Integrated circuit fabrication technique for constructing novel MEMS devices, specifically band-pass filter resonators, in a manner compatible with current integrated circuit processing, and completely encapsulated to optimize performance and eliminate environmental corrosion. The final devices may be...http://www.google.com/patents/US6275122?utm_source=gb-gplus-sharePatent US6275122 - Encapsulated MEMS band-pass filter for integrated circuits
