WO2009032593A3 - Self diagnostic measurement method to detect microbridge null drift and performance - Google Patents

Self diagnostic measurement method to detect microbridge null drift and performance Download PDF

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Publication number
WO2009032593A3
WO2009032593A3 PCT/US2008/074203 US2008074203W WO2009032593A3 WO 2009032593 A3 WO2009032593 A3 WO 2009032593A3 US 2008074203 W US2008074203 W US 2008074203W WO 2009032593 A3 WO2009032593 A3 WO 2009032593A3
Authority
WO
WIPO (PCT)
Prior art keywords
microbridge
self
null
detect
performance
Prior art date
Application number
PCT/US2008/074203
Other languages
French (fr)
Other versions
WO2009032593A2 (en
Inventor
Lamar F Ricks
Paul P Bey
Original Assignee
Honeywell Int Inc
Lamar F Ricks
Paul P Bey
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Int Inc, Lamar F Ricks, Paul P Bey filed Critical Honeywell Int Inc
Publication of WO2009032593A2 publication Critical patent/WO2009032593A2/en
Publication of WO2009032593A3 publication Critical patent/WO2009032593A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/6965—Circuits therefor, e.g. constant-current flow meters comprising means to store calibration data for flow signal calculation or correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G01F1/699—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters

Abstract

A self-diagnostic measurement method to detect microbridge null drift and performance. An ASIC can be designed to include a self-diagnostic feature that automatically occurs at start up or upon command in Normal Operation whereby the temperature compensated microbridge null can be measured in a state of very low thermal energy and allows for the tracking of microbridge null stability versus time. An Airflow Combi-Sensor ASIC (Heimdal) with its strategic partner ZMD can be developed and can be implemented in the form of a self-diagnostic feature that occurs when power is first applied to the ASIC or upon command. When the self-diagnostic is initiated, power is removed and after the electronics have settled, a small power can be applied to the microbridge to measure the bridge null with reduced sensitivity to flow due to self-heating.
PCT/US2008/074203 2007-08-29 2008-08-25 Self diagnostic measurement method to detect microbridge null drift and performance WO2009032593A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/897,058 US7712347B2 (en) 2007-08-29 2007-08-29 Self diagnostic measurement method to detect microbridge null drift and performance
US11/897,058 2007-08-29

Publications (2)

Publication Number Publication Date
WO2009032593A2 WO2009032593A2 (en) 2009-03-12
WO2009032593A3 true WO2009032593A3 (en) 2009-04-30

Family

ID=40405368

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2008/074203 WO2009032593A2 (en) 2007-08-29 2008-08-25 Self diagnostic measurement method to detect microbridge null drift and performance

Country Status (2)

Country Link
US (1) US7712347B2 (en)
WO (1) WO2009032593A2 (en)

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US9631965B2 (en) 2012-02-15 2017-04-25 Sensortechnics GmbH Offset compensation for flow sensing devices
DE102013226140A1 (en) * 2013-12-17 2015-06-18 Robert Bosch Gmbh Air mass measuring device, air mass measurement system and air mass measurement method for a vehicle
EP3851812B1 (en) 2020-01-14 2022-07-06 Axetris AG Gas flow measuring circuit and gas flow sensor

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JP2004205376A (en) * 2002-12-25 2004-07-22 Noritz Corp Thermal mass flow sensor and gas combustion device
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Also Published As

Publication number Publication date
WO2009032593A2 (en) 2009-03-12
US20090056410A1 (en) 2009-03-05
US7712347B2 (en) 2010-05-11

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