WO2013107284A1 - Middle infrared femtosecond mode-locked laser - Google Patents

Middle infrared femtosecond mode-locked laser Download PDF

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Publication number
WO2013107284A1
WO2013107284A1 PCT/CN2013/000040 CN2013000040W WO2013107284A1 WO 2013107284 A1 WO2013107284 A1 WO 2013107284A1 CN 2013000040 W CN2013000040 W CN 2013000040W WO 2013107284 A1 WO2013107284 A1 WO 2013107284A1
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Prior art keywords
laser
mirror
spherical
lens
mode
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PCT/CN2013/000040
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French (fr)
Chinese (zh)
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谢国强
马杰
高文兰
钱列加
吕鹏
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上海交通大学
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
    • H01S3/0811—Construction or shape of optical resonators or components thereof comprising three or more reflectors incorporating a dispersive element, e.g. a prism for wavelength selection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
    • H01S3/1106—Mode locking
    • H01S3/1112—Passive mode locking
    • H01S3/1115—Passive mode locking using intracavity saturable absorbers
    • H01S3/1118—Semiconductor saturable absorbers, e.g. semiconductor saturable absorber mirrors [SESAMs]; Solid-state saturable absorbers, e.g. carbon nanotube [CNT] based
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08018—Mode suppression
    • H01S3/0804—Transverse or lateral modes
    • H01S3/0805—Transverse or lateral modes by apertures, e.g. pin-holes or knife-edges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/0941—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
    • H01S3/09415—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode the pumping beam being parallel to the lasing mode of the pumped medium, e.g. end-pumping

Definitions

  • the invention relates to a mid-infrared solid-state laser, in particular to a mid-infrared femtosecond mode-locked laser.
  • the ultra-fast laser generation technology of the current 0.8-1. 0 ⁇ ⁇ band is very mature, and commercial products in this band are constantly emerging.
  • many ultrafast laser-material interaction processes are closely related to the laser wavelength. Therefore, it is a new challenge to continuously widen the wavelength coverage of ultrafast lasers.
  • the 2-3 micron near-mid-infrared laser band is adjacent to the most mature 1 ⁇ m band of current mode-locked laser technology.
  • the graphene material can be used as a saturable absorbing material to achieve laser mode-locked output in the wavelength range from visible light to far-infrared due to its zero band gap.
  • the mode-locking experiment of graphene in lum and 1. 5um spectral region The results also verified the feasibility of graphene as a mode-locking device in a wide spectral range.
  • the large-area graphene grown by CVD has a very attractive effect on the mid-infrared region compared to the SESAM fabrication and cost advantages. Potentially clamping components.
  • the object of the present invention is to overcome the above-mentioned deficiencies of the prior art, and provide a mid-infrared femtosecond mode-locked laser, which transfers a large-area graphene grown by a CVD method to a laser full mirror as a mode-locking component, in a laser diode Femtosecond laser mode-locked output is achieved in the 2um band using erbium-doped calcium-lithium-tellurium-gallium garnet crystals (Tm : CLNGG crystal) under LD) pumping conditions.
  • a mid-infrared femtosecond mode-locked laser characterized by a laser diode, a collimating mirror, a focusing mirror, an input spherical mirror, a laser medium, a spherical high mirror, a spherical high-reflection mirror, a graphene mode-locking component, and a dispersion compensation
  • the prism pair, the slit, the output coupling mirror, and the connection relationship of each component are: the direction of the pump beam outputted along the laser diode is the collimating mirror, the focusing mirror, the input spherical mirror, the laser medium, the spherical high reverse a laser, the laser light in the laser cavity formed by the input spherical mirror, the spherical high-reflection mirror, the spherical high-focusing mirror, the output coupling mirror, and the graphene-clamping element is reflected by the input spherical mirror to the spherical surface
  • the laser medium is made of an erbium-doped laser crystal, an erbium-doped laser crystal, other mid-infrared laser ceramics, or laser glass.
  • the graphene mode-locking element is a graphene grown by a CVD method and transferred to a high mirror for a laser wavelength, and the high mirror is a dielectric mirror or a metal mirror.
  • the transfer process first coats a layer of polymethyl methacrylate (PMMA) on a graphene-rich copper foil, and then dissolves the copper foil with a solution such as FeCl 3 . After the dissolution is completed, the remaining graphene-attached PMMA is removed. It was cleaned with deionized water and transferred to a laser high-reflex lens. Finally, PMMA was removed with acetone, leaving only graphene attached to the lens.
  • PMMA polymethyl methacrylate
  • the graphene mode-locking element continuously supplies an inert gas to the high-reflection mirror through the external inflator during the operation of the laser to achieve the purpose of shielding the air for protection.
  • the dispersion compensation prism pair is made of CaF 2 , mid-infrared quartz or ZnSe. Compared with the prior art, the beneficial effects of the present invention are:
  • FIG. 1 is a schematic view showing the structure of an infrared femtosecond mode-locked laser of the present invention.
  • FIG. 1 is an infrared femtosecond mode-locked laser according to the present invention.
  • the pump light emitted by the laser diode 1 is collimated by the collimator lens 2 and the focusing mirror 3, and then focused by the input spherical mirror 4.
  • the erbium-doped calcium-lithium-tellurium-gallium garnet crystal Tm: CLNGG5
  • the number of particles is reversed and laser oscillation is formed in the laser cavity.
  • the inverse focusing mirror 7, the input spherical mirror 4, the laser crystal 5, and the spherical high mirror 6 are deflected and reflected by the spherical high mirror 6 to the CaF 2 dispersion compensation prism pair 9, and are compensated by the CaF 2 dispersion compensation prism for 9 dispersion,
  • the slit 10 is selectively incident on the coupled output mirror 11, and the coupled output mirror 11 outputs a femtosecond mode-locked laser pulse sequence.
  • the erbium-doped calcium-cerium-yttrium gallium garnet crystal (Tm: CLNGG5) is replaced with other laser media, such as yttrium-aluminum garnet (Tm:YAG) laser ceramics, or the entire laser cavity structure is unchanged.
  • Tm: CLNGG5 calcium-cerium-yttrium gallium garnet crystal
  • Tm:YAG yttrium-aluminum garnet

