A method and apparatus for reducing speckle during inspection of articles used in the manufacture of semiconductor devices, including wafers, masks, photomasks, and reticles. The coherence of a light beam output by a coherent light source, such as a pulsed laser, is reduced by disposing elements in a...http://www.google.com/patents/US7463352?utm_source=gb-gplus-sharePatent US7463352 - Method and apparatus for article inspection including speckle reduction
