WO2010062670A3 - X-y adjustable optical mount - Google Patents

X-y adjustable optical mount Download PDF

Info

Publication number
WO2010062670A3
WO2010062670A3 PCT/US2009/062694 US2009062694W WO2010062670A3 WO 2010062670 A3 WO2010062670 A3 WO 2010062670A3 US 2009062694 W US2009062694 W US 2009062694W WO 2010062670 A3 WO2010062670 A3 WO 2010062670A3
Authority
WO
WIPO (PCT)
Prior art keywords
actuator
adjustment apparatus
translational adjustment
travel path
linear travel
Prior art date
Application number
PCT/US2009/062694
Other languages
French (fr)
Other versions
WO2010062670A2 (en
Inventor
Douglass L Blanding
Jack W Frankovich
Keith E Hanford
Kevin J Magierski
Original Assignee
Corning Incorporated
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Incorporated filed Critical Corning Incorporated
Priority to CN2009801437291A priority Critical patent/CN102203929B/en
Priority to JP2011534798A priority patent/JP5346090B2/en
Publication of WO2010062670A2 publication Critical patent/WO2010062670A2/en
Publication of WO2010062670A3 publication Critical patent/WO2010062670A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/026—Mountings, adjusting means, or light-tight connections, for optical elements for lenses using retaining rings or springs
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1822—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1822—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
    • G02B7/1824—Manual alignment
    • G02B7/1825—Manual alignment made by screws, e.g. for laser mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y80/00—Products made by additive manufacturing

Abstract

An optical element mount has an inner member suspended within an outer member by a plurality of flexures. A first and a second translational adjustment apparatus are disposed to translate the inner member within a translation plane that is orthogonal to an optical axis, wherein each translational adjustment apparatus has an actuator movable within the outer member along a linear travel path that is parallel to the translation plane and a shaft extending between the outer and inner members, the shaft coupled to the actuator with a first ball-and-socket joint and coupled to the inner member with a second ball-and-socket joint. The linear travel path of the actuator for the first translational adjustment apparatus is substantially orthogonal to the linear travel path of the actuator for the second translational adjustment apparatus.
PCT/US2009/062694 2008-10-30 2009-10-30 X-y adjustable optical mount WO2010062670A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN2009801437291A CN102203929B (en) 2008-10-30 2009-10-30 X-y adjustable optical mount
JP2011534798A JP5346090B2 (en) 2008-10-30 2009-10-30 XY adjustable optical mount

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/261,644 US7916408B2 (en) 2008-10-30 2008-10-30 X-Y adjustable optical mount
US12/261,644 2008-10-30

Publications (2)

Publication Number Publication Date
WO2010062670A2 WO2010062670A2 (en) 2010-06-03
WO2010062670A3 true WO2010062670A3 (en) 2010-07-29

Family

ID=42131071

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2009/062694 WO2010062670A2 (en) 2008-10-30 2009-10-30 X-y adjustable optical mount

Country Status (5)

Country Link
US (1) US7916408B2 (en)
JP (1) JP5346090B2 (en)
KR (1) KR101607724B1 (en)
CN (1) CN102203929B (en)
WO (1) WO2010062670A2 (en)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007014155A1 (en) * 2007-03-20 2008-09-25 Jenoptik Laser, Optik, Systeme Gmbh Optics socket and optical component with such an optical socket
WO2010114466A1 (en) * 2009-03-30 2010-10-07 Ge Healthcare Bio-Sciences Ab Holder for a holographic grating
EP2388145A1 (en) * 2010-05-20 2011-11-23 NanoSec Gesellschaft für Nanotechnologie in der Sicherheitstechnik mbH Deflection mirror unit and device for laser marking with same
US8085482B2 (en) * 2010-05-27 2011-12-27 Corning Incorporated X-Y adjustable optical mount with Z rotation
KR101678065B1 (en) * 2010-12-09 2016-12-07 삼성전자 주식회사 Position arrangement device and joint module
US8542450B2 (en) * 2011-02-08 2013-09-24 Utah State University Research Foundation Kinematic optic mount
US20140240859A1 (en) * 2013-02-28 2014-08-28 Corning Incorporated Optic obscuration assembly, method and system for working on an optical element, and resulting optical element
CN103389554B (en) * 2013-07-29 2015-06-10 中国科学院长春光学精密机械与物理研究所 Support height adjustable optical element multipoint support structure
GB2520540A (en) * 2013-11-25 2015-05-27 European Molecular Biology Lab Embl A removable objective lens arrangement
US10025058B2 (en) * 2014-10-13 2018-07-17 National Applied Reserach Laboratories Gap compensation mechanism for self adaptive posture adjustment
DE102015101385B3 (en) 2015-01-30 2016-01-21 Jenoptik Optical Systems Gmbh Optical socket with at least one clamping unit with a lag screw
DE102015101384B3 (en) * 2015-01-30 2015-11-12 Jenoptik Optical Systems Gmbh Optical socket with at least one clamping unit with a pressure screw
DE102015101387B3 (en) 2015-01-30 2015-12-17 Jenoptik Optical Systems Gmbh Optical socket with at least one clamping unit with a diaphragm spring
CN104749734B (en) * 2015-03-24 2017-04-05 中国科学院长春光学精密机械与物理研究所 A kind of optical element axial location precision adjustment unit
CN105467546B (en) * 2015-12-22 2017-12-26 中国科学院长春光学精密机械与物理研究所 A kind of optical element jog adjustment device of slit flexible structure
DE102016102469B3 (en) 2016-02-12 2016-12-01 Jenoptik Optical Systems Gmbh Optical socket with at least one clamping unit with adhesive gap
CN108152913B (en) * 2017-12-14 2023-12-08 中国科学院西安光学精密机械研究所 Lens cone and method for adjusting coaxiality of primary lens and secondary lens
WO2020246170A1 (en) * 2019-06-03 2020-12-10 パナソニックＩｐマネジメント株式会社 Laser processing head and laser processing device provided with same
CN113009664B (en) * 2021-03-09 2022-08-26 中国人民解放军32801部队 Adjusting device for adjusting optical element, optical element and adjusting method thereof
EP4137263A1 (en) 2021-08-20 2023-02-22 Bystronic Laser AG Support for a transmissive optical element, laser processing device with such support, and process of adjusting the position of a transmissive optical element using such support
CN114295005A (en) * 2021-11-30 2022-04-08 航天科工微电子系统研究院有限公司 Reference mirror adjusting device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5249197A (en) * 1991-11-15 1993-09-28 Amoco Corporation Mounting for an optical component
US6388823B1 (en) * 1998-06-20 2002-05-14 Carl-Zeiss-Stiftung Trading As Carl Zeiss Optical system, especially a projection light facility for microlithography
US20020067555A1 (en) * 2000-08-14 2002-06-06 Johannes Rau Optical element mount comprising an optical element holding frame
WO2007062794A1 (en) * 2005-12-03 2007-06-07 Carl Zeiss Smt Ag Objective, in particular projection objective for semiconductor lithography

