WO2007136420A3 - Apparatus for fabricating large-surface area polycrystalline silicon sheets for solar cell application - Google Patents

Apparatus for fabricating large-surface area polycrystalline silicon sheets for solar cell application Download PDF

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Publication number
WO2007136420A3
WO2007136420A3 PCT/US2006/062471 US2006062471W WO2007136420A3 WO 2007136420 A3 WO2007136420 A3 WO 2007136420A3 US 2006062471 W US2006062471 W US 2006062471W WO 2007136420 A3 WO2007136420 A3 WO 2007136420A3
Authority
WO
WIPO (PCT)
Prior art keywords
solar cell
surface area
polycrystalline silicon
cell application
silicon sheets
Prior art date
Application number
PCT/US2006/062471
Other languages
French (fr)
Other versions
WO2007136420A2 (en
Inventor
Arnold V Kholodenko
Robert Z Bachrach
Mark Mandelboym
Original Assignee
Applied Materials Inc
Arnold V Kholodenko
Robert Z Bachrach
Mark Mandelboym
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc, Arnold V Kholodenko, Robert Z Bachrach, Mark Mandelboym filed Critical Applied Materials Inc
Publication of WO2007136420A2 publication Critical patent/WO2007136420A2/en
Publication of WO2007136420A3 publication Critical patent/WO2007136420A3/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic System
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1036—Seed pulling including solid member shaping means other than seed or product [e.g., EDFG die]
    • Y10T117/1044—Seed pulling including solid member shaping means other than seed or product [e.g., EDFG die] including means forming a flat shape [e.g., ribbon]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1068—Seed pulling including heating or cooling details [e.g., shield configuration]

Abstract

A method and apparatus for forming a semiconductor sheet suitable for use as a solar cell by depositing an array of solidified drops of a feed material on a sheet support. The desired properties of the sheet fabricated with the teaching of this invention are: flatness, low residual stress, minority carrier diffusion length greater than 40 microns, and minimum grain dimension at least two times the minority carrier diffusion length. In one embodiment, the deposition chamber is adapted to form and process sheets that have a surface area of about 1,000-2,400 cm2.
PCT/US2006/062471 2006-01-03 2006-12-21 Apparatus for fabricating large-surface area polycrystalline silicon sheets for solar cell application WO2007136420A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/325,089 US7572334B2 (en) 2006-01-03 2006-01-03 Apparatus for fabricating large-surface area polycrystalline silicon sheets for solar cell application
US11/325,089 2006-01-03

Publications (2)

Publication Number Publication Date
WO2007136420A2 WO2007136420A2 (en) 2007-11-29
WO2007136420A3 true WO2007136420A3 (en) 2008-07-24

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/062471 WO2007136420A2 (en) 2006-01-03 2006-12-21 Apparatus for fabricating large-surface area polycrystalline silicon sheets for solar cell application

Country Status (2)

