The present invention relates to a capacitive micro-electro-mechanical switch and method of manufacturing the same. In the capacitive micro-electro-mechanical switch for use in the radio frequency (RF) and the microwave driven by the electrostatic force, a capacitor of a 3-dimensional structure is formed...http://www.google.com/patents/US20030151879?utm_source=gb-gplus-sharePatent US20030151879 - Capacitive micro-electro-mechanical switch and method of manufacturing the same
