WO2008023686A1 - Élément actionneur piézoélectrique pour moteur à ultrasons - Google Patents
Élément actionneur piézoélectrique pour moteur à ultrasons Download PDFInfo
- Publication number
- WO2008023686A1 WO2008023686A1 PCT/JP2007/066161 JP2007066161W WO2008023686A1 WO 2008023686 A1 WO2008023686 A1 WO 2008023686A1 JP 2007066161 W JP2007066161 W JP 2007066161W WO 2008023686 A1 WO2008023686 A1 WO 2008023686A1
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- WO
- WIPO (PCT)
- Prior art keywords
- piezoelectric
- actuator element
- ultrasonic motor
- piezoelectric actuator
- thickness direction
- Prior art date
Links
- 238000005452 bending Methods 0.000 claims abstract description 9
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 230000010287 polarization Effects 0.000 abstract description 16
- 230000005012 migration Effects 0.000 abstract description 7
- 238000013508 migration Methods 0.000 abstract description 7
- 238000006073 displacement reaction Methods 0.000 abstract description 5
- 238000010030 laminating Methods 0.000 abstract description 5
- 230000006866 deterioration Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 55
- 230000008859 change Effects 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 9
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- 239000000463 material Substances 0.000 description 6
- 230000020169 heat generation Effects 0.000 description 5
- 238000010304 firing Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910001252 Pd alloy Inorganic materials 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- VNSWULZVUKFJHK-UHFFFAOYSA-N [Sr].[Bi] Chemical compound [Sr].[Bi] VNSWULZVUKFJHK-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- -1 bismuth neodymium oxide Chemical compound 0.000 description 1
- FSAJRXGMUISOIW-UHFFFAOYSA-N bismuth sodium Chemical compound [Na].[Bi] FSAJRXGMUISOIW-UHFFFAOYSA-N 0.000 description 1
- 230000001413 cellular effect Effects 0.000 description 1
- 239000011195 cermet Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000011133 lead Substances 0.000 description 1
- HEPLMSKRHVKCAQ-UHFFFAOYSA-N lead nickel Chemical compound [Ni].[Pb] HEPLMSKRHVKCAQ-UHFFFAOYSA-N 0.000 description 1
- JQJCSZOEVBFDKO-UHFFFAOYSA-N lead zinc Chemical compound [Zn].[Pb] JQJCSZOEVBFDKO-UHFFFAOYSA-N 0.000 description 1
- ACNRWWUEFJNUDD-UHFFFAOYSA-N lead(2+);distiborate Chemical compound [Pb+2].[Pb+2].[Pb+2].[O-][Sb]([O-])([O-])=O.[O-][Sb]([O-])([O-])=O ACNRWWUEFJNUDD-UHFFFAOYSA-N 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- LBSANEJBGMCTBH-UHFFFAOYSA-N manganate Chemical compound [O-][Mn]([O-])(=O)=O LBSANEJBGMCTBH-UHFFFAOYSA-N 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000011572 manganese Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- ZBSCCQXBYNSKPV-UHFFFAOYSA-N oxolead;oxomagnesium;2,4,5-trioxa-1$l^{5},3$l^{5}-diniobabicyclo[1.1.1]pentane 1,3-dioxide Chemical compound [Mg]=O.[Pb]=O.[Pb]=O.[Pb]=O.O1[Nb]2(=O)O[Nb]1(=O)O2 ZBSCCQXBYNSKPV-UHFFFAOYSA-N 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- BITYAPCSNKJESK-UHFFFAOYSA-N potassiosodium Chemical compound [Na].[K] BITYAPCSNKJESK-UHFFFAOYSA-N 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000009420 retrofitting Methods 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 229940071182 stannate Drugs 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
- H02N2/004—Rectangular vibrators
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
- H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
Definitions
- the present invention relates to a piezoelectric actuator element for an ultrasonic motor.
- Patent Document 2 discloses an ultrasonic motor element using a primary longitudinal and secondary bending mode, and is formed so as to divide a rectangular piezoelectric layer and the piezoelectric layer into two substantially. There is a description regarding a piezoelectric actuator element formed by alternately laminating electrode layers.
