导弹研究院 A kind of detector crosstalk measuring device, its preparation method and crosstalk measuring method
US11056455B2 (en) 2017-08-01 2021-07-06 Analog Devices, Inc. Negative fillet for mounting an integrated device die to a carrier
US11688709B2 (en) 2018-12-06 2023-06-27 Analog Devices, Inc. Integrated device packages with passive device assemblies
US11664340B2 (en) 2020-07-13 2023-05-30 Analog Devices, Inc. Negative fillet for mounting an integrated device die to a carrier

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4414473A (en) * 1981-02-23 1983-11-08 General Electric Company Resilient mount for modular detector cell
US4417144A (en) * 1981-02-23 1983-11-22 General Electric Company Modular solid-state detector cell
US4429227A (en) * 1981-12-28 1984-01-31 General Electric Company Solid state detector for CT comprising improvements in collimator plates
US5773829A (en) * 1996-11-05 1998-06-30 Iwanczyk; Jan S. Radiation imaging detector
US5866908A (en) * 1996-02-20 1999-02-02 Saint-Gobain/Norton Industrial Ceramics Corporation Reflector compensation for scintillator array with low temperature expansion
US6667183B2 (en) * 1999-05-14 2003-12-23 Tower Semicondcutor Ltd. Fabricating photodetecting integrated circuits with low cross talk

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3670395A (en) * 1970-09-18 1972-06-20 Tokyo Shibaura Electric Co Method of making a honeycomb block collimator
DE3900245A1 (en) * 1988-01-06 1989-07-20 Hitachi Ltd MULTI-ELEMENT RADIATION DETECTOR
JP2001099941A (en) * 1999-09-30 2001-04-13 Hitachi Metals Ltd Radiation shielding plate, radiation detector, and manufacturing method of radiation shielding plate
US6510195B1 (en) * 2001-07-18 2003-01-21 Koninklijke Philips Electronics, N.V. Solid state x-radiation detector modules and mosaics thereof, and an imaging method and apparatus employing the same
US6934354B2 (en) * 2003-05-02 2005-08-23 General Electric Company Collimator assembly having multi-piece components

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4414473A (en) * 1981-02-23 1983-11-08 General Electric Company Resilient mount for modular detector cell
US4417144A (en) * 1981-02-23 1983-11-22 General Electric Company Modular solid-state detector cell
US4429227A (en) * 1981-12-28 1984-01-31 General Electric Company Solid state detector for CT comprising improvements in collimator plates
US5866908A (en) * 1996-02-20 1999-02-02 Saint-Gobain/Norton Industrial Ceramics Corporation Reflector compensation for scintillator array with low temperature expansion
US5773829A (en) * 1996-11-05 1998-06-30 Iwanczyk; Jan S. Radiation imaging detector
US6667183B2 (en) * 1999-05-14 2003-12-23 Tower Semicondcutor Ltd. Fabricating photodetecting integrated circuits with low cross talk

Also Published As

Publication number Publication date
WO2007121000A2 (en) 2007-10-25
US20070210259A1 (en) 2007-09-13
US7544947B2 (en) 2009-06-09

Similar Documents

Publication Publication Date Title
WO2007121000A3 (en) Cross-talk and back side shielding in a front side illuminated photo detector diode array
US10459094B2 (en) Detector array for imaging modality
JP6854805B2 (en) Hybrid PET / CT imaging detector
US7388208B2 (en) Dual energy x-ray detector
US11275187B2 (en) Detector array for a radiation system, and related system
KR101716911B1 (en) Silicon detector assembly for X-ray imaging
JP5697982B2 (en) Radiation detector, X-ray detector and image forming system having a plurality of conversion layers
WO2004072679A3 (en) Single photon emission computed tomography system
WO2006137831A3 (en) Radiation shielding device
CN101563628A (en) Energy-resolving detection system and imaging system
RU2009123014A (en) RADIATION DETECTOR WITH MULTIPLE ELECTRODES ON A SENSITIVE LAYER
WO2011037945A3 (en) Organic-scintillator compton gamma ray telescope
EP2255224A2 (en) Scanning systems
JP2008311651A (en) Structure of semiconductor photomultiplier
WO2006107727A3 (en) Edge-on sar scintillator devices and systems for enhanced spect, pet, and compton gamma cameras
WO2008107808A3 (en) Improved light detection in a pixelated pet detector
WO2012021519A3 (en) Methods and compositions for the detection of x-ray and gamma-ray radiation
EP1923723A3 (en) Cassette type radiation image detector
US20090084960A1 (en) High Detective Quantum Efficiency X-ray Detectors
CN107850678A (en) Detector cells for the detector array of radiant image mode device
US20160206255A1 (en) Hybrid passive/active multi-layer energy discriminating photon-counting detector
US10310106B2 (en) Dual/multiple-energy x-ray sensor with separation between pixels and active circuitry
US10761219B2 (en) Detector array for radiation imaging modality
CN106922177A (en) Indirect conversion detector array
US9724057B2 (en) Magnetic field actuation of detectors in a computed tomography scanner

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 07779163

Country of ref document: EP

Kind code of ref document: A2

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 07779163

Country of ref document: EP

Kind code of ref document: A2