Country Link
US (1) US7572334B2 (en)
WO (1) WO2007136420A2 (en)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7572334B2 (en) * 2006-01-03 2009-08-11 Applied Materials, Inc. Apparatus for fabricating large-surface area polycrystalline silicon sheets for solar cell application
WO2007106502A2 (en) * 2006-03-13 2007-09-20 Nanogram Corporation Thin silicon or germanium sheets and photovoltaics formed from thin sheets
US7496423B2 (en) * 2007-05-11 2009-02-24 Applied Materials, Inc. Method of achieving high productivity fault tolerant photovoltaic factory with batch array transfer robots
US20080292433A1 (en) * 2007-05-11 2008-11-27 Bachrach Robert Z Batch equipment robots and methods of array to array work-piece transfer for photovoltaic factory
US20080279672A1 (en) * 2007-05-11 2008-11-13 Bachrach Robert Z Batch equipment robots and methods of stack to array work-piece transfer for photovoltaic factory
US20080279658A1 (en) * 2007-05-11 2008-11-13 Bachrach Robert Z Batch equipment robots and methods within equipment work-piece transfer for photovoltaic factory
MY150483A (en) * 2007-07-27 2014-01-30 Max Era Inc Wafer/ribbon crystal and method for its manufacture
US20090191031A1 (en) * 2008-01-28 2009-07-30 Willard & Kelsey Solar Group, Llc System and method for cooling semiconductor coated hot glass sheets
US20090208770A1 (en) * 2008-02-14 2009-08-20 Ralf Jonczyk Semiconductor sheets and methods for fabricating the same
US20090280336A1 (en) * 2008-05-08 2009-11-12 Ralf Jonczyk Semiconductor sheets and methods of fabricating the same
IT1392990B1 (en) * 2009-02-23 2012-04-02 Applied Materials Inc SUBSTRATE INVERSION SYSTEM
US7888158B1 (en) 2009-07-21 2011-02-15 Sears Jr James B System and method for making a photovoltaic unit
DE102009053532B4 (en) * 2009-11-18 2017-01-05 Centrotherm Photovoltaics Ag Method and apparatus for producing a compound semiconductor layer
US20110195187A1 (en) * 2010-02-10 2011-08-11 Apple Inc. Direct liquid vaporization for oleophobic coatings
TWI423464B (en) * 2010-07-26 2014-01-11 Sunshine Pv Corp Annealing device for a thin-film solar cell and annealing method for the same
US8715779B2 (en) 2011-06-24 2014-05-06 Apple Inc. Enhanced glass impact durability through application of thin films
TW201327712A (en) * 2011-11-01 2013-07-01 Intevac Inc System architecture for plasma processing solar wafers
TWI481057B (en) * 2012-05-24 2015-04-11 Sunshine Pv Corp Annealing device for a thin-film solar cell
CN102747420B (en) * 2012-07-31 2014-12-31 常州天合光能有限公司 Heat exchange table for polycrystalline ingot furnace and ventilation pipe diameter variation method of heat exchange table
US9957636B2 (en) * 2014-03-27 2018-05-01 Varian Semiconductor Equipment Associates, Inc. System and method for crystalline sheet growth using a cold block and gas jet
KR101598463B1 (en) * 2014-04-30 2016-03-02 세메스 주식회사 Apparatus and Method for treating substrate

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5106763A (en) * 1988-11-15 1992-04-21 Mobil Solar Energy Corporation Method of fabricating solar cells
US6284312B1 (en) * 1999-02-19 2001-09-04 Gt Equipment Technologies Inc Method and apparatus for chemical vapor deposition of polysilicon
US6365225B1 (en) * 1999-02-19 2002-04-02 G.T. Equipment Technologies, Inc. Cold wall reactor and method for chemical vapor deposition of bulk polysilicon
US6368403B1 (en) * 1997-08-28 2002-04-09 Crystal Systems, Inc. Method and apparatus for purifying silicon
US6413313B1 (en) * 1999-09-14 2002-07-02 Sharp Kabushiki Kaisha Apparatus for producing polycrystalline silicon sheets and production method using the same
US20070158654A1 (en) * 2006-01-03 2007-07-12 Kholodenko Arnold V Apparatus for fabricating large-surface area polycrystalline silicon sheets for solar cell application

