Apparatus and method for evaporation arc stabilization including a target having a surface of material of non-permeable material to be evaporated; circuitry for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles...http://www.google.com/patents/US4448659?utm_source=gb-gplus-sharePatent US4448659 - Method and apparatus for evaporation arc stabilization including initial target cleaning
