The present invention discloses a micromirror device with multi-axis rotational and translational motion. Newly introduced structure of the top electrode plate improves structural stability, flexibility, and more motion efficiency of the micromirror device. The invention also improves controllability...http://www.google.com/patents/US7365899?utm_source=gb-gplus-sharePatent US7365899 - Micromirror with multi-axis rotation and translation
