An electromechanical switch with a rigidified electrode includes an actuation electrode, a suspended electrode, a contact, and a signal line. The actuation electrode is disposed on a substrate. The suspended electrode is suspended proximate to the actuation electrode and includes a rigidification structure....http://www.google.com/patents/US7605675?utm_source=gb-gplus-sharePatent US7605675 - Electromechanical switch with partially rigidified electrode
