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A rotation rate sensor which uses a double ended tuning fork having a mounting base with only a single exclusive mounting surface. The mounting base is surrounded and centrally disposed within the body of the tuning fork. The mounting base is joined to the body by a suspension system which is also disposed within the body of the tuning fork. The tuning fork is mounted in the housing only at the single exclusive mounting surface.

InventorsPiyush K. Gupta, Craig E. Jenson
Original AssigneeNew S.D., Inc.
Current U.S. Classification310/370; 73/504.16; 310/348; 310/367
International Classification: H01L 4108; G01C 1956

View patent at USPTO
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Citations

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US4538461Jan 23, 1984Sep 3, 1985Piezoelectric Technology Investors, Inc.Vibratory angular rate sensing system
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US4654663Nov 16, 1981Mar 31, 1987Piezoelectric Technology Investors, Ltd.Angular rate sensor system
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Referenced by

Citing PatentFiling dateIssue dateOriginal AssigneeTitle
US5708320Oct 27, 1995Jan 13, 1998Alps Electric Co., Ltd
Yoshiro Tomikawa
Vibratory gyroscope
US5969249May 6, 1998Oct 19, 1999The Regents of the University of CaliforniaResonant accelerometer with flexural lever leverage system
US5987987Apr 13, 1998Nov 23, 1999Denso CorporationAngular velocity sensor, related method for manufacturing the sensor, and piezoelectric vibrator element used in this sensor
US6134962Jul 10, 1997Oct 24, 2000Toyota Jidosha Kabushiki KaishaAngular velocity detecting apparatus of a vibration type
US6177756Dec 30, 1998Jan 23, 2001Fujitsu LimitedPiezoelectric gyro and method of driving the piezoelectric gyro
US6186003Oct 5, 1998Feb 13, 2001NGK Insulators, Ltd.Vibratory gyroscope, vibrator used in this gyroscope, method for analyzing vibration of the vibrator, method for supporting the vibrator, and method for manufacturing the vibratory gyroscope
US6262520Sep 15, 1999Jul 17, 2001BEI Technologies, Inc.Inertial rate sensor tuning fork
US6360600Sep 9, 1999Mar 26, 2002Denso CorporationAngular velocity sensor, related method for manufacturing the sensor, and piezoelectric vibrator element used in this sensor
US6507141Apr 6, 2001Jan 14, 2003BEI Technologies, Inc.Inertial rate sensor tuning fork
US6651498Jun 29, 2000Nov 25, 2003NGK Insulators, Ltd.Vibratory gyroscope, vibrator used in this gyroscope, method for analyzing vibration of the vibrator, method for supporting the vibrator, and method for manufacturing the vibratory gyroscope
US6701785Jun 26, 2001Mar 9, 2004BEI Technologies, Inc.Tuning fork with symmetrical mass balancing and reduced quadrature error
US7124632Jul 26, 2004Oct 24, 2006BEI Technologies, Inc.Electronically configurable rate sensor circuit and method
US7237169Jul 26, 2004Jun 26, 2007BEI Technologies, Inc.Cross-monitoring sensor system and method
US7523537Jul 13, 2000Apr 28, 2009Custom Sensors & Technologies, Inc.Method of manufacturing a tuning fork with reduced quadrature errror and symmetrical mass balancing
US7571648May 23, 2007Aug 11, 2009Seiko Epson Corporation
Rutgers, The State University of New Jersey
Piezoelectric vibration angular velocity sensor
US7723905May 7, 2008May 25, 2010Sony CorporationVibrating gyrosensor driven with offset potential
US7813047Aug 31, 2007Oct 12, 2010Hand Held Products, Inc.Apparatus and method comprising deformable lens element
US7975546Dec 20, 2007Jul 12, 2011TDK CorporationAngular velocity sensor and angular velocity sensing device
US8027095Oct 11, 2006Sep 27, 2011Hand Held Products, Inc.Control systems for adaptive lens
US8027096Jul 23, 2007Sep 27, 2011Hand Held Products, Inc.Focus module and components with actuator polymer control
US8056414Mar 26, 2008Nov 15, 2011TDK CorporationAngular velocity sensor and angular velocity sensing device
US8176606Jan 27, 2009May 15, 2012Seiko Instruments Inc.Method of fabricating a piezoelectric vibrating piece
USD516500Jan 14, 2004Mar 7, 2006Seiko Epson CorporationPiezo electric resonator
USD520940Jan 14, 2004May 16, 2006Seiko Epson CorporationPiezo electric resonator

Claims

1. A tuning fork for use in a rotation rate sensor, comprising:

a pair of drive tines;
a pair of pickup tines;
a body having an internal perimeter, said drive tines and pickup tines joined to said body;
a mounting base having a mounting surface disposed within said internal perimeter of said body; and
a suspension system disposed within said internal perimeter of said body and joining said mounting base to said body.

2. The tuning fork of claim 1 wherein said mounting surface is substantially centrally disposed within said internal perimeter of said body.