- FIGS. 13 (a) and 13 (b) are schematic views of this piezoelectric actuator element, showing a structure in which piezoelectric layers 10 and electrode layers 12 are alternately stacked.
- This piezoelectric actuator element also operates in the same manner as the piezoelectric element having the structure described in Patent Document 1 above, and excites longitudinal vibration and bending vibration on a vibration body made of the piezoelectric element and drives a member in contact with the vibration.
- Patent Document 1 Japanese Patent No. 2980541
- Patent Document 2 ACTUATOR2006 Preliminary Lecture ⁇ 1 1 (Piezoelectric Ultrasonic Motors for Lens Positioning of Cellular Phone Camera Modules)
- the ultrasonic motor element described in Patent Document 2 contributes to downsizing of the drive circuit compared to the structure described in Patent Document 1, but the piezoelectric sinterability at the center of the element is poor.
- the piezoelectric sinterability at the center of the element is poor.
- the electrode location is the same on the element projection surface (the distance between the electrodes is the same), and it is difficult to apply the lamination pressure to the piezoelectric portion in the vicinity of the electrode edge. There was a problem that was likely to occur.
- An object of the present invention is to provide a piezoelectric actuator element capable of improving the migration resistance in the vicinity of the center in the thickness direction of a multilayered piezoelectric element in which such migration is likely to occur.
- Another object of the present invention is to provide a piezoelectric actuator element that can prevent local heat generation during AC polarization processing and prevent generation of cracks during polarization.
- the piezoelectric layer and the electrode layer formed to divide the piezoelectric layer into approximately two layers are alternately laminated, and the primary longitudinal and secondary bending modes are provided.
- a piezoelectric actuator element for an ultrasonic motor to be used in which a piezoelectric inactive region is formed in a central portion in the thickness direction from the surface portion of the laminated piezoelectric element. .
- a piezoelectric inactive region having a layer thickness of 10% or more of the thickness in the stacking direction is formed in the central portion in the thickness direction from the surface portion of the stacked piezoelectric element.
- the heat generating portion that generates heat when the laminated piezoelectric element is polarized is dispersed.
- the electrode layer is formed so that the formation density of the electrode layer is smaller in the central part in the thickness direction than the surface part of the laminated piezoelectric element. It is preferable that the distance between the electrodes is increased in the central portion in the thickness direction than the surface portion of the multilayer piezoelectric element!
- the electrode layer area is formed to be smaller in the central portion in the thickness direction than the surface portion of the laminated piezoelectric element. It is preferable that no electrode layer is formed at the center in the thickness direction.
- FIG. 1 Figs. 1 (a) and 1 (b) show an embodiment of a piezoelectric actuator element for an ultrasonic motor of the present invention.
- Fig. 1 (a) is a front view
- Fig. 1 (b) Is a side view.
- FIGS. 2 (a) and 2 (b) show other embodiments of the piezoelectric actuator element for an ultrasonic motor of the present invention.
- FIG. 2 (a) is a front view
- FIG. 2 (b) is a front view. It is a side view.
- FIG. 3 is a graph showing a change in the distance between electrodes (interlayer distance) from the upper and lower surfaces of the element to the center of the element.
- FIGS. 4 (a) and 4 (b) show other embodiments of the piezoelectric actuator element for an ultrasonic motor of the present invention.
- FIG. 4 (a) is a front view
- FIG. 4 (b) is a front view. It is a side view.
- FIGS. 5 (a) and 5 (b) show other embodiments of the piezoelectric actuator element for an ultrasonic motor of the present invention.
- FIG. 5 (a) is a front view
- FIG. 5 (b) is a front view. It is a side view.
- FIGS. 6 (a) and 6 (b) show other embodiments of the piezoelectric actuator element for an ultrasonic motor of the present invention.
- FIG. 6 (a) is a front view
- FIG. 6 (b) is a front view. It is a side view.
- FIGS. 7 (a) and 7 (b) show other embodiments of the piezoelectric actuator element for an ultrasonic motor according to the present invention.
- FIG. 7 (a) is a front view
- FIG. It is a side view.
- FIGS. 8 (a) and 8 (b) show other embodiments of the piezoelectric actuator element for an ultrasonic motor according to the present invention.