Abstract

A middle infrared femtosecond mode-locked laser, comprising a collimator lens (2), a focusing lens (3), an input spherical lens (4), a laser medium (5) and a spherical high-reflection lens (6) sequentially disposed in a pumping light beam direction outputted by a laser diode (1); the input spherical lens (4), the spherical high-reflection lens (6), a spherical high-reflection focusing lens (7), an output coupling lens (11) and a graphene mode-locked element (8) form a five-lens laser resonator; a laser in the five-lens laser resonator is reflected onto the spherical high-reflection focusing lens (7) via the input spherical lens (4), is focused on the graphene mode-locked element (8), goes back along the original path, then sequentially passes through the spherical high-reflection focusing lens (7), the input spherical lens (4), a laser crystal (5) and the spherical high-reflection lens (6), is deflected and reflected onto a dispersion compensation prism pair (9) by the spherical high-reflection lens (6), and is outputted from the output coupling lens (11) through a slit (10). In the manufacturing process, the graphene grown by adopting a CVD method is transferred to a laser wavelength high-reflection lens, and is protected by an inert gas, thus a stable mode-locked laser pulse is outputted within the middle infrared wave band. The laser is simple to adjust and is easy to realize single layer (with low non-saturated loss).

Description

中红外飞秒锁模激光器  Mid-infrared femtosecond mode-locked laser
技术领域 Technical field
本发明涉及中红外固体激光器， 特别是一种中红外飞秒锁模激光器。  The invention relates to a mid-infrared solid-state laser, in particular to a mid-infrared femtosecond mode-locked laser.
背景技术 Background technique
得益于上世纪 80 年代钛宝石等激光材料和锁模技术的发展， 目前 0. 8-1. 0 μ ιη波段的超快激光产生技术非常成熟， 这一波段的商业化产 品不断涌现。 然而， 随着物理学的不断发展， 人们发现很多超快激光与 物质相互作用过程与激光波长密切相关， 因此不断拓宽超快激光的波长 覆盖范围成为当今一个新的挑战。 2-3 微米近中红外激光波段毗邻目前 锁模激光技术最为成熟的 1 μ m波段，该波段超快激光在时间分辨分子光 谱学、光参量啁啾脉冲放大 (0PCPA)、多光子显微镜， 半导体材料微加工 等领域都有着非常重要的潜在应用。但受 2-3 μ m波段的锁模技术与检测 技术的制约， 2-3 μ πι波段激光器锁模目前还存在很多问题， 一方面， 由 于 2-3um激光增益介质较低的发射截面， 不仅使得谐振腔对于调整精度 非常敏感， 而且也大大增加了实现稳定锁模输出激光功率阈值； 另一方 面， 虽然在近红外波段用于锁模的半导体可饱和吸收镜（SESAM)技术非 常成熟， 早已应用到商业化激光器中， 但在中红外波段， 用于固体锁模 激光器的 SESAM仍存在不少问题， 同时 SESAM较高的饱和能流要求也加 大了在 2um波段实现稳定锁模的难度。 而石墨烯材料由于自身零带隙的 特点， 在从可见光到远红外波长范围内都可以作为可饱和吸收材料实现 激光锁模输出， 近年来石墨烯在 lum和 1. 5um光谱区的锁模实验结果也 验证了石墨烯在宽光谱范围内作为锁模器件的可行性， 同时由于 CVD生 长的大面积石墨烯相对于 SESAM制作及成本上的优势使之成为中红外区 域一种非常有吸引力的潜在锁模元件。  Thanks to the development of laser materials and mode-locking technology such as titanium gems in the 1980s, the ultra-fast laser generation technology of the current 0.8-1. 