Methods of fabricating a microelectromechanical systems (MEMS) device with reduced masking and MEMS devices formed by the same are disclosed. In one embodiment, a MEMS device is fabricated by laminating a front substrate and a carrier, each of which has components preformed thereon. The front substrate...http://www.google.com/patents/US7719752?utm_source=gb-gplus-sharePatent US7719752 - MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