- FIG. 8 (a) is a front view
- FIG. 8 (b) is a front view. It is a side view.
- FIGS. 9 (a) and 9 (b) show other embodiments of the piezoelectric actuator element for an ultrasonic motor of the present invention.
- FIG. 9 (a) is a front view
- FIG. 9 (b) is a front view. It is a side view.
- FIGS. 10 (a) and 10 (b) show other piezoelectric actuator elements for an ultrasonic motor according to the present invention.
- FIG. 10 (a) is a front view
- FIG. 10 (b) is a side view showing an embodiment.
- FIGS. 11 (a) and 11 (b) show another embodiment of the piezoelectric actuator element for an ultrasonic motor of the present invention.
- FIG. 11 (a) is a front view
- FIG. 11 (b) is a side view.
- FIG. 11 (a) is a front view
- FIG. 11 (b) is a side view.
- FIGS. 12 (a) and 12 (b) show another embodiment of the piezoelectric actuator element for an ultrasonic motor of the present invention.
- FIG. 12 (a) is a front view and
- FIG. 12 (b) is a side view.
- FIG. 12 (a) is a front view
- FIG. 12 (b) is a side view.
- FIGS. 13 (a) and 13 (b) show the outline of the configuration of a conventional piezoelectric actuator element for an ultrasonic motor.
- FIG. 13 (a) is a front view
- FIG. 13 (b) is a side view. is there.
- FIG. 14 shows the generation of cracks during the polarization treatment of piezoelectric elements in Example 2 and Comparative Example 2.
- the piezoelectric actuator element of the present invention is basically composed of a laminated piezoelectric element formed by alternately laminating piezoelectric layers and electrode layers formed so as to divide the piezoelectric layers into two substantially. Yes.
- This laminated piezoelectric element is bent and deformed in a primary longitudinal and secondary bending mode by applying a voltage.
- I will include it here.
- the piezoelectric actuator element of the present invention is characterized in that a piezoelectric inactive region is formed in the inner layer of the laminated piezoelectric element described above.
- This piezoelectric inactive region has a layer thickness of the piezoelectric inactive region that is preferably formed near the center in the thickness direction of the laminated piezoelectric element so that the layer thickness is 10% or more of the thickness in the laminating direction.
- the force is preferably 10% to 50% of the thickness in the direction, and more preferably 10% to 40%.
- the device drive amplitude will be significantly smaller than the input signal when the device is driven, while if it is less than 10%, cracks will occur during polarization. (See Examples 1 and 2 below).
- the laminated piezoelectric element as described above is capable of preventing the occurrence of cracks during polarization because the heat generating portions that generate heat at this time are dispersed in the element. Power, I like it.
- Specific means for dispersing the heat generating part includes forming a piezoelectric inactive region in the inner layer of the laminated piezoelectric element.
- the piezoelectric inactive region is preferably formed in the vicinity of the center in the thickness direction of the multilayer piezoelectric element so that the layer thickness is 10% or more of the thickness in the stack direction.
- the layer thickness is preferably 10% to 50% of the thickness in the stacking direction, more preferably 10% to 40%.
- the formation density of the electrode layer is reduced in the central portion in the thickness direction from the surface portion of the multilayer piezoelectric element.
- the electrode layer area is smaller in the central portion in the thickness direction than the surface of the laminated piezoelectric element. It is preferable that they are formed as follows.
- the electrode layer so that the formation density is smaller in the center in the thickness direction than the surface portion of the multilayer piezoelectric element, migration resistance is improved while suppressing a decrease in displacement, and a short circuit occurs. (Short circuit) can be prevented, and heat generation points during AC polarization can be dispersed, improving reliability. In addition, the amount of electrodes is small, which can contribute to cost reduction.
- the piezoelectric layer it is also possible to use a magneto-electrostrictive ceramic, a ferroelectric ceramic, or an antiferroelectric ceramic in which piezoelectric ceramic is preferably used.
- Specific materials include lead zirconate, lead titanate, lead magnesium niobate, lead nickel niobate, lead zinc niobate, lead manganate niobate, lead antimonate stannate, lead manganese tandate stearate, lead cobalt niobate , Barium titanate, bismuth sodium titanate, tita Examples thereof include ceramics containing bismuth neodymium oxide, potassium sodium niobate, strontium bismuth tantanolate, etc. alone or as a mixture.
