WO2008124084A3 - Nanoelectromechanical systems and methods for making the same - Google Patents

Nanoelectromechanical systems and methods for making the same Download PDF

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Publication number
WO2008124084A3
WO2008124084A3 PCT/US2008/004433 US2008004433W WO2008124084A3 WO 2008124084 A3 WO2008124084 A3 WO 2008124084A3 US 2008004433 W US2008004433 W US 2008004433W WO 2008124084 A3 WO2008124084 A3 WO 2008124084A3
Authority
WO
WIPO (PCT)
Prior art keywords
beams
grown
traces
nanoelectromechanical systems
making
Prior art date
Application number
PCT/US2008/004433
Other languages
French (fr)
Other versions
WO2008124084A2 (en
Inventor
Joseph F Pinkerton
Original Assignee
Joseph F Pinkerton
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Joseph F Pinkerton filed Critical Joseph F Pinkerton
Publication of WO2008124084A2 publication Critical patent/WO2008124084A2/en
Publication of WO2008124084A3 publication Critical patent/WO2008124084A3/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/304—Beam type
    • H10N30/306—Cantilevers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/902—Specified use of nanostructure
    • Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
    • Y10S977/948—Energy storage/generating using nanostructure, e.g. fuel cell, battery

Abstract

Nanoelectromechanical systems are disclosed that utilize vertically grown or placed nanometer-scale beams. The beams may be configured and arranged for use in a variety of applications, such as batteries, generators, transistors, switching assemblies, and sensors. In some generator applications, nanometer-scale beams may be fixed to a base and grown to a desired height. The beams may produce an electric potential as the beams vibrate, and may provide the electric potential to an electrical contact located at a suitable height above the base. In other embodiments, vertical beams may be grown or placed on side-by-side traces, and an electrical connection may be formed between the side-by-side traces when beams on separate traces vibrate and contact one another.
PCT/US2008/004433 2007-04-03 2008-04-03 Nanoelectromechanical systems and methods for making the same WO2008124084A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US92192307P 2007-04-03 2007-04-03
US60/921,923 2007-04-03

Publications (2)

Publication Number Publication Date
WO2008124084A2 WO2008124084A2 (en) 2008-10-16
WO2008124084A3 true WO2008124084A3 (en) 2009-06-18

Family

ID=39831521

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2008/004433 WO2008124084A2 (en) 2007-04-03 2008-04-03 Nanoelectromechanical systems and methods for making the same

Country Status (2)

Country Link
US (2) US7839028B2 (en)
WO (1) WO2008124084A2 (en)

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US20090179523A1 (en) * 2007-06-08 2009-07-16 Georgia Tech Research Corporation Self-activated nanoscale piezoelectric motion sensor
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US8278800B2 (en) * 2008-08-21 2012-10-02 Innowattech Ltd. Multi-layer piezoelectric generator
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FR2946458B1 (en) 2009-06-04 2011-07-08 St Microelectronics Rousset METHOD FOR GENERATING ELECTRIC ENERGY IN AN INTEGRATED CIRCUIT, CORRESPONDING INTEGRATED CIRCUIT, AND MANUFACTURING METHOD
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EP2507847B1 (en) * 2009-11-30 2015-09-23 Joseph F. Pinkerton Piezoelectric energy conversion assemblies
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CN104426414B (en) * 2013-08-23 2016-08-10 纳米新能源（唐山）有限责任公司 Generate electricity effect improved friction generator and preparation method thereof
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Also Published As

Publication number Publication date
US8385113B2 (en) 2013-02-26
US20120091430A1 (en) 2012-04-19
US7839028B2 (en) 2010-11-23
WO2008124084A2 (en) 2008-10-16
US20080251865A1 (en) 2008-10-16

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