WO2007130083A3 - Top metal layer shield for ultra-small resonant structures - Google Patents

Top metal layer shield for ultra-small resonant structures Download PDF

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Publication number
WO2007130083A3
WO2007130083A3 PCT/US2006/022687 US2006022687W WO2007130083A3 WO 2007130083 A3 WO2007130083 A3 WO 2007130083A3 US 2006022687 W US2006022687 W US 2006022687W WO 2007130083 A3 WO2007130083 A3 WO 2007130083A3
Authority
WO
WIPO (PCT)
Prior art keywords
ultra
metal layer
resonant structures
top metal
layer shield
Prior art date
Application number
PCT/US2006/022687
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French (fr)
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WO2007130083A2 (en
Inventor
Jonathan Gorrell
Original Assignee
Virgin Island Microsystems Inc
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Publication date
Application filed by Virgin Island Microsystems Inc filed Critical Virgin Island Microsystems Inc
Publication of WO2007130083A2 publication Critical patent/WO2007130083A2/en
Publication of WO2007130083A3 publication Critical patent/WO2007130083A3/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J25/00—Transit-time tubes, e.g. klystrons, travelling-wave tubes, magnetrons

Abstract

When using micro-resonant structures which are being excited and caused to resonate by use of a charged particle beam, whether as emitters or receivers, especially in a chip or circuit board environment, it is important to prevent the charged particle beam from coupling to or affecting other structures or layers in the chip or circuit board. Shielding can be provided along the path of the charged particle beam, on top of the substrate, to prevent such coupling.
PCT/US2006/022687 2006-05-05 2006-06-09 Top metal layer shield for ultra-small resonant structures WO2007130083A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/418,097 US7723698B2 (en) 2006-05-05 2006-05-05 Top metal layer shield for ultra-small resonant structures
US11/418,097 2006-05-05

Publications (2)

Publication Number Publication Date
WO2007130083A2 WO2007130083A2 (en) 2007-11-15
WO2007130083A3 true WO2007130083A3 (en) 2008-01-03

Family

ID=38660670

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/022687 WO2007130083A2 (en) 2006-05-05 2006-06-09 Top metal layer shield for ultra-small resonant structures

Country Status (3)

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US (1) US7723698B2 (en)
TW (1) TW200743279A (en)
WO (1) WO2007130083A2 (en)

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