An apparatus capable of high accuracy position and motion control utilizes one or more linear commutated motors to move a guideless stage in one long linear direction and small yaw rotation in a plane. A carrier/follower holding a single voice coil motor (VCM) is controlled to approximately follow the...http://www.google.com/patents/US20030184254?utm_source=gb-gplus-sharePatent US20030184254 - Electromagnetic alignment and scanning apparatus
