A table moving within a plane parallel with respect to a guide plane of a base is located within an opening of a moveable frame moving along the guide plane so as to be guided in an X-direction by an X-direction guide. The table moves in a Y-direction within the moveable frame. The base member and the...http://www.google.com/patents/US6351041?utm_source=gb-gplus-sharePatent US6351041 - Stage apparatus and inspection apparatus having stage apparatus