- the electrode layer is preferably made of a metal that is solid at room temperature and has excellent conductivity.
- a metal that is solid at room temperature and has excellent conductivity.
- aluminum, titanium, chromium, iron, cobalt, nickel, copper, zinc, niobium, molybdenum , Ruthenium, palladium, rhodium, silver, tin, tantalum, tungsten, iridium, platinum, gold, lead, etc., or their alloys were used, and the same material as the piezoelectric layer was dispersed in them. Cermet material may be used.
- FIGS. 1 (a) and 1 (b) show an embodiment of a piezoelectric actuator element for an ultrasonic motor of the present invention, which is formed so as to divide the piezoelectric layer 10 and the piezoelectric layer 10 into two substantially.
- the electrode layer 12 is alternately laminated, and the piezoelectric inactive region (the electrode layer is formed) from the surface of the laminated piezoelectric element 14 to the central portion in the thickness direction. (! /, Na! /, Region) 11 is formed.
- Reference numeral 15 denotes a friction member.
- FIGS. 2 (a) and 2 (b) show another embodiment of the piezoelectric actuator element according to the present invention.
- the laminated piezoelectric element 14 is formed by alternately laminating the layers 12, and is formed such that the distance between the electrodes is larger at the central portion in the thickness direction than the surface portion of the laminated piezoelectric element 14. That is, the vicinity of the upper and lower surface portions in the thickness direction of the laminated piezoelectric element 14 is the same inter-electrode distance as in the conventional example shown in FIGS.
- the change in the distance between the electrodes from the upper and lower surface portions to the center portion may be linear or exponential, but is preferably exponential. Further, the change in the distance between electrodes (distance between electrode layers) may be made for every plurality of layers (stepped).
- FIG. 4 (a) (13) to FIG. 6 (&) (b) show other embodiments of the piezoelectric actuator element according to the present invention, respectively, in the thickness direction from the surface portion of the laminated piezoelectric element 14.
- the electrode layer 12 is formed so that the area is small. That is, the vicinity of the upper and lower surface portions in the thickness direction of the laminated piezoelectric element 14 has the same electrode length as the conventional example shown in FIGS. 13 (a) and 13 (b), and the center portion in the thickness direction is formed so that the electrode length is shortened. (Centering around the B2 mode inflection point As electrodes are arranged). Here, the rate of change of the electrode length is linear (see Figs.
- FIGS. 6 (a) and 6 (b) are preferable, in which the rate of change is smaller at the center in the thickness direction and the rate of change is greater near the upper and lower surface portions. This is because heat generation in the central portion of the multilayer piezoelectric element 14 that is difficult to dissipate heat is suppressed.
- FIGS. 7 (a), (b) to FIG. 9 (a), (b) also show other embodiments of the piezoelectric actuator element according to the present invention.
- the vicinity of the surface portion has the same electrode width as that of the conventional example shown in FIGS. 13 (a) and 13 (b), and the central portion in the thickness direction is formed so that the electrode width becomes narrow.
- the rate of change of the electrode width is linear (see Figs. 7 (a) and (b)), but is also high-order and exponential (Figs. 8 (a) (b) and 9 (a)
- the embodiment shown in FIGS. 9 (a) and 9 (b) is preferred, with the rate of change being smaller at the center in the thickness direction and the rate of change being greater near the upper and lower surface portions. This is because heat generation at the center of the multilayer piezoelectric element 14 that is difficult to dissipate heat is suppressed.
- FIGS. 10 (a) and 10 (b) show still another embodiment of the piezoelectric actuator element according to the present invention.
- FIGS. 4 (a), (13) to 6 (& ) It can be said that the embodiment of (b) and the embodiments of FIGS. 7 (a), (b) to 9 (a), (b) are added together.
- FIGS. 11 (a) and 11 (b) show still another embodiment of the piezoelectric actuator element according to the present invention.
- the electrode layer is The ceramic plate-like member 16 that is not formed and that is stronger than the material constituting the piezoelectric layer 10 is integrally formed.