0 μ ιη band is very mature, and commercial products in this band are constantly emerging. However, with the continuous development of physics, many ultrafast laser-material interaction processes are closely related to the laser wavelength. Therefore, it is a new challenge to continuously widen the wavelength coverage of ultrafast lasers. The 2-3 micron near-mid-infrared laser band is adjacent to the most mature 1 μm band of current mode-locked laser technology. This band of ultrafast lasers in time-resolved molecular spectroscopy, optical parametric chirped pulse amplification (0PCPA), multiphoton microscopy, semiconductors There are very important potential applications in the field of material micromachining. However, due to the mode-locking technology and detection technology of the 2-3 μm band, there are still many problems in the 2-3 μ π band laser mode-locking. On the one hand, due to the lower emission cross section of the 2-3 um laser gain medium, The cavity is very sensitive to the adjustment accuracy, and the laser power threshold for stable mode-locked output is greatly increased. On the other hand, although the semiconductor saturable absorption mirror (SESAM) technology for mode-locking in the near-infrared band is very mature, it has already been mature. Applied to commercial lasers, but in the mid-infrared band, SESAM for solid mode-locked lasers still has many problems, and SESAM's higher saturated energy flow requirements also increase the difficulty of stable mode-locking in the 2um band. The graphene material can be used as a saturable absorbing material to achieve laser mode-locked output in the wavelength range from visible light to far-infrared due to its zero band gap. In recent years, the mode-locking experiment of graphene in lum and 1. 5um spectral region The results also verified the feasibility of graphene as a mode-locking device in a wide spectral range. At the same time, the large-area graphene grown by CVD has a very attractive effect on the mid-infrared region compared to the SESAM fabrication and cost advantages. Potentially clamping components.
确认本 发明内容 Confirmation Summary of the invention
本发明的目的在于克服上述现有技术的不足，提供一种中红外飞秒 锁模激光器， 将 CVD方法生长的大面积石墨烯转移到激光全反镜上作为 锁模元件， 在激光二极管（简称为 LD)泵浦条件下利用掺铥钙锂铌镓石 榴石晶体 （Tm: CLNGG晶体） 在 2um波段实现飞秒激光锁模输出。 The object of the present invention is to overcome the above-mentioned deficiencies of the prior art, and provide a mid-infrared femtosecond mode-locked laser, which transfers a large-area graphene grown by a CVD method to a laser full mirror as a mode-locking component, in a laser diode Femtosecond laser mode-locked output is achieved in the 2um band using erbium-doped calcium-lithium-tellurium-gallium garnet crystals (Tm : CLNGG crystal) under LD) pumping conditions.
本发明的技术解决方案如下：  The technical solution of the present invention is as follows:
一种中红外飞秒锁模激光器，特点在于其构成包括激光二极管、准 直镜、 聚焦镜、 输入球面镜、激光介质、 球面高反镜、 球面高反聚焦镜、 石墨烯锁模元件、 色散补偿棱镜对、 狭缝、 输出耦合镜， 各元件的连接 关系是：沿所述的激光二极管输出的泵浦光束方向依次是所述的准直镜、 聚焦镜、 输入球面镜、 激光介质、 球面高反镜， 在所述的输入球面镜、 球面高反镜、 球面高反聚焦镜、 输出耦合镜和石墨烯锁模元件构成的激 光谐振腔中的激光经所述的输入球面镜反射到所述的球面高反聚焦镜 上， 激光经过球面高反聚焦镜聚焦到石墨烯锁模元件后沿原路返回， 依 次再经过球面高反聚焦镜、 输入球面镜、 激光晶体、 球面高反镜， 由该 球面高反镜偏转反射到色散补偿棱镜对， 经所述的色散补偿棱镜对色散 补偿后， 经所述的狭缝选模从输出耦合镜输出。  