3. A tuning fork, comprising:

a body having an internal perimeter;
a pair of drive tines joined to said body;
a pair of pickup tines joined to said body;
a mounting base disposed within said internal perimeter of said body for mounting said tuning fork; and
a suspension system disposed within said internal perimeter of said body and joining said mounting base to said body.

4. The tuning fork of claim 3 wherein said mounting base is substantially centrally disposed within said internal perimeter of said body.

5. The tuning fork of claim 3 wherein said suspension system includes:

a first and a second cross bridge each joined to said mounting base; and
a first and second pair of suspension bridges, said first pair of suspension bridges each joined to said first cross bridge and to said body, said second pair of suspension bridges each joined to said second cross bridge and to said body.

6. The tuning fork of claim 3 wherein said suspension system includes a pair of bridges each joined to said mounting base and said body.

7. A rotation rate sensor, comprising:

a housing; and
a double ended tuning fork including:
a body having an internal perimeter;
a pair of drive tines joined to said body;
a pair of pickup tines joined to said body;
a mounting base disposed within said internal perimeter of said body and having a mounting surface, said tuning fork mounted to said housing at said mounting surface; and
a suspension system disposed within said internal perimeter of said body and joining said mounting base to said body.

8. The rotation rate sensor of claim 7 wherein said suspension system includes:

a first and a second cross bridge each joined to said mounting base; and
a first and second pair of suspension bridges, said first pair of suspension bridges each joined to said first cross bridge and to said body, said second pair of suspension bridges each joined to said second cross bridge and to said body.

9. The rotation rate sensor of claim 7 wherein said suspension system includes a pair of bridges each joined to said mounting base and said body.

10. The rotation rate sensor of claim 7 further comprising:

a drive high and a drive low contact pad fixed to said mounting base; and
a pickup high and a pickup low contact pad fixed to said mounting base.

11. The rotation rate sensor of claim 10 wherein:

said housing includes a mounting structure, said mounting structure including a drive high contact element, a drive low contact element, a pickup low contact element, and a pickup high contact element;
said drive high contact pad, said drive low contact pad, said pickup high contact pad, and said pickup low contact pad are all disposed on said mounting surface and respectively connected to said drive high contact element, said drive low contact element, said pickup low contact element, and said pickup high contact element.

12. The rotation rate sensor of claim 11 wherein said drive high contact pad, said drive low contact pad, said pickup high contact pad, and said pickup low contact pad are respectively connected to said drive high contact element, said drive low contact element, said pickup low contact element, and said pickup high contact element with an electrically conductive bonding material.

13. A tuning fork comprising:

a generally planar body having a peripheral frame and an internal cavity defined by said frame;
a pair of drive tines extending from and coplanar with said frame;
a pair of pickup tines coplanar with said frame and said drive tines extending from said frame in a direction opposite to said drive tines; and
a generally planar mounting base disposed within said cavity and connected to said frame, said mounting base having a generally planar mounting surface lying in a plane parallel to the tines and within the cavity for mounting the tuning fork to an external structure.

14. A tuning fork, comprising:

a body having a peripheral frame and an internal cavity defined by said frame;
a pair of drive tines extending from said frame;
a pair of pickup tines extending from said frame in a direction opposite to said drive tines;
a mounting base disposed within said cavity and spaced from said frame; and
a suspension system disposed within said cavity and interconnecting said mounting base and said frame.

15. The tuning fork of claim 14 wherein said frame is generally planar and said drive tines, said pickup tines, and said mounting base are coplanar with said frame.

16. A tuning fork comprising:

a body having a generally planar frame and an internal cavity defined by said frame;
a pair of drive tines extending from and coplanar with said frame;
a pair of pickup tines extending from and coplanar with said frame;
a mounting base disposed within said cavity and spaced from said frame;
first and second cross bridges disposed within said cavity and connected to said mounting base;
a first pair of suspension bridges disposed within said cavity and connected between said first cross bridge and said frame; and
a second pair of suspension bridges disposed within said cavity and connected between said second cross bridge and said frame.

17. The tuning fork of claim 16 wherein said mounting base is coplanar with said frame.

18. The tuning fork of claim 16 wherein said drive tines and said pickup tines extend from said frame in opposite directions.

19. The tuning fork of claim 16 wherein:

said cross bridges extend from said mounting base in opposite directions; and
said first pair of suspension bridges is oppositely disposed within said cavity from said second pair of suspension bridges.

20. A tuning fork comprising:

a body having a generally planar frame and an internal cavity defined by said frame;
a pair of drive tines extending from and coplanar with said frame;
a pair of pickup tines extending from and coplanar with said frame;
mounting means disposed within said cavity and spaced from said frame;
a pair of bridges disposed within said cavity and interconnecting said mounting base and said frame.

21. The tuning fork of claim 20 wherein said mounting base is coplanar with said frame.

22. The tuning fork of claim 20 wherein said drive tines and said pickup tines extend from said frame in opposite directions.

23. The tuning fork of claim 20 wherein said pair of bridges extend from said mounting base in opposite directions.