A process for cleaning a silicon electrode is provided where the silicon electrode is soaked in an agitated aqueous detergent solution and rinsed with water following removal from the aqueous detergent solution. The rinsed silicon electrode is then soaked in an agitated isopropyl alcohol (IPA) solution...http://www.google.com/patents/US8075703?utm_source=gb-gplus-sharePatent US8075703 - Immersive oxidation and etching process for cleaning silicon electrodes