A mid-infrared femtosecond mode-locked laser characterized by a laser diode, a collimating mirror, a focusing mirror, an input spherical mirror, a laser medium, a spherical high mirror, a spherical high-reflection mirror, a graphene mode-locking component, and a dispersion compensation The prism pair, the slit, the output coupling mirror, and the connection relationship of each component are: the direction of the pump beam outputted along the laser diode is the collimating mirror, the focusing mirror, the input spherical mirror, the laser medium, the spherical high reverse a laser, the laser light in the laser cavity formed by the input spherical mirror, the spherical high-reflection mirror, the spherical high-focusing mirror, the output coupling mirror, and the graphene-clamping element is reflected by the input spherical mirror to the spherical surface On the inverse focusing mirror, the laser is focused by the spherical high-definition focusing mirror to the graphene mode-locking component and then returned along the original path, and then passed through the spherical high-focusing mirror, the input spherical mirror, the laser crystal, and the spherical high-reflection mirror. The mirror is deflected and reflected to the dispersion compensation prism pair, and after the dispersion compensation is performed by the dispersion compensation prism, the slit is selected from the slit An output coupling mirror.
所述的激光介质是掺铥激光晶体、 掺钬的激光晶体、 其他中红外激 光陶瓷、 或激光玻璃制成的。  The laser medium is made of an erbium-doped laser crystal, an erbium-doped laser crystal, other mid-infrared laser ceramics, or laser glass.
所述的石墨烯锁模元件是采用 CVD方法生长的石墨烯转移到对于激 光波长的高反射镜上， 所述的高反射镜是介质镜或金属镜。 转移过程首 先是在生长有石墨烯的铜箔涂覆一层聚甲基丙烯酸甲酯 (PMMA) ,然后利 用 FeCl3等溶液将铜箔溶解， 溶解完成后将剩下的附有石墨烯的 PMMA用 去离子水清洗干净并转移到激光高反镜片上， 最后用丙酮去除掉 PMMA, 这样就只剩下石墨烯附着在镜片上。 The graphene mode-locking element is a graphene grown by a CVD method and transferred to a high mirror for a laser wavelength, and the high mirror is a dielectric mirror or a metal mirror. The transfer process first coats a layer of polymethyl methacrylate (PMMA) on a graphene-rich copper foil, and then dissolves the copper foil with a solution such as FeCl 3 . After the dissolution is completed, the remaining graphene-attached PMMA is removed. It was cleaned with deionized water and transferred to a laser high-reflex lens. Finally, PMMA was removed with acetone, leaving only graphene attached to the lens.
所述的石墨烯锁模元件在激光器运转时通过外置充气装置不断向高 反射镜面通惰性气体以达到隔绝空气进行保护的目的。 所述的色散补偿棱镜对是由 CaF2、 中红外石英或 ZnSe制成的。 与现有技术相比， 本发明的有益效果是： The graphene mode-locking element continuously supplies an inert gas to the high-reflection mirror through the external inflator during the operation of the laser to achieve the purpose of shielding the air for protection. The dispersion compensation prism pair is made of CaF 2 , mid-infrared quartz or ZnSe. Compared with the prior art, the beneficial effects of the present invention are:
( 1 ) 成功实现了中红外波段锁模激光器稳定的连续飞秒激光脉冲输 出。  (1) The continuous continuous femtosecond laser pulse output of the mid-infrared mode-locked laser is successfully realized.
( 2 ) 利用石墨烯可饱和吸收镜在 2um波段实现稳定激光锁模输出， 证实了石墨烯在此波段内作为锁模元件的有效性。  (2) Using a graphene saturable absorption mirror to achieve stable laser mode-locked output in the 2um band, the effectiveness of graphene as a mode-locking component in this band is confirmed.
