There is disclosed herein an integrated scanning tunneling microscope and an integrated piezoelectric transducer and methods for making both. The device consists of one or two arm piezoelectric bimorph cantilevers formed by micromachining using standard integrated circuit processing steps. These cantilevers...http://www.google.com/patents/US5017266?utm_source=gb-gplus-sharePatent US5017266 - Method of making an integrated scanning tunneling microscope
