A thin film transistor (TFT) and a manufacturing method thereof are provided. The thin film transistor (TFT) comprises a substrate, a gate, an inter-gate dielectric layer, a channel layer and source/drain regions. A gate is formed over the substrate. An inter-gate dielectric layer is formed over the...http://www.google.com/patents/US7375372?utm_source=gb-gplus-sharePatent US7375372 - Thin film transistor
