Maintaining proper planarity of elements of a microelectronic component test system helps ensure reliable operation of the test system. Aspects of the invention provide test systems and methods for verifying planarity of, for example, a head and a support surface of a microelectronic component test system....http://www.google.com/patents/US7019512?utm_source=gb-gplus-sharePatent US7019512 - Planarity diagnostic system, e.g., for microelectronic component test systems
