A microelectromechanical switch includes a substrate, an insulator layer disposed outwardly from the substrate, and an electrode disposed outwardly from the insulator layer. The switch also includes a dielectric layer disposed outwardly from the insulator layer and the electrode, the dielectric layer...http://www.google.com/patents/US6764872?utm_source=gb-gplus-sharePatent US6764872 - Microelectromechanical switch
