An electromechanical transducer is provided, and the process for making it, which utilizes a piezoresistive element or gage which is crystallinally the same as the base or substrate upon which it is supported. The gage of the invention is a force gage, and is derived from its substrate by etching in...http://www.google.com/patents/US4498229?utm_source=gb-gplus-sharePatent US4498229 - Piezoresistive transducer
