A semiconductor device manufacturing method and a semiconductor device manufacturing system for irradiating a first laser light (50) and a second laser light (52) with a wavelength different from that of the first laser light to a substrate (46) to perform a thermal processing on the substrate are provided....http://www.google.com/patents/US7943534?utm_source=gb-gplus-sharePatent US7943534 - Semiconductor device manufacturing method and semiconductor device manufacturing system
