Metal silicates or phosphates are deposited on a heated substrate by the reaction of vapors of alkoxysilanols or alkylphosphates along with reactive metal amides, alkyls or alkoxides. For example, vapors of tris(tert-butoxy)silanol react with vapors of tetrakis(ethylmethylamido)hafnium to deposit hafnium...http://www.google.com/patents/US7507848?utm_source=gb-gplus-sharePatent US7507848 - Vapor deposition of metal oxides, silicates and phosphates, and silicon dioxide