Family Cites Families (126)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2841860A (en) * 1952-08-08 1958-07-08 Sylvania Electric Prod Semiconductor devices and methods
US2900708A (en) * 1956-02-16 1959-08-25 Marvalaud Inc Apparatus for producing alloy and bimetallic filaments
US3898051A (en) 1973-12-28 1975-08-05 Crystal Syst Crystal growing
US4003770A (en) 1975-03-24 1977-01-18 Monsanto Research Corporation Plasma spraying process for preparing polycrystalline solar cells
CA1081558A (en) 1975-10-24 1980-07-15 Joseph D. Heaps Method for dip-coating ceramic with molten silicon
JPS5261180A (en) * 1975-11-14 1977-05-20 Toyo Shirikon Kk Horizontal growth of crystal ribbons
US4036666A (en) * 1975-12-05 1977-07-19 Mobil Tyco Solar Energy Corporation Manufacture of semiconductor ribbon
US4056404A (en) * 1976-03-29 1977-11-01 Mobil Tyco Solar Energy Corporation Flat tubular solar cells and method of producing same
US4121965A (en) 1976-07-16 1978-10-24 The United States Of America As Represented By The Administrator Of The National Aeronautics & Space Administration Method of controlling defect orientation in silicon crystal ribbon growth
US4137355A (en) 1976-12-09 1979-01-30 Honeywell Inc. Ceramic coated with molten silicon
US4187828A (en) 1977-02-11 1980-02-12 Crystal Systems, Inc. Cutting
US4092972A (en) 1977-02-11 1978-06-06 Crystal Systems, Inc. Process of cutting wafers
DK142586B (en) 1977-07-07 1980-11-24 Topsil As Apparatus for zone melting of a semiconductor rod.
US4287869A (en) 1978-03-13 1981-09-08 Crystal Systems Inc. Charging system for cutting blade
US4178670A (en) 1978-06-22 1979-12-18 Crystal Systems, Inc. Process of forming a wire pack
US4218418A (en) 1978-06-22 1980-08-19 Crystal Systems, Inc. Processes of casting an ingot and making a silica container
US4256079A (en) 1978-06-22 1981-03-17 Crystal Systems Inc. Wire blades
US4163678A (en) 1978-06-30 1979-08-07 Nasa Solar cell with improved N-region contact and method of forming the same
US4229231A (en) * 1978-10-13 1980-10-21 Massachusetts Institute Of Technology Method of forming a laminated ribbon structure
US4256530A (en) 1978-12-07 1981-03-17 Crystal Systems Inc. Crystal growing
JPS5580798A (en) * 1978-12-09 1980-06-18 Agency Of Ind Science & Technol Ribbon crystal growing method by lateral pulling
US4211496A (en) 1979-01-29 1980-07-08 Small Business Administration Printing solenoid
US4292344A (en) 1979-02-23 1981-09-29 Union Carbide Corporation Fluidized bed heating process and apparatus
US4285386A (en) * 1979-03-16 1981-08-25 Allied Chemical Corporation Continuous casting method and apparatus for making defined shapes of thin sheet
DE2914506A1 (en) * 1979-04-10 1980-10-16 Siemens Ag METHOD FOR PRODUCING LARGE-SCALE, PLATE-SHAPED SILICON CRYSTALS WITH A COLUMNAR STRUCTURE
US4349178A (en) 1979-04-23 1982-09-14 Crystal Systems Inc. Wire blades
US4235644A (en) 1979-08-31 1980-11-25 E. I. Du Pont De Nemours And Company Thick film silver metallizations for silicon solar cells
US4252861A (en) 1979-09-28 1981-02-24 Honeywell Inc. Growth technique for silicon-on-ceramic
US4251570A (en) 1979-11-19 1981-02-17 Honeywell Inc. Cold substrate growth technique for silicon-on-ceramic
US4661200A (en) 1980-01-07 1987-04-28 Sachs Emanuel M String stabilized ribbon growth
DE3019635A1 (en) 1980-05-22 1981-11-26 SIEMENS AG AAAAA, 1000 Berlin und 8000 München IMPROVEMENT OF A METHOD FOR PRODUCING PANEL, RIBBON OR FILM-SHAPED SILICON CRYSTAL BODIES FOR SOLAR CELLS
DE3035563C2 (en) 1980-09-20 1984-10-11 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Method for producing a polycrystalline silicon solar cell
CA1147698A (en) 1980-10-15 1983-06-07 Maher I. Boulos Purification of metallurgical grade silicon
US4347262A (en) 1980-11-26 1982-08-31 E. I. Du Pont De Nemours And Company Aluminum-magnesium alloys in low resistance contacts to silicon
US4375007A (en) 1980-11-26 1983-02-22 E. I. Du Pont De Nemours & Co. Silicon solar cells with aluminum-magnesium alloy low resistance contacts
