A discharge-pumped excimer laser device has a casing, a pair main discharge electrodes, a cross-flow fan for producing a high-speed laser gas flow between the main discharge electrodes, the cross-flow fan having a rotatable shaft projecting from opposite ends thereof, magnetic bearings, the rotatable...http://www.google.com/patents/US6603787?utm_source=gb-gplus-sharePatent US6603787 - Discharge-pumped excimer laser device
