A temperature control system 145 is used to control the temperature of a process chamber 25 during processing of a semiconductor substrate 70. The temperature control system 145 comprises a heat exchanger plate 155 for removing heat from the chamber 25, and a heat transfer member 158 for conducting heat...http://www.google.com/patents/US20010042594?utm_source=gb-gplus-sharePatent US20010042594 - PROCESS CHAMBER HAVING IMPROVED TEMPERATURE CONTROL