US4689109A (en) 1980-12-11 1987-08-25 Sachs Emanuel M String stabilized ribbon growth a method for seeding same
US4627887A (en) 1980-12-11 1986-12-09 Sachs Emanuel M Melt dumping in string stabilized ribbon growth
US4384564A (en) 1981-01-22 1983-05-24 Crystal Systems Inc. Process of forming a plated wirepack with abrasive particles only in the cutting surface with a controlled kerf
JPS57132372A (en) * 1981-02-09 1982-08-16 Univ Tohoku Manufacture of p-n junction type thin silicon band
US4594229A (en) 1981-02-25 1986-06-10 Emanuel M. Sachs Apparatus for melt growth of crystalline semiconductor sheets
US4383130A (en) 1981-05-04 1983-05-10 Alpha Solarco Inc. Solar energy cell and method of manufacture
DE3132776A1 (en) 1981-08-19 1983-03-03 Heliotronic Gmbh METHOD FOR PRODUCING COARSE TO SINGLE CRYSTAL FILMS FROM SEMICONDUCTOR MATERIAL
US4408653A (en) * 1981-11-09 1983-10-11 Allied Corporation Method for making serrated metal ribbon
JPS5939711A (en) * 1982-08-26 1984-03-05 Ushio Inc Method for epitaxially growing amorphous silicon or polycrystalline silicon on wafer
US4646710A (en) 1982-09-22 1987-03-03 Crystal Systems, Inc. Multi-wafer slicing with a fixed abrasive
DE3240245A1 (en) 1982-10-29 1984-05-03 Siemens AG, 1000 Berlin und 8000 München DEVICE FOR PRODUCING TAPE-SHAPED SILICON BODIES FOR SOLAR CELLS
US4684513A (en) 1982-11-05 1987-08-04 Union Carbide Corporation Zone heating for fluidized bed silane pyrolysis
DE3311891A1 (en) 1983-03-31 1984-10-04 Bayer Ag, 5090 Leverkusen BAND-SHAPED FILMS OF METALS, METHOD AND DEVICE FOR THE PRODUCTION THEREOF AND THEIR USE
US4727852A (en) 1983-05-05 1988-03-01 Crystal Systems Inc. Multi-wafer slicing with a fixed abrasive
US4578144A (en) 1983-08-25 1986-03-25 Ushio Denki Kabushiki Kaisha Method for forming a single crystal silicon layer
US4602422A (en) 1984-06-18 1986-07-29 Khanh Dinh Flash compression process for making photovoltaic cells
US4643797A (en) 1984-08-28 1987-02-17 Siemens Aktiengesellschaft Method for the manufacture of large area silicon crystal bodies for solar cells
GB2167148B (en) 1984-11-15 1988-02-03 Psm Fasteners Ltd Inserts
US4599132A (en) 1985-01-18 1986-07-08 Energy Materials Corporation Guidance system for low angle silicon ribbon growth
US4619845A (en) 1985-02-22 1986-10-28 The United States Of America As Represented By The Secretary Of The Navy Method for generating fine sprays of molten metal for spray coating and powder making
US4861416A (en) 1985-04-04 1989-08-29 The United States Of America As Represented By The Administrator, National Aeronautics And Space Administration Ribbon growing method and apparatus
US4638110A (en) 1985-06-13 1987-01-20 Illuminated Data, Inc. Methods and apparatus relating to photovoltaic semiconductor devices
DE3536743C2 (en) 1985-10-15 1994-11-10 Siemens Ag Process for the production of large-area silicon crystal bodies for solar cells
US4677250A (en) 1985-10-30 1987-06-30 Astrosystems, Inc. Fault tolerant thin-film photovoltaic cell
US4772564A (en) 1985-10-30 1988-09-20 Astrosystems, Inc. Fault tolerant thin-film photovoltaic cell fabrication process
US4781766A (en) 1985-10-30 1988-11-01 Astrosystems, Inc. Fault tolerant thin-film photovoltaic cell and method
US4775443A (en) 1986-02-06 1988-10-04 Bleil Carl E Method and apparatus for zone regrowth of crystal ribbons from bulk material
US4873063A (en) 1986-01-06 1989-10-10 Bleil Carl E Apparatus for zone regrowth of crystal ribbons
US4749438A (en) 1986-01-06 1988-06-07 Bleil Carl E Method and apparatus for zone recrystallization
US5057163A (en) 1988-05-04 1991-10-15 Astropower, Inc. Deposited-silicon film solar cell
US5229083A (en) * 1990-02-05 1993-07-20 Bleil Carl E Method and apparatus for crystal ribbon growth
US5069742A (en) 1990-02-05 1991-12-03 Bleil Carl E Method and apparatus for crystal ribbon growth
US5055157A (en) 1990-02-05 1991-10-08 Bleil Carl E Method of crystal ribbon growth
US5454913A (en) 1990-02-06 1995-10-03 Koch Engineering Company, Inc. Internals for distillation columns including those for use in catalytic reactions
