A high throughput sputtering apparatus which provides a single or multi-layer coating to the surface of a plurality of substrates. The apparatus comprises a plurality of buffer and sputtering chambers which include an input end and an output end. The substrates are transported through the chambers at...http://www.google.com/patents/US5972184?utm_source=gb-gplus-sharePatent US5972184 - Heating system for high throughput sputtering