- a high-strength ceramic plate-like member 16 such as zirconia is fired in the center in the thickness direction of the multilayer piezoelectric element 14 to form an element, and one of the ceramic plate-like members 16 is formed. End or both ends are laminated piezoelectric A friction member is formed by protruding from the piezoelectric portion of the element 14.
- the electrode layer 18 has a full length. It is formed over. According to this embodiment, by appropriately selecting the number of electrode layers 18 over the entire length, the balance of the X-direction displacement and the y-direction displacement of the friction member 20 due to Ll and B2 vibrations can be optimized, and the driving efficiency can be improved. It can be improved.
- the outer shape is the same as that of Comparative Example 1 described above, and an ultrasonic motor in which a piezoelectric inactive layer is formed at the central portion in the stacking direction so as to be 2 to 40% of the total thickness of the piezoelectric element for an ultrasonic motor.
- a piezoelectric element was produced in the same manner as in Comparative Example 1 (Examples 1 to 10).
- Table 1 shows the results of a 2.8V drive endurance test performed on these devices in an environment of 85 ° C and 85% RH.
- Comparative Example 1 pieoelectric inactive layer 0%
- a short circuit appeared in about 200 hours.
- SEM-EDS SEM-EDS
- the ultrasonic motor using the piezoelectric actuator element of the present invention is capable of positioning a very small distance at high speed and with high accuracy, and has high reliability. Therefore, the autofocus mechanism, zoom mechanism, It can be used as a camera shake correction mechanism, and it is required to have high reliability for stage driving in optical microscopes, electron microscopes, atomic force microscopes, etc. It is also preferably used in the field.
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200780030923XA CN101507093B (zh) | 2006-08-23 | 2007-08-21 | 用于超声电机的压电致动器元件 |
EP07792773.9A EP2056442B1 (en) | 2006-08-23 | 2007-08-21 | Piezoelectric actuator element for ultrasonic motor |
JP2008530911A JP5189983B2 (ja) | 2006-08-23 | 2007-08-21 | 超音波モーター用圧電アクチュエータ素子 |
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US83947506P | 2006-08-23 | 2006-08-23 | |
US60/839,475 | 2006-08-23 | ||
US86443406P | 2006-11-06 | 2006-11-06 | |
US60/864,434 | 2006-11-06 | ||
US86741806P | 2006-11-28 | 2006-11-28 | |
US60/867,418 | 2006-11-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008023686A1 true WO2008023686A1 (fr) | 2008-02-28 |
Family
ID=39106770
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2007/066161 WO2008023686A1 (fr) | 2006-08-23 | 2007-08-21 | Élément actionneur piézoélectrique pour moteur à ultrasons |
Country Status (6)
Country | Link |
---|---|
US (1) | US7564173B2 (ja) |
EP (1) | EP2056442B1 (ja) |
JP (1) | JP5189983B2 (ja) |
KR (1) | KR20090047523A (ja) |
CN (1) | CN101507093B (ja) |
WO (1) | WO2008023686A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010110291A1 (ja) * | 2009-03-25 | 2010-09-30 | 京セラ株式会社 | 積層型圧電素子およびそれを用いた噴射装置ならびに燃料噴射システム |
JP2013161970A (ja) * | 2012-02-06 | 2013-08-19 | Ngk Insulators Ltd | 圧電素子の製造方法 |
JP2014501038A (ja) * | 2010-11-15 | 2014-01-16 | エプコス アクチエンゲゼルシャフト | 圧電素子 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101361204B (zh) * | 2006-01-17 | 2011-04-06 | 株式会社村田制作所 | 共振执行器 |
