A micrometer sized, single-stage, vertical thermal actuator with controlled bending capable of repeatable and rapid movement of a micrometer-sized optical device off the surface of a substrate. The vertical thermal actuator is constructed on a surface of a substrate. At least one hot arm has a first...http://www.google.com/patents/US6531947?utm_source=gb-gplus-sharePatent US6531947 - Direct acting vertical thermal actuator with controlled bending
