Provided is a plasma processing method for generating microplasma in a space of a microplasma source arranged in the vicinity of an object to be processed by supplying gas to the space and supplying electric power to a member located in the vicinity of the space, making activated particles emitted from...http://www.google.com/patents/US7056416?utm_source=gb-gplus-sharePatent US7056416 - Atmospheric pressure plasma processing method and apparatus