JP4911066B2 (ja) * | 2007-02-26 | 2012-04-04 | 株式会社デンソー | 積層型圧電素子 |
JP5382320B2 (ja) * | 2009-03-26 | 2014-01-08 | セイコーエプソン株式会社 | 圧電モーター、液体噴射装置及び時計 |
JP2010233339A (ja) * | 2009-03-26 | 2010-10-14 | Seiko Epson Corp | 圧電モーター、液体噴射装置及び時計 |
JP6592993B2 (ja) * | 2015-07-07 | 2019-10-23 | セイコーエプソン株式会社 | 圧電駆動装置及びロボット |
EP3276817A1 (en) | 2016-07-29 | 2018-01-31 | Physik Instrumente (PI) GmbH & Co. Kg | Actuator |
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JPH07337044A (ja) * | 1994-06-07 | 1995-12-22 | Olympus Optical Co Ltd | 超音波アクチュエータ |
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JP2980541B2 (ja) | 1994-06-28 | 1999-11-22 | ナノモーション・リミテッド | マイクロモータ |
JP2001503920A (ja) * | 1996-11-12 | 2001-03-21 | マルコ システムアナリューゼ ウント エントヴィックルング ゲーエムベーハー | 圧電アクチュエータによる駆動または調整要素 |
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US5345137A (en) * | 1991-04-08 | 1994-09-06 | Olympus Optical Co., Ltd. | Two-dimensionally driving ultrasonic motor |
IL106296A0 (en) * | 1993-07-09 | 1993-12-28 | Nanomotion Ltd | Ceramic motor |
US5616980A (en) * | 1993-07-09 | 1997-04-01 | Nanomotion Ltd. | Ceramic motor |
JP2842394B2 (ja) * | 1996-07-30 | 1999-01-06 | 日本電気株式会社 | 圧電素子の製造方法 |
JP3577170B2 (ja) * | 1996-08-05 | 2004-10-13 | 株式会社村田製作所 | 圧電共振子とその製造方法およびそれを用いた電子部品 |
JP2004297951A (ja) * | 2003-03-27 | 2004-10-21 | Olympus Corp | 超音波振動子及び超音波モータ |
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2007
- 2007-08-21 US US11/842,233 patent/US7564173B2/en not_active Expired - Fee Related
- 2007-08-21 CN CN200780030923XA patent/CN101507093B/zh not_active Expired - Fee Related
- 2007-08-21 EP EP07792773.9A patent/EP2056442B1/en not_active Expired - Fee Related
- 2007-08-21 JP JP2008530911A patent/JP5189983B2/ja not_active Expired - Fee Related
- 2007-08-21 KR KR1020097005194A patent/KR20090047523A/ko not_active Application Discontinuation
- 2007-08-21 WO PCT/JP2007/066161 patent/WO2008023686A1/ja active Application Filing
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JPH07337044A (ja) * | 1994-06-07 | 1995-12-22 | Olympus Optical Co Ltd | 超音波アクチュエータ |
JP2980541B2 (ja) | 1994-06-28 | 1999-11-22 | ナノモーション・リミテッド | マイクロモータ |
JPH08228030A (ja) * | 1995-02-21 | 1996-09-03 | Nec Corp | 積層圧電素子 |
JP2001503920A (ja) * | 1996-11-12 | 2001-03-21 | マルコ システムアナリューゼ ウント エントヴィックルング ゲーエムベーハー | 圧電アクチュエータによる駆動または調整要素 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010110291A1 (ja) * | 2009-03-25 | 2010-09-30 | 京セラ株式会社 | 積層型圧電素子およびそれを用いた噴射装置ならびに燃料噴射システム |
JP5409772B2 (ja) * | 2009-03-25 | 2014-02-05 | 京セラ株式会社 | 積層型圧電素子およびそれを用いた噴射装置ならびに燃料噴射システム |
JP2014501038A (ja) * | 2010-11-15 | 2014-01-16 | エプコス アクチエンゲゼルシャフト | 圧電素子 |
US9379308B2 (en) | 2010-11-15 | 2016-06-28 | Epcos Ag | Piezoelectric component |
JP2013161970A (ja) * | 2012-02-06 | 2013-08-19 | Ngk Insulators Ltd | 圧電素子の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2008023686A1 (ja) | 2010-01-14 |
EP2056442A4 (en) | 2013-06-12 |
KR20090047523A (ko) | 2009-05-12 |
EP2056442A1 (en) | 2009-05-06 |
US7564173B2 (en) | 2009-07-21 |
CN101507093B (zh) | 2012-05-23 |
CN101507093A (zh) | 2009-08-12 |
EP2056442B1 (en) | 2014-04-30 |
JP5189983B2 (ja) | 2013-04-24 |
US20080048526A1 (en) | 2008-02-28 |
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