An exposure apparatus radiates an exposure light beam from an exposure light source onto a reticle via an illumination optical system including a first fly's eye lens, a second fly's eye lens, a lens system, a blind, and a condenser lens system, and it projects an image of a pattern on the reticle onto...http://www.google.com/patents/US20030025890?utm_source=gb-gplus-sharePatent US20030025890 - Exposure apparatus and exposure method capable of controlling illumination distribution
