WO2007143058A3 - Methods for trapping charge in a microelectromechanical system and microelectromechanical system employing same - Google Patents

Methods for trapping charge in a microelectromechanical system and microelectromechanical system employing same Download PDF

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Publication number
WO2007143058A3
WO2007143058A3 PCT/US2007/012878 US2007012878W WO2007143058A3 WO 2007143058 A3 WO2007143058 A3 WO 2007143058A3 US 2007012878 W US2007012878 W US 2007012878W WO 2007143058 A3 WO2007143058 A3 WO 2007143058A3
Authority
WO
WIPO (PCT)
Prior art keywords
mechanical structure
aspects
microelectromechanical system
charge
employed
Prior art date
Application number
PCT/US2007/012878
Other languages
French (fr)
Other versions
WO2007143058A2 (en
Inventor
Markus Lutz
Aaron Partridge
Brian H Stark
Original Assignee
Bosch Gmbh Robert
Markus Lutz
Aaron Partridge
Brian H Stark
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert, Markus Lutz, Aaron Partridge, Brian H Stark filed Critical Bosch Gmbh Robert
Publication of WO2007143058A2 publication Critical patent/WO2007143058A2/en
Publication of WO2007143058A3 publication Critical patent/WO2007143058A3/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H85/00—Protective devices in which the current flows through a part of fusible material and this current is interrupted by displacement of the fusible material when this current becomes excessive
    • H01H85/02—Details
    • H01H85/04—Fuses, i.e. expendable parts of the protective device, e.g. cartridges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0086—Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage

Abstract

Many inventions are disclosed. Some aspects are directed to MEMS, and/or methods for use with and/or for fabricating MEMS, that supply, store, and/or trap charge on a mechanical structure disposed in a chamber. Various structures may be disposed in the chamber and employed in supplying, storing and/or trapping charge on the mechanical structure. In some aspects, a breakable link, a thermionic electron source and/or a movable mechanical structure are employed. The breakable link may comprise a fuse. In one embodiment, the movable mechanical structure is driven to resonate. In some aspects, the electrical charge enables a transducer to convert vibrational energy to electrical energy, which may be used to power circuit(s), device(s) and/or other purpose(s). In some aspects, the electrical charge is employed in changing the resonant frequency of a mechanical structure and/or generating an electrostatic force, which may be repulsive.
PCT/US2007/012878 2006-06-04 2007-05-31 Methods for trapping charge in a microelectromechanical system and microelectromechanical system employing same WO2007143058A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/446,851 US7824943B2 (en) 2006-06-04 2006-06-04 Methods for trapping charge in a microelectromechanical system and microelectromechanical system employing same
US11/446,851 2006-06-04

Publications (2)

Publication Number Publication Date
WO2007143058A2 WO2007143058A2 (en) 2007-12-13
WO2007143058A3 true WO2007143058A3 (en) 2008-02-14

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/012878 WO2007143058A2 (en) 2006-06-04 2007-05-31 Methods for trapping charge in a microelectromechanical system and microelectromechanical system employing same

Country Status (2)

Country Link
US (3) US7824943B2 (en)
WO (1) WO2007143058A2 (en)

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Also Published As

Publication number Publication date
US20070281387A1 (en) 2007-12-06
US20110033967A1 (en) 2011-02-10
US20130106497A1 (en) 2013-05-02
US8343790B2 (en) 2013-01-01
US8766706B2 (en) 2014-07-01
US7824943B2 (en) 2010-11-02
WO2007143058A2 (en) 2007-12-13

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