WO2008017005A3 - Sloping electrodes in a spatial light modulator - Google Patents

Sloping electrodes in a spatial light modulator Download PDF

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Publication number
WO2008017005A3
WO2008017005A3 PCT/US2007/075017 US2007075017W WO2008017005A3 WO 2008017005 A3 WO2008017005 A3 WO 2008017005A3 US 2007075017 W US2007075017 W US 2007075017W WO 2008017005 A3 WO2008017005 A3 WO 2008017005A3
Authority
WO
WIPO (PCT)
Prior art keywords
micromirror
electrode
light modulator
spatial light
substrate
Prior art date
Application number
PCT/US2007/075017
Other languages
French (fr)
Other versions
WO2008017005A2 (en
Inventor
Cuiling Gong
Larry J Hornbeck
Jason M Neidrich
Original Assignee
Texas Instruments Inc
Cuiling Gong
Larry J Hornbeck
Jason M Neidrich
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc, Cuiling Gong, Larry J Hornbeck, Jason M Neidrich filed Critical Texas Instruments Inc
Publication of WO2008017005A2 publication Critical patent/WO2008017005A2/en
Publication of WO2008017005A3 publication Critical patent/WO2008017005A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Abstract

A method of tilting a micromirror (218) includes forming a substrate (202), a micromirror outwardly from the substrate, and at least one electrode (212a) inwardly from the micromirror. The method further includes applying, by the at least one electrode, electrostatic forces sufficient to pivot the micromirror about a pivot point. In addition, the method includes providing the at least one electrode with a sloped outer surface (210a). The sloped outer surface has a first end and a second end. The second end is closer to the pivot point than the first end, and the first end is closer to the substrate than the second end. The method also includes providing at least a portion of the at least one electrode with material properties that at least partially contribute to the sloped profile of the sloped outer surface.
PCT/US2007/075017 2006-08-02 2007-08-02 Sloping electrodes in a spatial light modulator WO2008017005A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/498,910 US7365898B2 (en) 2006-08-02 2006-08-02 Sloping electrodes in a spatial light modulator
US11/498,910 2006-08-02

Publications (2)

Publication Number Publication Date
WO2008017005A2 WO2008017005A2 (en) 2008-02-07
WO2008017005A3 true WO2008017005A3 (en) 2009-01-15

Family

ID=38997853

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/075017 WO2008017005A2 (en) 2006-08-02 2007-08-02 Sloping electrodes in a spatial light modulator

Country Status (2)

Country Link
US (1) US7365898B2 (en)
WO (1) WO2008017005A2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7466476B2 (en) * 2006-08-02 2008-12-16 Texas Instruments Incorporated Sloped cantilever beam electrode for a MEMS device
US20090243011A1 (en) 2008-03-26 2009-10-01 Texas Instruments Incorporated Manufacturing Optical MEMS with Thin-Film Anti-Reflective Layers
DE102013203035A1 (en) * 2013-02-25 2014-08-28 Carl Zeiss Smt Gmbh OPTICAL MODULE
US9348136B2 (en) * 2013-05-14 2016-05-24 Texas Instruments Incorporated Micromirror apparatus and methods
US9864188B2 (en) 2014-11-03 2018-01-09 Texas Instruments Incorporated Operation/margin enhancement feature for surface-MEMS structure; sculpting raised address electrode
US9448484B2 (en) 2014-11-03 2016-09-20 Texas Instruments Incorporated Sloped electrode element for a torsional spatial light modulator

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6351330B2 (en) * 1998-04-10 2002-02-26 Samsung Electronics Co., Ltd. Micromirror device for image display apparatus
US20020041455A1 (en) * 2000-10-10 2002-04-11 Nippon Telegraph And Telephone Corporation Micro-mirror apparatus and production method therefor
US20050117196A1 (en) * 2003-09-22 2005-06-02 Fuji Photo Film Co., Ltd. Spatial light modulator, spatial light modulator array, and exposure apparatus
US7027206B2 (en) * 2004-01-26 2006-04-11 Fuji Photo Film Co., Ltd. Spatial light modulator, spatial light modulator array, and image formation apparatus

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19604242C2 (en) 1996-02-06 1999-09-02 Fraunhofer Ges Forschung Manufacturing method for three-dimensionally shaped metal profiles and application of the method for manufacturing metal profiles for micromechanics
US6552840B2 (en) 1999-12-03 2003-04-22 Texas Instruments Incorporated Electrostatic efficiency of micromechanical devices
US6825967B1 (en) 2000-09-29 2004-11-30 Calient Networks, Inc. Shaped electrodes for micro-electro-mechanical-system (MEMS) devices to improve actuator performance and methods for fabricating the same
KR100413793B1 (en) * 2000-12-05 2003-12-31 삼성전자주식회사 Micromirror actuator
US6487001B2 (en) 2000-12-13 2002-11-26 Agere Systems Inc. Article comprising wedge-shaped electrodes
KR100403812B1 (en) * 2001-06-23 2003-10-30 삼성전자주식회사 Micro actuator
US6798560B2 (en) * 2002-10-11 2004-09-28 Exajoula, Llc Micromirror systems with open support structures
US6825968B2 (en) 2002-10-11 2004-11-30 Exajoule, Llc Micromirror systems with electrodes configured for sequential mirror attraction

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6351330B2 (en) * 1998-04-10 2002-02-26 Samsung Electronics Co., Ltd. Micromirror device for image display apparatus
US20020041455A1 (en) * 2000-10-10 2002-04-11 Nippon Telegraph And Telephone Corporation Micro-mirror apparatus and production method therefor
US20050117196A1 (en) * 2003-09-22 2005-06-02 Fuji Photo Film Co., Ltd. Spatial light modulator, spatial light modulator array, and exposure apparatus
US7027206B2 (en) * 2004-01-26 2006-04-11 Fuji Photo Film Co., Ltd. Spatial light modulator, spatial light modulator array, and image formation apparatus

Also Published As

Publication number Publication date
US20080030841A1 (en) 2008-02-07
WO2008017005A2 (en) 2008-02-07
US7365898B2 (en) 2008-04-29

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