WO2007136779A3 - Aligned embossed diaphgragm based fiber optic sensor - Google Patents
Aligned embossed diaphgragm based fiber optic sensor Download PDFInfo
- Publication number
- WO2007136779A3 WO2007136779A3 PCT/US2007/011955 US2007011955W WO2007136779A3 WO 2007136779 A3 WO2007136779 A3 WO 2007136779A3 US 2007011955 W US2007011955 W US 2007011955W WO 2007136779 A3 WO2007136779 A3 WO 2007136779A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- diaphragm
- dfos
- sensor
- fiber optic
- fiber
- Prior art date
Links
- 239000000835 fiber Substances 0.000 title abstract 4
- 239000007788 liquid Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
- G01H9/004—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
- G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
- G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
- G01J2009/0226—Fibres
- G01J2009/023—Fibres of the integrated optical type
Abstract
The present invention is a diaphragm-fiber optic sensor (DFOS), interferometric sensor. This DFOS is based on the principles of Fabry-Perot and Michelson/Mach-Zehnder. The sensor is low cost and is designed with high efficiency, reliability, and Q-point stability, fabricated using MEMS (micro mechanic- electrical system) technology, and has demonstrated excellent performance. A DFOS according to the invention includes a cavity between two surfaces: a diaphragm made of silicon or other material with a rigid body (or boss) at the center and clamped along its edge, and the endface of a single mode optic fiber. By utilizing MEMS technology, the gap width between the diaphragm and the fiber endface is made accurately, ranging from 1 micron to 10 microns. To stabilize the Q-point of the DFOS when in use as an acoustic sensor, a system of microchannels is built in the structure of the diaphragm so that the pressure difference on two sides of the diaphragm is kept a constant, independent of the hydraulic pressure and/or low frequency noise when the device is inserted in liquid mediums.
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US80191006P | 2006-05-19 | 2006-05-19 | |
US80194306P | 2006-05-19 | 2006-05-19 | |
US60/801,943 | 2006-05-19 | ||
US60/801,910 | 2006-05-19 | ||
US11/750,569 | 2007-05-18 | ||
US11/750,569 US20080075404A1 (en) | 2006-05-19 | 2007-05-18 | Aligned embossed diaphragm based fiber optic sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2007136779A2 WO2007136779A2 (en) | 2007-11-29 |
WO2007136779A3 true WO2007136779A3 (en) | 2008-05-02 |
Family
ID=38723867
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2007/011955 WO2007136779A2 (en) | 2006-05-19 | 2007-05-18 | Aligned embossed diaphgragm based fiber optic sensor |
Country Status (2)
Country | Link |
---|---|
US (2) | US20080075404A1 (en) |
WO (1) | WO2007136779A2 (en) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1674833A3 (en) * | 2004-12-21 | 2007-05-30 | Davidson Instruments, Inc. | Fiber optic sensor system |
WO2007109336A2 (en) * | 2006-03-22 | 2007-09-27 | Davidson Instruments, Inc. | Apparatus for continuous readout of fabry-perot fiber optic sensor |
US7684051B2 (en) * | 2006-04-18 | 2010-03-23 | Halliburton Energy Services, Inc. | Fiber optic seismic sensor based on MEMS cantilever |
EP2021747B1 (en) * | 2006-04-26 | 2018-08-01 | Halliburton Energy Services, Inc. | Fiber optic mems seismic sensor with mass supported by hinged beams |
US8115937B2 (en) | 2006-08-16 | 2012-02-14 | Davidson Instruments | Methods and apparatus for measuring multiple Fabry-Perot gaps |
DE102006056592A1 (en) * | 2006-11-29 | 2008-06-05 | Endress + Hauser Gmbh + Co. Kg | Process for embossing a separating membrane of a diaphragm seal |
US7787128B2 (en) * | 2007-01-24 | 2010-08-31 | Halliburton Energy Services, Inc. | Transducer for measuring environmental parameters |
US8098904B2 (en) * | 2008-03-31 | 2012-01-17 | Google Inc. | Automatic face detection and identity masking in images, and applications thereof |
US8269974B2 (en) | 2008-06-23 | 2012-09-18 | University Of South Florida | Interferometric chemical sensor array |
US8054594B2 (en) * | 2009-06-18 | 2011-11-08 | General Electric Company | ARC flash detection system |
US8040517B1 (en) * | 2010-04-30 | 2011-10-18 | General Electric Company | Arc flash detection system and method |
EP2695175B1 (en) | 2011-04-04 | 2019-07-17 | Weidmann Electrical Technology, Inc. | Clamping force sensor assembly for monitoring transformer degradation |
DE102011077499A1 (en) | 2011-06-14 | 2012-12-20 | CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH | Interferometric pressure measuring cell |
US20120321322A1 (en) * | 2011-06-16 | 2012-12-20 | Honeywell International Inc. | Optical microphone |
US8594507B2 (en) * | 2011-06-16 | 2013-11-26 | Honeywell International Inc. | Method and apparatus for measuring gas concentrations |