US5064497A (en) 1990-03-09 1991-11-12 At&T Bell Laboratories Crystal growth method and apparatus
JP3205352B2 (en) 1990-05-30 2001-09-04 川崎製鉄株式会社 Silicon purification method and apparatus
US5133829A (en) 1991-01-08 1992-07-28 Sematech, Inc. Single wafer regrowth of silicon
DE4102484A1 (en) 1991-01-29 1992-07-30 Bayer Ag METHOD FOR THE PRODUCTION OF METAL DISC AND THE USE OF SILICONE DISC
US5394825A (en) 1992-02-28 1995-03-07 Crystal Systems, Inc. Method and apparatus for growing shaped crystals
US5266125A (en) 1992-05-12 1993-11-30 Astropower, Inc. Interconnected silicon film solar cell array
US5428249A (en) 1992-07-15 1995-06-27 Canon Kabushiki Kaisha Photovoltaic device with improved collector electrode
USRE36156E (en) 1992-10-09 1999-03-23 Astropower, Inc. Columnar-grained polycrystalline solar cell and process of manufacture
US5336335A (en) 1992-10-09 1994-08-09 Astropower, Inc. Columnar-grained polycrystalline solar cell and process of manufacture
US5356509A (en) 1992-10-16 1994-10-18 Astropower, Inc. Hetero-epitaxial growth of non-lattice matched semiconductors
US5520371A (en) 1992-12-30 1996-05-28 General Electric Company Apparatus and method for viewing an industrial process such as a molten metal atomization process
US5431869A (en) 1993-01-12 1995-07-11 Council Of Scientific & Industrial Research Process for the preparation of polycrystalline silicon ingot
US5438973A (en) 1993-10-08 1995-08-08 Crystal Systems, Inc. Shaped blades
JP3050064B2 (en) 1994-11-24 2000-06-05 株式会社村田製作所 CONDUCTIVE PASTE, SOLAR CELL WITH GRID ELECTRODE FORMED FROM THE CONDUCTIVE PASTE AND METHOD FOR MANUFACTURING SAME
US5556791A (en) 1995-01-03 1996-09-17 Texas Instruments Incorporated Method of making optically fused semiconductor powder for solar cells
US5620904A (en) 1996-03-15 1997-04-15 Evergreen Solar, Inc. Methods for forming wraparound electrical contacts on solar cells
US5659133A (en) 1996-04-22 1997-08-19 Astropower, Inc. High-temperature optical combustion chamber sensor
US5741370A (en) 1996-06-27 1998-04-21 Evergreen Solar, Inc. Solar cell modules with improved backskin and methods for forming same
US5762720A (en) 1996-06-27 1998-06-09 Evergreen Solar, Inc. Solar cell modules with integral mounting structure and methods for forming same
US5986203A (en) 1996-06-27 1999-11-16 Evergreen Solar, Inc. Solar cell roof tile and method of forming same
US5828088A (en) 1996-09-05 1998-10-27 Astropower, Inc. Semiconductor device structures incorporating "buried" mirrors and/or "buried" metal electrodes
US5955776A (en) * 1996-12-04 1999-09-21 Ball Semiconductor, Inc. Spherical shaped semiconductor integrated circuit
JP2001510434A (en) 1997-02-06 2001-07-31 バイエル・アクチエンゲゼルシヤフト Melt pot with silicon protective layer, method of applying silicon protective layer and use thereof
AU739048B2 (en) 1997-03-04 2001-10-04 Astropower Inc. Columnar-grained polycrystalline solar cell substrate and improved method of manufacture
US6019841A (en) 1997-03-24 2000-02-01 G.T. Equuipment Technologies Inc. Method and apparatus for synthesis and growth of semiconductor crystals
US6278053B1 (en) 1997-03-25 2001-08-21 Evergreen Solar, Inc. Decals and methods for providing an antireflective coating and metallization on a solar cell
US6113473A (en) 1997-04-25 2000-09-05 G.T. Equipment Technologies Inc. Method and apparatus for improved wire saw slurry
US5973259A (en) 1997-05-12 1999-10-26 Borealis Tech Ltd Method and apparatus for photoelectric generation of electricity
US6114046A (en) 1997-07-24 2000-09-05 Evergreen Solar, Inc. Encapsulant material for solar cell module and laminated glass applications
US6353042B1 (en) * 1997-07-24 2002-03-05 Evergreen Solar, Inc. UV-light stabilization additive package for solar cell module and laminated glass applications
US6187448B1 (en) 1997-07-24 2001-02-13 Evergreen Solar, Inc. Encapsulant material for solar cell module and laminated glass applications