( 3 ) CVD生长的大面积石墨烯可饱和吸收镜不仅制作相对简单， 成 本低廉， 而且石墨烯相对 SESAM较低的饱和能流使得在相同条件下激光 器更容易实现稳定的连续锁模。  (3) Large-area graphene saturable absorption mirrors grown by CVD are not only relatively simple to manufacture, but also low in cost, and the lower saturated energy flow of graphene relative to SESAM makes it easier for the laser to achieve stable continuous mode-locking under the same conditions.
(4)利用商业化的激光二极管（Laser Diode)作为泵浦源， 避免了 钛宝石激光器作为泵浦源带来的 2um波段锁模激光器泵浦系统价格昂 贵、 体积庞大等问题。  (4) The use of a commercial laser diode (Laser Diode) as a pump source avoids the problem of expensive and bulky 2um band mode-locked laser pumping systems brought by the Ti:Sapphire laser as a pump source.
附图说明 DRAWINGS
图 1是本发明中红外飞秒锁模激光器的结构示意图。  1 is a schematic view showing the structure of an infrared femtosecond mode-locked laser of the present invention.
具体实施方式 detailed description
下面结合实施例和附图对本发明作进一步说明， 但不应以此限制本 发明的保护范围。  The invention is further illustrated by the following examples and drawings, but should not be construed as limiting the scope of the invention.
请参阅图 1， 图 1是本发明中红外飞秒锁模激光器， 如图所示， 激 光二极管 1发出的泵浦光由准直镜 2和聚焦镜 3准直聚焦后， 经过输入 球面镜 4聚焦到掺铥钙锂铌镓石榴石晶体（Tm: CLNGG5 )内， 引起粒子数 反转并在激光谐振腔内形成激光振荡。 激光谐振腔中的激光经输入球面 镜 4反射到所述的球面高反聚焦镜 7上， 激光经过球面高反聚焦镜 7聚 焦到石墨烯锁模元件 8后沿原路返回， 依次再经过球面高反聚焦镜 7、 输入球面镜 4、 激光晶体 5、 球面高反镜 6， 由该球面高反镜 6偏转反射 到 CaF2色散补偿棱镜对 9， 经 CaF2色散补偿棱镜对 9色散补偿后， 通过 狭缝 10选模入射到耦合输出镜 11上，由耦合输出镜 11输出飞秒锁模激 光脉冲序列。 Please refer to FIG. 1. FIG. 1 is an infrared femtosecond mode-locked laser according to the present invention. As shown in the figure, the pump light emitted by the laser diode 1 is collimated by the collimator lens 2 and the focusing mirror 3, and then focused by the input spherical mirror 4. In the erbium-doped calcium-lithium-tellurium-gallium garnet crystal (Tm: CLNGG5), the number of particles is reversed and laser oscillation is formed in the laser cavity. The laser light in the laser cavity is reflected by the input spherical mirror 4 onto the spherical high-reflection mirror 7, and the laser is focused by the spherical high-focusing mirror 7 to the graphene mode-locking element 8 and then returns along the original path, and then passes through the spherical surface. The inverse focusing mirror 7, the input spherical mirror 4, the laser crystal 5, and the spherical high mirror 6 are deflected and reflected by the spherical high mirror 6 to the CaF 2 dispersion compensation prism pair 9, and are compensated by the CaF 2 dispersion compensation prism for 9 dispersion, The slit 10 is selectively incident on the coupled output mirror 11, and the coupled output mirror 11 outputs a femtosecond mode-locked laser pulse sequence.
此外，在整个激光谐振腔结构不变的情况下，把掺铥钙锂铌镓石榴 石晶体 （Tm: CLNGG5) 换成其他激光介质， 如掺铥乙铝石榴石 （Tm:YAG) 激光陶瓷或掺铥激光玻璃， 可实现同样效果。  In addition, the erbium-doped calcium-cerium-yttrium gallium garnet crystal (Tm: CLNGG5) is replaced with other laser media, such as yttrium-aluminum garnet (Tm:YAG) laser ceramics, or the entire laser cavity structure is unchanged. The same effect can be achieved by erbium-doped laser glass.