GB2509105B (en) * | 2012-12-20 | 2017-02-22 | Oxsensis Ltd | Mechanical resonator sensor |
WO2014176522A1 (en) | 2013-04-26 | 2014-10-30 | Wicor Holding Ag | Fiber-grating sensors having longitudinal-strain-inducing jackets and sensor systems and structures including such sensors |
US10053269B2 (en) * | 2015-02-09 | 2018-08-21 | The Boeing Company | Multi-functional fiber optic fuel sensor system having a photonic membrane |
NO343314B1 (en) * | 2015-11-29 | 2019-01-28 | Tunable As | Optical pressure sensor |
CN112119201B (en) * | 2018-05-24 | 2024-02-27 | 贝克休斯控股有限责任公司 | Transducer comprising a laser etched substrate |
US20230024104A1 (en) * | 2021-07-23 | 2023-01-26 | Nec Laboratories America, Inc | Identification of false transformer humming using machine learning |
CN113589114A (en) * | 2021-07-29 | 2021-11-02 | 重庆大学 | Power equipment partial discharge sensing device and machining method and detection system thereof |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5311485A (en) * | 1992-10-30 | 1994-05-10 | The United States Of America As Represented By The United States Department Of Energy | Fiber optic hydrophone |
US6631638B2 (en) * | 2001-01-30 | 2003-10-14 | Rosemount Aerospace Inc. | Fluid flow sensor |
US20040119981A1 (en) * | 2002-09-26 | 2004-06-24 | Russell May | Active Q-point stabilization for linear interferometric sensors |
US20050134837A1 (en) * | 2003-12-23 | 2005-06-23 | Sarkozi Janos G. | Detection of partial discharge or arcing in wiring via fiber optics |
US6928879B2 (en) * | 2003-02-26 | 2005-08-16 | Robert Bosch Gmbh | Episeal pressure sensor and method for making an episeal pressure sensor |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5621372A (en) | 1979-07-31 | 1981-02-27 | Fujitsu Ltd | Manufacture of semiconductor device |
US4933545A (en) | 1985-12-30 | 1990-06-12 | Metricor, Inc. | Optical pressure-sensing system using optical resonator cavity |
US5280173A (en) * | 1992-01-31 | 1994-01-18 | Brown University Research Foundation | Electric and electromagnetic field sensing system including an optical transducer |
DE19623504C1 (en) | 1996-06-13 | 1997-07-10 | Deutsche Forsch Luft Raumfahrt | Optical microphone using Fabry-Perot interferometer and fibre=optics feed line |
EP1061767A4 (en) | 1997-11-19 | 2006-04-05 | Sakuji Fukuda | Speaker system |
US6351593B1 (en) | 1998-11-30 | 2002-02-26 | Three E Laboratories, Inc. | Hermetically sealed connectors and feed-throughs for fiber optic cables and method for effecting hermetic seals for such cables |
US6738145B2 (en) * | 2000-04-14 | 2004-05-18 | Shipley Company, L.L.C. | Micromachined, etalon-based optical fiber pressure sensor |
JP3951613B2 (en) * | 2001-02-09 | 2007-08-01 | 株式会社ケンウッド | Microphone |
DE10225934B4 (en) | 2002-06-11 | 2010-08-19 | Robert Bosch Gmbh | Fiber optic pressure sensor |
KR100512960B1 (en) | 2002-09-26 | 2005-09-07 | 삼성전자주식회사 | Flexible MEMS transducer and its manufacturing method, and flexible MEMS wireless microphone |
US7428054B2 (en) | 2002-10-15 | 2008-09-23 | University Of Maryland | Micro-optical sensor system for pressure, acceleration, and pressure gradient measurements |
US7224465B2 (en) * | 2002-10-15 | 2007-05-29 | University Of Maryland | Fiber tip based sensor system for measurements of pressure gradient, air particle velocity and acoustic intensity |
US7305158B2 (en) * | 2004-04-15 | 2007-12-04 | Davidson Instruments Inc. | Interferometric signal conditioner for measurement of absolute static displacements and dynamic displacements of a Fabry-Perot interferometer |
-
2007
- 2007-05-18 WO PCT/US2007/011955 patent/WO2007136779A2/en active Application Filing
- 2007-05-18 US US11/750,569 patent/US20080075404A1/en not_active Abandoned
-
2008
- 2008-09-25 US US12/237,744 patent/US7697797B2/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5311485A (en) * | 1992-10-30 | 1994-05-10 | The United States Of America As Represented By The United States Department Of Energy | Fiber optic hydrophone |
US6631638B2 (en) * | 2001-01-30 | 2003-10-14 | Rosemount Aerospace Inc. | Fluid flow sensor |
US20040119981A1 (en) * | 2002-09-26 | 2004-06-24 | Russell May | Active Q-point stabilization for linear interferometric sensors |
US6928879B2 (en) * | 2003-02-26 | 2005-08-16 | Robert Bosch Gmbh | Episeal pressure sensor and method for making an episeal pressure sensor |
US20050134837A1 (en) * | 2003-12-23 | 2005-06-23 | Sarkozi Janos G. | Detection of partial discharge or arcing in wiring via fiber optics |
Also Published As
Publication number | Publication date |
---|---|
US20090086214A1 (en) | 2009-04-02 |
US20080075404A1 (en) | 2008-03-27 |
WO2007136779A2 (en) | 2007-11-29 |
US7697797B2 (en) | 2010-04-13 |
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