WO2008094854A3 - Reagent dispensing apparatus and delivery method - Google Patents

Reagent dispensing apparatus and delivery method Download PDF

Info

Publication number
WO2008094854A3
WO2008094854A3 PCT/US2008/052175 US2008052175W WO2008094854A3 WO 2008094854 A3 WO2008094854 A3 WO 2008094854A3 US 2008052175 W US2008052175 W US 2008052175W WO 2008094854 A3 WO2008094854 A3 WO 2008094854A3
Authority
WO
WIPO (PCT)
Prior art keywords
wall member
flat surfaces
top wall
dispensing apparatus
opposing flat
Prior art date
Application number
PCT/US2008/052175
Other languages
French (fr)
Other versions
WO2008094854A2 (en
Inventor
Ronald F Spohn
David W Peters
Original Assignee
Praxair Technology Inc
Ronald F Spohn
David W Peters
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Praxair Technology Inc, Ronald F Spohn, David W Peters filed Critical Praxair Technology Inc
Priority to KR1020097017954A priority Critical patent/KR101485615B1/en
Priority to EP08728370.1A priority patent/EP2115345B1/en
Priority to JP2009547452A priority patent/JP2010516901A/en
Publication of WO2008094854A2 publication Critical patent/WO2008094854A2/en
Publication of WO2008094854A3 publication Critical patent/WO2008094854A3/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C9/00—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4409—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber characterised by sealing means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
    • C23C16/4482—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material by bubbling of carrier gas through liquid source material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/08—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing
    • F16J15/0887—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing the sealing effect being obtained by elastic deformation of the packing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
    • F16J15/12—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing with metal reinforcement or covering
    • F16J15/128—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing with metal reinforcement or covering with metal covering
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]

Abstract

This invention relates to a vapor or liquid phase reagent dispensing apparatus comprising a vessel (40) which comprises a removable top wall member (20), a sidewall member (22) and a bottom wall member (26) configured to form an internal vessel compartment; said sidewall member (22) having a protuberance (24) that extends into the internal vessel compartment adjacent to the top wall member (20); said top wall member (20) and said protuberance (24) having opposing flat surfaces, wherein the opposing flat surfaces are not in contact with one another and at least a portion of the opposing flat surfaces are hardened (30); and a metal seal (10) aligned and in contact with the hardened opposing flat surfaces (30) of said top wall member (20) and said protuberance (24). The dispensing apparatus may be used for dispensing of reagents such as precursors for deposition of materials in the manufacture of semiconductor materials and devices.
PCT/US2008/052175 2007-01-29 2008-01-28 Reagent dispensing apparatus and delivery method WO2008094854A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020097017954A KR101485615B1 (en) 2007-01-29 2008-01-28 Reagent dispensing apparatus and delivery method
EP08728370.1A EP2115345B1 (en) 2007-01-29 2008-01-28 Reagent dispensing apparatus and delivery method
JP2009547452A JP2010516901A (en) 2007-01-29 2008-01-28 Reagent dispensing device and transport method

Applications Claiming Priority (20)

Application Number Priority Date Filing Date Title
US89812107P 2007-01-29 2007-01-29
US89794707P 2007-01-29 2007-01-29
US60/898,121 2007-01-29
US60/897,947 2007-01-29
US90372007P 2007-02-27 2007-02-27
US90357907P 2007-02-27 2007-02-27
US60/903,579 2007-02-27
US60/903,720 2007-02-27
US12/014,237 2008-01-15
US12/014,237 US8518483B2 (en) 2007-01-29 2008-01-15 Diptube apparatus and method for delivering vapor phase reagent to a deposition chamber
US12/014,270 US8518484B2 (en) 2007-01-29 2008-01-15 Bubbler apparatus and delivery method
US12/014,228 2008-01-15
US12/014,194 2008-01-15
US12/014,228 US8518482B2 (en) 2007-01-29 2008-01-15 Bubbler apparatus and method for delivering vapor phase reagent to a deposition chamber
US12/014,282 US7959994B2 (en) 2007-01-29 2008-01-15 Diptube apparatus and delivery method
US12/014,270 2008-01-15
US12/014,248 US8524321B2 (en) 2007-01-29 2008-01-15 Reagent dispensing apparatus and delivery method
US12/014,248 2008-01-15
US12/014,282 2008-01-15
US12/014,194 US8512635B2 (en) 2007-01-29 2008-01-15 Apparatus and method for delivering vapor phase reagent to a deposition chamber

Publications (2)

Publication Number Publication Date
WO2008094854A2 WO2008094854A2 (en) 2008-08-07
WO2008094854A3 true WO2008094854A3 (en) 2008-09-25

Family

ID=39666511

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/US2008/052175 WO2008094854A2 (en) 2007-01-29 2008-01-28 Reagent dispensing apparatus and delivery method
PCT/US2008/052184 WO2008094857A2 (en) 2007-01-29 2008-01-28 Reagent dispensing apparatus and delivery method

Family Applications After (1)

Application Number Title Priority Date Filing Date
PCT/US2008/052184 WO2008094857A2 (en) 2007-01-29 2008-01-28 Reagent dispensing apparatus and delivery method

Country Status (6)

Country Link
US (7) US7959994B2 (en)
EP (1) EP2115345B1 (en)
JP (1) JP2010516901A (en)
KR (1) KR101485615B1 (en)
TW (1) TWI468613B (en)
WO (2) WO2008094854A2 (en)

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US10914521B2 (en) * 2019-01-24 2021-02-09 Versum Materials Us, Llc System and method for drying and analytical testing of containers
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Also Published As

Publication number Publication date
WO2008094857A8 (en) 2008-10-02
KR20090125242A (en) 2009-12-04
US20080182023A1 (en) 2008-07-31
TWI468613B (en) 2015-01-11
US7959994B2 (en) 2011-06-14
JP2010516901A (en) 2010-05-20
US8518484B2 (en) 2013-08-27
US8518483B2 (en) 2013-08-27
US20080178809A1 (en) 2008-07-31
KR101485615B1 (en) 2015-01-27
WO2008094854A2 (en) 2008-08-07
US8518482B2 (en) 2013-08-27
WO2008094857A2 (en) 2008-08-07
TW200844360A (en) 2008-11-16
US20080213476A1 (en) 2008-09-04
US8524321B2 (en) 2013-09-03
US8512635B2 (en) 2013-08-20
US20110210142A1 (en) 2011-09-01
EP2115345B1 (en) 2016-08-24
US20080182425A1 (en) 2008-07-31
US8114479B2 (en) 2012-02-14
US20080179767A1 (en) 2008-07-31
EP2115345A2 (en) 2009-11-11
US20080182010A1 (en) 2008-07-31

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