A microelectromechanical system (MEMS) sensor and method for measuring the motion of an intermediate member and a method for making the MEMS sensor. The MEMS sensor includes a substrate, a lower magnetic member disposed on the substrate, a layer disposed over the substrate, an upper magnetic member disposed...http://www.google.com/patents/US7453269?utm_source=gb-gplus-sharePatent US7453269 - Magnetic MEMS sensor device