US6258166B1 (en) * 1997-08-20 2001-07-10 Alcoa Inc. Linear nozzle with tailored gas plumes
US6514342B2 (en) * 1997-08-20 2003-02-04 Alcoa Inc. Linear nozzle with tailored gas plumes
US5968601A (en) 1997-08-20 1999-10-19 Aluminum Company Of America Linear nozzle with tailored gas plumes and method
US5972107A (en) 1997-08-28 1999-10-26 Crystal Systems, Inc. Method for purifying silicon
US5800611A (en) 1997-09-08 1998-09-01 Christensen; Howard Method for making large area single crystal silicon sheets
US6320116B1 (en) * 1997-09-26 2001-11-20 Evergreen Solar, Inc. Methods for improving polymeric materials for use in solar cell applications
US6067728A (en) 1998-02-13 2000-05-30 G.T. Equipment Technologies, Inc. Supercritical phase wafer drying/cleaning system
US6206176B1 (en) * 1998-05-20 2001-03-27 Applied Komatsu Technology, Inc. Substrate transfer shuttle having a magnetic drive
US6211455B1 (en) 1998-07-02 2001-04-03 Astropower Silicon thin-film, integrated solar cell, module, and methods of manufacturing the same
US6200383B1 (en) 1999-05-03 2001-03-13 Evergreen Solar, Inc. Melt depth control for semiconductor materials grown from a melt
US6090199A (en) 1999-05-03 2000-07-18 Evergreen Solar, Inc. Continuous melt replenishment for crystal growth
JP3577430B2 (en) * 1999-06-09 2004-10-13 シャープ株式会社 Solar cell and method of manufacturing the same
US6214733B1 (en) 1999-11-17 2001-04-10 Elo Technologies, Inc. Process for lift off and handling of thin film materials
JP4111669B2 (en) * 1999-11-30 2008-07-02 シャープ株式会社 Sheet manufacturing method, sheet and solar cell
JP4121697B2 (en) * 1999-12-27 2008-07-23 シャープ株式会社 Crystal sheet manufacturing method and manufacturing apparatus thereof
US6414237B1 (en) * 2000-07-14 2002-07-02 Astropower, Inc. Solar collectors, articles for mounting solar modules, and methods of mounting solar modules
AU2001285142A1 (en) * 2000-08-21 2002-03-04 Astropower Inc. Method and apparatus for purifying silicon
JP4783500B2 (en) * 2000-12-25 2011-09-28 株式会社カネカ Pre-sealing preparation sheet setting device, pre-sealing preparation output line set device, and automatic pre-sealing preparation device
US6418921B1 (en) * 2001-01-24 2002-07-16 Crystal Systems, Inc. Method and apparatus for cutting workpieces
WO2002060620A1 (en) * 2001-01-31 2002-08-08 G.T. Equipment Technologies Inc. Method of producing shaped bodies of semiconductor materials
US6562132B2 (en) * 2001-04-04 2003-05-13 Ase Americas, Inc. EFG crystal growth apparatus and method
AU2002359239A1 (en) * 2001-07-27 2003-05-06 Astropower, Inc. Method and apparatus for applying conductive ink onto semiconductor substrates
WO2003017724A2 (en) * 2001-08-09 2003-02-27 Astropower, Inc. Power and/or energy monitor, method of using, and display device
DE10297633T5 (en) * 2002-01-04 2005-05-19 Gt Equipment Technologies Inc. Solarzellenaufreihungsmaschine
US20040003837A1 (en) * 2002-04-24 2004-01-08 Astropower, Inc. Photovoltaic-photoelectrochemical device and processes
US20040000334A1 (en) * 2002-06-27 2004-01-01 Astropower, Inc. Photovoltaic tiles, roofing system, and method of constructing roof

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5106763A (en) * 1988-11-15 1992-04-21 Mobil Solar Energy Corporation Method of fabricating solar cells
US6368403B1 (en) * 1997-08-28 2002-04-09 Crystal Systems, Inc. Method and apparatus for purifying silicon
US6284312B1 (en) * 1999-02-19 2001-09-04 Gt Equipment Technologies Inc Method and apparatus for chemical vapor deposition of polysilicon
US6365225B1 (en) * 1999-02-19 2002-04-02 G.T. Equipment Technologies, Inc. Cold wall reactor and method for chemical vapor deposition of bulk polysilicon
US6413313B1 (en) * 1999-09-14 2002-07-02 Sharp Kabushiki Kaisha Apparatus for producing polycrystalline silicon sheets and production method using the same
US20070158654A1 (en) * 2006-01-03 2007-07-12 Kholodenko Arnold V Apparatus for fabricating large-surface area polycrystalline silicon sheets for solar cell application

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