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2937571A (en) 1957-10-08 1960-05-24 Ernest B Thompson Optical lens mount
US5172276A (en) * 1989-08-29 1992-12-15 Minolta Camera Kabushiki Kaisha Structure for stabilizing image in optical system
US5428482A (en) * 1991-11-04 1995-06-27 General Signal Corporation Decoupled mount for optical element and stacked annuli assembly
US5363244A (en) * 1992-10-28 1994-11-08 The United States Of America As Represented By The United States Department Of Energy High bandwidth optical mount
JPH10325971A (en) * 1997-05-26 1998-12-08 Minolta Co Ltd Lens driving controller and equipment provided with lens driving controller
US5986827A (en) * 1998-06-17 1999-11-16 The Regents Of The University Of California Precision tip-tilt-piston actuator that provides exact constraint
DE19901295A1 (en) * 1999-01-15 2000-07-20 Zeiss Carl Fa Optical imaging device, in particular objective, with at least one optical element
JP2003337272A (en) * 2002-03-12 2003-11-28 Nikon Corp Device for holding optical system, method of positionally adjusting optical device, lens barrel, exposure device, and method of manufacturing device
US6765733B1 (en) * 2002-03-14 2004-07-20 Nlight Photonics Corporation System and method for mounting components using ball and socket structure
JP2004093663A (en) * 2002-08-29 2004-03-25 Canon Inc Supporting means of optical element, optical apparatus such as optical system by supporting means of optical element and aligner, and device manufacturing method
US6757113B1 (en) 2003-03-18 2004-06-29 Lucent Technologies Inc. Optical grating mount
US7604359B2 (en) * 2004-05-04 2009-10-20 Carl Zeiss Smt Ag High positioning reproducible low torque mirror-actuator interface
JP4751765B2 (en) * 2006-05-17 2011-08-17 オリンパス株式会社 Centering mechanism
JP2008084368A (en) * 2006-09-26 2008-04-10 Funai Electric Co Ltd Objective lens actuator and optical pickup device having the same
US7612956B2 (en) * 2007-02-28 2009-11-03 Corning Incorporated Optical mount pivotable about a single point

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5249197A (en) * 1991-11-15 1993-09-28 Amoco Corporation Mounting for an optical component
US6388823B1 (en) * 1998-06-20 2002-05-14 Carl-Zeiss-Stiftung Trading As Carl Zeiss Optical system, especially a projection light facility for microlithography
US20020067555A1 (en) * 2000-08-14 2002-06-06 Johannes Rau Optical element mount comprising an optical element holding frame
WO2007062794A1 (en) * 2005-12-03 2007-06-07 Carl Zeiss Smt Ag Objective, in particular projection objective for semiconductor lithography

Also Published As

Publication number Publication date
US7916408B2 (en) 2011-03-29
WO2010062670A2 (en) 2010-06-03
JP5346090B2 (en) 2013-11-20
US20100110570A1 (en) 2010-05-06
KR20110090953A (en) 2011-08-10
JP2012507754A (en) 2012-03-29
KR101607724B1 (en) 2016-03-31
CN102203929A (en) 2011-09-28
CN102203929B (en) 2013-08-07

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