A micromechanical sensor includes a support of silicon substrate having an epitaxial layer of silicon applied on the silicon substrate. A part of the epitaxial layer is laid bare to form at least one micromechanical deflection part by an etching process. The bared deflection part is made of polycrystalline...http://www.google.com/patents/US5616514?utm_source=gb-gplus-sharePatent US5616514 - Method of fabricating a micromechanical sensor