Claims

权 利 要 求 Rights request
1.一种中红外飞秒锁模激光器， 特征在于其构成包括激光二极管 ( 1 )、 准直镜（2)、 聚焦镜（3)、 输入球面镜（4)、 激光介质 （5)、 球 面高反镜（6)、 球面高反聚焦镜（7)、 石墨烯锁模元件（8)、 色散补偿 棱镜对（9)、 狭缝（10)、 输出耦合镜（11 )， 各元件的连接关系是： 沿 所述的激光二极管（1 )输出的泵浦光束方向依次是所述的准直镜（2)、 聚焦镜（3)、 输入球面镜（4.)、 激光介质（5)、 球面高反镜（6)， 在所 述的输入球面镜（4)、 球面高反镜（6)、 球面高反聚焦镜（7)、 输出耦 合镜 （11 ) 和石墨烯锁模元件 （8) 构成的激光谐振腔中的激光经所述 的输入球面镜（4)反射到所述的球面高反聚焦镜（7)上， 激光经过球 面高反聚焦镜（7)聚焦到石墨烯锁模元件（8)后沿原路返回， 依次再 经过球面高反聚焦镜（7)、 输入球面镜（4)、 激光晶体（5)、 球面高反 镜 （6)， 由该球面高反镜 （6) 偏转反射到色散补偿棱镜对 （9)， 经所 述的色散补偿棱镜对 （9) 色散补偿后， 经所述的狭缝 （10) 选模从输 出耦合镜 （11 ) 输出。 A mid-infrared femtosecond mode-locked laser characterized by comprising a laser diode (1), a collimating mirror (2), a focusing mirror (3), an input spherical mirror (4), a laser medium (5), and a spherical surface Mirror (6), spherical high-reflection mirror (7), graphene mode-locking element (8), dispersion compensation prism pair (9), slit (10), output coupling mirror (11), connection relationship of each component Yes: The direction of the pump beam outputted along the laser diode (1) is the collimating mirror (2), the focusing mirror (3), the input spherical mirror (4.), the laser medium (5), and the spherical surface. a mirror (6), which is composed of the input spherical mirror (4), the spherical high mirror (6), the spherical high back focus mirror (7), the output coupling mirror (11), and the graphene mode-locking element (8) The laser light in the laser cavity is reflected by the input spherical mirror (4) onto the spherical high-focusing mirror (7), and the laser is focused by the spherical high-focusing mirror (7) to the graphene mode-locking element (8) The trailing edge returns, and then passes through the spherical high-focusing mirror (7), the input spherical mirror (4), and the laser crystal (5). a spherical high mirror (6), which is deflected and reflected by the spherical high mirror (6) to the dispersion compensation prism pair (9), after the dispersion compensation by the dispersion compensation prism pair (9), through the slit (10) The mode selection is output from the output coupling mirror (11).
2.根据权利要求 1所述的中红外飞秒锁模激光器，其特征在于所述 的激光介质 （5) 是掺铥的激光晶体、 激光陶瓷或激光玻璃制成的， 或 者是掺钬的激光晶体、 激光陶瓷或激光玻璃制成的。  2. A mid-infrared femtosecond mode-locked laser according to claim 1, wherein said laser medium (5) is made of erbium-doped laser crystal, laser ceramic or laser glass, or erbium-doped laser. Made of crystal, laser ceramic or laser glass.
3.根据权利要求 1所述的中红外飞秒锁模激光器，其特征在于所述 的石墨烯锁模元件 （8) 是采用 CVD方法生长的石墨烯转移到对于激光 波长的高反射镜上， 所述的高反射镜是介质镜或金属镜。  3. The mid-infrared femtosecond mode-locked laser according to claim 1, wherein said graphene mode-locking element (8) is a graphene grown by a CVD method and transferred to a high mirror for a laser wavelength. The high mirror is a dielectric mirror or a metal mirror.
4.根据权利要求 1所述的中红外飞秒锁模激光器，其特征在于所述 的石墨烯锁模元件 （8) 在激光器运转时有惰性气体保护。 4. The mid-infrared femtosecond mode-locked laser of claim 1 wherein said The graphene mode-locking element (8) is inert gas-protected while the laser is running.
5. 根据权利要求 1所述的中红外飞秒锁模激光器，其特征在于所述 的色散补偿棱镜对 （9) 是由 CaF2、 中红外石英或 ZnSe制成的。 5. The mid-infrared femtosecond mode-locked laser according to claim 1, wherein said dispersion compensating prism pair (9) is made of CaF 2 , mid-infrared quartz or ZnSe.
PCT/CN2013/000040 2012-01-20 2013-01-17 Middle infrared femtosecond mode-locked laser WO2013107284A1 (en)

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