A robotic arm assembly in a transport module is expansible to have an effector at its end receive a substrate in a cassette module and is then contracted and rotated with the effector to have the effector face a process module. Planets on a turntable in the process module are rotatable on first parallel...http://www.google.com/patents/US5882403?utm_source=gb-gplus-sharePatent US5882403 - System for providing a controlled deposition on wafers
