WO2008078182A3 - Micro-electro-mechanical-system micromirrors for high fill factor arrays and method therefore - Google Patents

Micro-electro-mechanical-system micromirrors for high fill factor arrays and method therefore Download PDF

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Publication number
WO2008078182A3
WO2008078182A3 PCT/IB2007/004150 IB2007004150W WO2008078182A3 WO 2008078182 A3 WO2008078182 A3 WO 2008078182A3 IB 2007004150 W IB2007004150 W IB 2007004150W WO 2008078182 A3 WO2008078182 A3 WO 2008078182A3
Authority
WO
WIPO (PCT)
Prior art keywords
movable
electro
micro
mechanical
fill factor
Prior art date
Application number
PCT/IB2007/004150
Other languages
French (fr)
Other versions
WO2008078182A2 (en
WO2008078182B1 (en
WO2008078182A8 (en
Original Assignee
Zhou Tiansheng
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhou Tiansheng filed Critical Zhou Tiansheng
Priority to JP2009543541A priority Critical patent/JP5258787B2/en
Publication of WO2008078182A2 publication Critical patent/WO2008078182A2/en
Publication of WO2008078182A3 publication Critical patent/WO2008078182A3/en
Publication of WO2008078182B1 publication Critical patent/WO2008078182B1/en
Publication of WO2008078182A8 publication Critical patent/WO2008078182A8/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/004—Angular deflection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches

Abstract

A micro-electro-mechanical-system (MEMS) micromirror for use in high fill factor arrays which includes at least one stationary body and a movable body. The movable body has opposed ends and is secured to the stationary body at each of the opposed ends by a resilient primary axis pivot. A mirror support is supported by and movable with the movable body. The mirror support has a first unfettered side and a second unfettered side. A primary axis actuator is provided including a fixed portion connected to the stationary body, and a movable portion connected to the movable body. The movable portion is adapted to move away from the fixed portion in response to an electrical potential difference between the fixed portion and the movable portion, such that the movable body rotates about the primary axis resilient pivot. A mirror is supported by the mirror support.
PCT/IB2007/004150 2006-12-26 2007-12-19 Micro-electro-mechanical-system micromirrors for high fill factor arrays and method therefore WO2008078182A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009543541A JP5258787B2 (en) 2006-12-26 2007-12-19 Microelectromechanical system micromirror for high fill factor array and method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US87703706P 2006-12-26 2006-12-26
US60/877,037 2006-12-26

Publications (4)

Publication Number Publication Date
WO2008078182A2 WO2008078182A2 (en) 2008-07-03
WO2008078182A3 true WO2008078182A3 (en) 2008-08-21
WO2008078182B1 WO2008078182B1 (en) 2008-10-09
WO2008078182A8 WO2008078182A8 (en) 2008-11-27

Family

ID=39563015

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2007/004150 WO2008078182A2 (en) 2006-12-26 2007-12-19 Micro-electro-mechanical-system micromirrors for high fill factor arrays and method therefore

Country Status (3)

Country Link
US (1) US7911672B2 (en)
JP (2) JP5258787B2 (en)
WO (1) WO2008078182A2 (en)

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Also Published As

Publication number Publication date
JP2010515095A (en) 2010-05-06
JP5759494B2 (en) 2015-08-05
US20080151345A1 (en) 2008-06-26
JP5258787B2 (en) 2013-08-07
WO2008078182A2 (en) 2008-07-03
WO2008078182B1 (en) 2008-10-09
WO2008078182A8 (en) 2008-11-27
JP2013127633A (en) 2013-06-27
US7911672B2 (en) 2011-03-22

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